JP6500713B2 - 加速度センサ - Google Patents
加速度センサ Download PDFInfo
- Publication number
- JP6500713B2 JP6500713B2 JP2015175996A JP2015175996A JP6500713B2 JP 6500713 B2 JP6500713 B2 JP 6500713B2 JP 2015175996 A JP2015175996 A JP 2015175996A JP 2015175996 A JP2015175996 A JP 2015175996A JP 6500713 B2 JP6500713 B2 JP 6500713B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- covering
- piezoelectric
- acceleration sensor
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000001133 acceleration Effects 0.000 title claims description 63
- 239000010410 layer Substances 0.000 claims description 99
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- 229920005989 resin Polymers 0.000 claims description 3
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- 238000009736 wetting Methods 0.000 claims description 2
- 238000003475 lamination Methods 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 description 9
- 238000004544 sputter deposition Methods 0.000 description 7
- 230000010287 polarization Effects 0.000 description 5
- 238000001514 detection method Methods 0.000 description 4
- 229910010293 ceramic material Inorganic materials 0.000 description 3
- 239000003822 epoxy resin Substances 0.000 description 3
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 3
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229920000647 polyepoxide Polymers 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
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- 238000005476 soldering Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
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- 229910052709 silver Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
Description
Claims (4)
- 基板上に半田によって取り付けられるべき加速度センサであって、
積層構造を有する素子本体部と、
前記半田が形成されるべき一対の端子電極と、
該端子電極を覆い、半田非濡れ材料で構成された被覆部と
を備え、
前記素子本体部は、前記素子本体部の積層方向において一対の電極層が圧電層を挟んだ構造の圧電素子構造を少なくとも一つ含む圧電部と、前記圧電部の前記基板に対向する側である一方側に積層されたベース層と、前記圧電部の他方側に積層されたおもり層とを有し、
前記一対の端子電極は、前記圧電部の前記電極層が引き出される前記素子本体部の側面に設けられ、前記素子本体部のベース層の高さ位置から、少なくとも、引き出された前記電極層の高さ位置まで延び、
前記被覆部は、前記素子本体部の前記側面において、前記端子電極のうちの少なくとも前記電極層を覆う部分の端子電極を覆っており、かつ、前記ベース層を覆う前記端子電極の少なくとも一部を露出させた状態で前記ベース層を覆っている、加速度センサ。 - 前記被覆部は、前記ベース層側の端部に、前記圧電層側に凹んだ凹部を有する、請求項1に記載の加速度センサ。
- 前記被覆部は、樹脂で構成されており、
前記圧電部は、前記ベース層および前記おもり層と接着層を介して接合されており、
前記被覆部は、前記素子本体部の前記側面に露出した前記接着層と直接接している、請求項1または2に記載の加速度センサ。 - 前記接着層は、前記素子本体部の前記側面において、積層方向に直交する方向における前記端子電極の両側に露出しており、
前記被覆部は、前記側面において、積層方向に直交する方向において前記端子電極を跨ぐように覆っており、前記端子電極の両側に露出した前記接着層の両方と直接接している、請求項3に記載の加速度センサ。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015175996A JP6500713B2 (ja) | 2015-09-07 | 2015-09-07 | 加速度センサ |
CN201610806679.2A CN106501546B (zh) | 2015-09-07 | 2016-09-06 | 加速度传感器 |
US15/257,511 US10018649B2 (en) | 2015-09-07 | 2016-09-06 | Acceleration sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015175996A JP6500713B2 (ja) | 2015-09-07 | 2015-09-07 | 加速度センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017053653A JP2017053653A (ja) | 2017-03-16 |
JP6500713B2 true JP6500713B2 (ja) | 2019-04-17 |
Family
ID=58189743
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015175996A Active JP6500713B2 (ja) | 2015-09-07 | 2015-09-07 | 加速度センサ |
Country Status (3)
Country | Link |
---|---|
US (1) | US10018649B2 (ja) |
JP (1) | JP6500713B2 (ja) |
CN (1) | CN106501546B (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20220142636A (ko) * | 2021-04-15 | 2022-10-24 | 현대자동차주식회사 | 전자식 변속조작장치 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62172173U (ja) * | 1986-04-11 | 1987-10-31 | ||
GB2224598B (en) * | 1988-11-02 | 1992-08-19 | Plessey Co Plc | A piezoelectric shear mode accelerometer |
CN1093320C (zh) * | 1994-12-12 | 2002-10-23 | 株式会社村田制作所 | 压电元件及其制造方法 |
JPH10270288A (ja) * | 1997-03-25 | 1998-10-09 | Murata Mfg Co Ltd | 複合型電子部品 |
DE69942382D1 (de) * | 1998-03-12 | 2010-07-01 | Yamatake Corp | Sensor und verfahren zu dessen herstellung |
JP3596364B2 (ja) * | 1999-08-05 | 2004-12-02 | 松下電器産業株式会社 | 超音波送受波器および超音波流れ計測装置 |
JP4066786B2 (ja) * | 2001-12-28 | 2008-03-26 | 株式会社村田製作所 | 力学量センサ |
JP2007101448A (ja) * | 2005-10-06 | 2007-04-19 | Tdk Corp | 加速度センサ及び加速度センサの製造方法 |
JP4466610B2 (ja) * | 2006-05-26 | 2010-05-26 | Tdk株式会社 | 加速度センサおよび加速度センサの製造方法 |
US7671519B2 (en) * | 2007-08-31 | 2010-03-02 | Cts Corporation | Bond pad for use with piezoelectric ceramic substrates |
JP5693194B2 (ja) * | 2010-12-14 | 2015-04-01 | シチズン電子株式会社 | 発光ダイオード |
JP5637170B2 (ja) * | 2012-04-19 | 2014-12-10 | 株式会社村田製作所 | 積層型セラミック電子部品およびその実装構造体 |
JP6175780B2 (ja) * | 2013-01-28 | 2017-08-09 | セイコーエプソン株式会社 | 超音波デバイス、超音波プローブ、電子機器および超音波画像装置 |
KR101508539B1 (ko) * | 2013-07-09 | 2015-04-07 | 삼성전기주식회사 | 적층 세라믹 커패시터 및 그 실장 기판 |
KR101983154B1 (ko) * | 2013-11-05 | 2019-05-28 | 삼성전기주식회사 | 적층 세라믹 커패시터 |
-
2015
- 2015-09-07 JP JP2015175996A patent/JP6500713B2/ja active Active
-
2016
- 2016-09-06 CN CN201610806679.2A patent/CN106501546B/zh active Active
- 2016-09-06 US US15/257,511 patent/US10018649B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
JP2017053653A (ja) | 2017-03-16 |
CN106501546B (zh) | 2019-09-03 |
US10018649B2 (en) | 2018-07-10 |
CN106501546A (zh) | 2017-03-15 |
US20170067930A1 (en) | 2017-03-09 |
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