JP6458742B2 - 近接センサ - Google Patents
近接センサ Download PDFInfo
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- JP6458742B2 JP6458742B2 JP2016008365A JP2016008365A JP6458742B2 JP 6458742 B2 JP6458742 B2 JP 6458742B2 JP 2016008365 A JP2016008365 A JP 2016008365A JP 2016008365 A JP2016008365 A JP 2016008365A JP 6458742 B2 JP6458742 B2 JP 6458742B2
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- Prior art keywords
- coil
- coils
- proximity sensor
- detected object
- detected
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/22—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils
- G01D5/2208—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils by influencing the self-induction of the coils
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/023—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring distance between sensor and object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/22—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils
- G01D5/2208—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils by influencing the self-induction of the coils
- G01D5/2225—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils by influencing the self-induction of the coils by a movable non-ferromagnetic conductive element
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
- H03K17/94—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the way in which the control signals are generated
- H03K17/945—Proximity switches
- H03K17/95—Proximity switches using a magnetic detector
- H03K17/952—Proximity switches using a magnetic detector using inductive coils
- H03K17/9525—Proximity switches using a magnetic detector using inductive coils controlled by an oscillatory signal
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Geophysics And Detection Of Objects (AREA)
Description
図1は本発明の一実施形態に係る近接センサ1のコイル部10による被検出物体Wの位置検出の原理を説明する概略断面図である。
図2(a)〜(d)は近接センサ1のコイル部10が異なる2通りのパターンで励磁された場合のそれぞれの磁界と被検出物体Wとの位置関係を示す概略断面図である。なお、それぞれの図の左端がコイル11、12の中心軸の位置に対応しており(中心軸自体の図示は省略)、コイル11、12の右半分のみを示している。また、励磁パターン(単にパターンともいう)とは、例えば、励磁するコイルの組み合わせ、励磁する電流の向きの組み合わせ(それぞれのコイルで右回りの電流と左回りの電流とがある)、励磁電流の大きさの組み合わせ(それぞれのコイルの電流の大きさを何段階かに変化させる)などのことであるが、これらに限らない。
図3(a)〜(c)はコイル部10の第1変形例として、3つのコイル11〜13を有するコイル部10Aが異なる3通りのパターンで励磁された場合のそれぞれの磁界を示す概略断面図である。なお、それぞれの図の左端がコイル11〜13の中心軸Xの位置に対応しており(図3(b)、(c)では中心軸X自体の図示を省略)、コイル11〜13の右半分のみを示している。
図4はコイル部10に用いるコアの具体例を示す概略断面図である。図5(a)、(b)はコイル部10Aに用いるコアの具体例をそれぞれ示す概略断面図である。図6(a)、(b)はコイル部10の第2変形例であるコイル部10Bおよび第3変形例であるコイル部10Cをそれぞれ示す概略断面図である。
図7(a)、(b)はコイル部10の具体的な励磁パターンをそれぞれ示す概略断面図である。図8(a)〜(c)はコイル部10Bの具体的な励磁パターンをそれぞれ示す概略断面図である。図9(a)〜(g)はコイル部10Aの具体的な励磁パターンをそれぞれ示す概略断面図である。図10(a)〜(g)はコイル部10Cの具体的な励磁パターンをそれぞれ示す概略断面図である。なお、これらの図中の実線が励磁するコイル、破線が励磁しないコイルをそれぞれ示している。
図11はコイル部10を備える近接センサ1の受信関連部分の概略構成を示すブロック図である。
10、10A、10B、10C
コイル部
11、12、13
コイル
21、21A、22、22A
コア
31 第1距離算出部
32 第2距離算出部
33 位置推定部
Claims (3)
- 予め定められた位置関係に配置された2以上のコイルと、
これら前記コイルのうち複数のコイルの受信結果に基づいて、前記受信結果を得たコイルから被検出物体までの各距離情報をそれぞれ算出する距離算出部と、
前記各距離情報および前記位置関係に基づいて前記被検出物体の位置を推定する位置推定部と
を備え、
前記各コイルは、2以上の異なる組み合わせで選択的に励磁され、
前記距離算出部は、前記各コイルの選択的励磁毎に、複数のコイルから前記被検出物体までの前記各距離情報をそれぞれ算出し、
前記位置推定部は、前記位置関係および前記選択的励磁毎に算出された前記各距離情報に基づいて前記被検出物体の前記位置を推定することを特徴とする近接センサ。 - 請求項1に記載の近接センサにおいて、
前記各コイルは、同軸に配置されていることを特徴とする近接センサ。 - 請求項1または2に記載の近接センサにおいて、
前記各コイルは、同一平面上に配置されていることを特徴とする近接センサ。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016008365A JP6458742B2 (ja) | 2016-01-20 | 2016-01-20 | 近接センサ |
US15/751,156 US10488226B2 (en) | 2016-01-20 | 2017-01-06 | Proximity sensor |
CN201780002803.2A CN107923732B (zh) | 2016-01-20 | 2017-01-06 | 接近传感器 |
EP17741221.0A EP3407009A4 (en) | 2016-01-20 | 2017-01-06 | PROXIMITY SENSOR |
PCT/JP2017/000291 WO2017126341A1 (ja) | 2016-01-20 | 2017-01-06 | 近接センサ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016008365A JP6458742B2 (ja) | 2016-01-20 | 2016-01-20 | 近接センサ |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2017129431A JP2017129431A (ja) | 2017-07-27 |
JP2017129431A5 JP2017129431A5 (ja) | 2018-03-29 |
JP6458742B2 true JP6458742B2 (ja) | 2019-01-30 |
Family
ID=59361553
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016008365A Active JP6458742B2 (ja) | 2016-01-20 | 2016-01-20 | 近接センサ |
Country Status (5)
Country | Link |
---|---|
US (1) | US10488226B2 (ja) |
EP (1) | EP3407009A4 (ja) |
JP (1) | JP6458742B2 (ja) |
CN (1) | CN107923732B (ja) |
WO (1) | WO2017126341A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102538861B1 (ko) | 2017-12-26 | 2023-06-01 | 가부시키가이샤 에바라 세이사꾸쇼 | 자성 소자 및 그것을 사용한 와전류식 센서 |
JP7179586B2 (ja) * | 2018-11-08 | 2022-11-29 | 株式会社荏原製作所 | 渦電流検出装置及び研磨装置 |
DK3654532T3 (da) * | 2018-11-16 | 2022-06-07 | Bently Nevada Llc | Proksimitetsregistreringssystem med komponentkompatibilitetstestning |
DE102019209035A1 (de) * | 2019-06-21 | 2020-12-24 | Infineon Technologies Ag | Erfassen einer diskreten positionsbeziehung zwischen einem magnetfeldgeber und einer magnetfeldsensoranordnung |
Family Cites Families (25)
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JPH053921Y2 (ja) * | 1989-02-09 | 1993-01-29 | ||
US5200704A (en) * | 1991-02-28 | 1993-04-06 | Westinghouse Electric Corp. | System and method including a buried flexible sheet target impregnated with ferromagnetic particles and eddy current probe for determining proximity of a non-conductive underground structure |
JPH0729466A (ja) | 1993-07-13 | 1995-01-31 | Omron Corp | 近接スイッチ |
JP3772151B2 (ja) * | 1994-04-21 | 2006-05-10 | オリンパス株式会社 | 挿入部位置検出装置 |
JPH11304405A (ja) * | 1998-04-22 | 1999-11-05 | Mitsubishi Heavy Ind Ltd | 位置検出装置及びそれを用いた位置検出方法 |
US6498478B2 (en) * | 2000-08-14 | 2002-12-24 | Radic Co., Ltd. | Azimuth measuring method, azimuth measuring apparatus, position measuring method, and position measuring apparatus |
WO2003002947A1 (fr) * | 2001-06-29 | 2003-01-09 | Matsushita Electric Works, Ltd. | Capteur de position |
WO2004003479A2 (de) * | 2002-06-26 | 2004-01-08 | Micro-Epsilon Messtechnik Gmbh & Co. Kg | Sensorspule und wegmesssensor |
DE10259223B3 (de) * | 2002-11-20 | 2004-02-12 | Mehnert, Walter, Dr. | Positionsdetektor |
WO2005042969A1 (de) * | 2003-09-30 | 2005-05-12 | Fev Motorentechnik Gmbh | Sensoranordnung zur erfassung der bewegung eines durch einen aktuator hin und her bewegten stellgliedes |
DE102004049753B3 (de) * | 2004-10-08 | 2006-04-13 | Siemens Ag | Verfahren und Anordnung zum Bestimmen des Abstandes einer in Richtung der Abstandsbestimmung profilierten, leitfähigen Oberfläche von einer sich relativ zu der Oberfläche bewegenden Funktionsfläche |
US7233396B1 (en) * | 2006-04-17 | 2007-06-19 | Alphasniffer Llc | Polarization based interferometric detector |
JP2008002202A (ja) * | 2006-06-23 | 2008-01-10 | Toa Harbor Works Co Ltd | 地中位置検出装置 |
US7782046B2 (en) * | 2007-02-05 | 2010-08-24 | General Electric Company | Electromagnetic tracking method and system |
JP2009109220A (ja) * | 2007-10-26 | 2009-05-21 | Aisan Ind Co Ltd | 位置センサ |
GB2472275A (en) * | 2009-07-31 | 2011-02-02 | Oxford Rf Sensors Ltd | Proximity sensor |
US8508242B2 (en) * | 2010-01-25 | 2013-08-13 | Ksr Technologies Co. | Inductive position sensor |
CN101788259B (zh) * | 2010-03-04 | 2012-09-05 | 上海雷尼威尔测量技术有限公司 | 双丝差动型磁致伸缩位移传感器 |
EP2369291B1 (en) * | 2010-03-10 | 2015-09-23 | PolyResearch AG | Sensor for height measurement |
JP4852667B1 (ja) | 2011-03-04 | 2012-01-11 | 株式会社マコメ研究所 | 近接センサ |
DE102012214199A1 (de) * | 2012-08-09 | 2014-04-03 | Bayerische Motoren Werke Aktiengesellschaft | Vorrichtung und Verfahren zur Positionierung durch Triangulation |
JP2014086954A (ja) | 2012-10-25 | 2014-05-12 | Panasonic Corp | 非接触検出装置 |
US9562758B2 (en) * | 2013-04-15 | 2017-02-07 | Stemco Kaiser Incorporated | Distance measurement sensor based on magnetic signal triangulation |
CN103673856A (zh) * | 2013-12-20 | 2014-03-26 | 沈阳洪达信息科技有限公司 | 一种位置传感器 |
CA2944585A1 (en) * | 2014-04-21 | 2015-10-29 | Nucleus Scientific, Inc. | Inductive position sensing in linear actuators |
-
2016
- 2016-01-20 JP JP2016008365A patent/JP6458742B2/ja active Active
-
2017
- 2017-01-06 US US15/751,156 patent/US10488226B2/en active Active
- 2017-01-06 CN CN201780002803.2A patent/CN107923732B/zh active Active
- 2017-01-06 EP EP17741221.0A patent/EP3407009A4/en active Pending
- 2017-01-06 WO PCT/JP2017/000291 patent/WO2017126341A1/ja active Application Filing
Also Published As
Publication number | Publication date |
---|---|
EP3407009A4 (en) | 2019-08-07 |
US20180231398A1 (en) | 2018-08-16 |
EP3407009A1 (en) | 2018-11-28 |
CN107923732A (zh) | 2018-04-17 |
JP2017129431A (ja) | 2017-07-27 |
CN107923732B (zh) | 2020-02-07 |
WO2017126341A1 (ja) | 2017-07-27 |
US10488226B2 (en) | 2019-11-26 |
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