JP6501601B2 - 基板処理装置、基板処理方法及び基板処理プログラム - Google Patents

基板処理装置、基板処理方法及び基板処理プログラム Download PDF

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Publication number
JP6501601B2
JP6501601B2 JP2015087044A JP2015087044A JP6501601B2 JP 6501601 B2 JP6501601 B2 JP 6501601B2 JP 2015087044 A JP2015087044 A JP 2015087044A JP 2015087044 A JP2015087044 A JP 2015087044A JP 6501601 B2 JP6501601 B2 JP 6501601B2
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Prior art keywords
recipe
processing
substrate
partial
processing procedure
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JP2015087044A
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English (en)
Japanese (ja)
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JP2016001726A (ja
JP2016001726A5 (enrdf_load_stackoverflow
Inventor
佐々木　満
満 佐々木
達也 三浦
達也 三浦
利弘 大野
利弘 大野
和宗 小野
和宗 小野
翔子 遠藤
翔子 遠藤
竜 北原
竜 北原
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Priority to JP2015087044A priority Critical patent/JP6501601B2/ja
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to KR1020167020130A priority patent/KR102364319B1/ko
Priority to US15/304,570 priority patent/US10128121B2/en
Priority to TW104115712A priority patent/TWI684664B/zh
Priority to CN201580020853.4A priority patent/CN106233427B/zh
Priority to PCT/JP2015/064214 priority patent/WO2015178348A1/ja
Publication of JP2016001726A publication Critical patent/JP2016001726A/ja
Publication of JP2016001726A5 publication Critical patent/JP2016001726A5/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/3065—Plasma etching; Reactive-ion etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32926—Software, data control or modelling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
    • H01L21/02299—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
    • H01L21/02318—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
JP2015087044A 2014-05-20 2015-04-21 基板処理装置、基板処理方法及び基板処理プログラム Active JP6501601B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2015087044A JP6501601B2 (ja) 2014-05-20 2015-04-21 基板処理装置、基板処理方法及び基板処理プログラム
US15/304,570 US10128121B2 (en) 2014-05-20 2015-05-18 Substrate processing apparatus, substrate processing method and substrate processing program
TW104115712A TWI684664B (zh) 2014-05-20 2015-05-18 基板處理裝置，基板處理方法及基板處理程式
CN201580020853.4A CN106233427B (zh) 2014-05-20 2015-05-18 基板处理装置和基板处理方法
KR1020167020130A KR102364319B1 (ko) 2014-05-20 2015-05-18 기판 처리 장치, 기판 처리 방법 및 기판 처리 프로그램
PCT/JP2015/064214 WO2015178348A1 (ja) 2014-05-20 2015-05-18 基板処理装置、基板処理方法及び基板処理プログラム

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2014104206 2014-05-20
JP2014104206 2014-05-20
JP2015087044A JP6501601B2 (ja) 2014-05-20 2015-04-21 基板処理装置、基板処理方法及び基板処理プログラム

Publications (3)

Publication Number Publication Date
JP2016001726A JP2016001726A (ja) 2016-01-07
JP2016001726A5 JP2016001726A5 (enrdf_load_stackoverflow) 2018-03-29
JP6501601B2 true JP6501601B2 (ja) 2019-04-17

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JP2015087044A Active JP6501601B2 (ja) 2014-05-20 2015-04-21 基板処理装置、基板処理方法及び基板処理プログラム

Country Status (6)

Country Link
US (1) US10128121B2 (enrdf_load_stackoverflow)
JP (1) JP6501601B2 (enrdf_load_stackoverflow)
KR (1) KR102364319B1 (enrdf_load_stackoverflow)
CN (1) CN106233427B (enrdf_load_stackoverflow)
TW (1) TWI684664B (enrdf_load_stackoverflow)
WO (1) WO2015178348A1 (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6517845B2 (ja) * 2017-01-17 2019-05-22 株式会社荏原製作所 スケジューラ、基板処理装置、及び基板搬送方法
JP6586443B2 (ja) * 2017-10-10 2019-10-02 東京エレクトロン株式会社 被処理体を処理する方法
WO2019159735A1 (ja) * 2018-02-16 2019-08-22 東京エレクトロン株式会社 加工装置
JP7226949B2 (ja) * 2018-09-20 2023-02-21 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理システム
WO2021240572A1 (ja) * 2020-05-25 2021-12-02 株式会社日立ハイテク 半導体装置製造システムおよび半導体装置製造方法
WO2024185561A1 (ja) * 2023-03-06 2024-09-12 東京エレクトロン株式会社 コンピュータプログラム、情報処理方法及び情報処理装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0982589A (ja) * 1995-09-18 1997-03-28 Kokusai Electric Co Ltd 半導体製造装置の処理システム
JP3708031B2 (ja) * 2001-06-29 2005-10-19 株式会社日立製作所 プラズマ処理装置および処理方法
US7292906B2 (en) * 2004-07-14 2007-11-06 Tokyo Electron Limited Formula-based run-to-run control
JP5128080B2 (ja) 2006-03-29 2013-01-23 東京エレクトロン株式会社 基板処理装置の制御装置およびその制御方法
US7542820B2 (en) * 2006-09-28 2009-06-02 Lam Research Corporation Methods and arrangement for creating recipes using best-known methods
JP2009054674A (ja) * 2007-08-24 2009-03-12 Tokyo Electron Ltd 製造装置、操作ログ蓄積方法、及びプログラム
JP5028193B2 (ja) * 2007-09-05 2012-09-19 株式会社日立ハイテクノロジーズ 半導体製造装置における被処理体の搬送方法

Also Published As

Publication number Publication date
TWI684664B (zh) 2020-02-11
WO2015178348A1 (ja) 2015-11-26
JP2016001726A (ja) 2016-01-07
CN106233427A (zh) 2016-12-14
KR20170004951A (ko) 2017-01-11
TW201610210A (zh) 2016-03-16
US10128121B2 (en) 2018-11-13
US20170040177A1 (en) 2017-02-09
CN106233427B (zh) 2019-07-09
KR102364319B1 (ko) 2022-02-16

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