JP6373160B2 - プラズマ処理装置 - Google Patents
プラズマ処理装置 Download PDFInfo
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Description
<条件>
処理ガス:Krガス、50sccm
処理容器12内の圧力:5mTorr(0.1333Pa)
高周波電源150A及び高周波電源150Bの電力:50W
変調直流電圧の電圧値:200V
変調直流電圧の変調周波数:400kHz
変調直流電圧のオン・デューティ比:50%
<条件>
処理ガス:Krガス、50sccm
処理容器12内の圧力:5mTorr(0.1333Pa)
高周波電源150A及び高周波電源150Bの電力:50W
変調直流電圧の電圧値:200V(図10の実測では可変)
変調直流電圧の変調周波数:400kHz(図11の実測では可変)
変調直流電圧のパルス変調のオン・デューティ比:50%(図12の実測では可変)
Claims (13)
- 被処理体に対してプラズマエッチングを行うプラズマ処理装置であって、
処理容器と、
前記処理容器内にガスを供給するガス供給系と、
前記ガス供給系によって供給されるガスを励起させるプラズマ源と、
前記処理容器内において被処理体を保持する支持構造体と、
前記処理容器内の空間の排気のための排気系と、
を備え、
前記処理容器は、略円筒形状を有しており、前記支持構造体を収容する中間部分において略一定の幅を有し、該中間部分の下端から該処理容器の底部に向かうにつれて徐々に幅が狭くなるテーパー状をなしており、該処理容器の該底部は、該処理容器の中心軸線に対して軸対称に形成された排気口を提供しており、
前記排気系は、前記支持構造体の直下に設けられており、
前記ガス供給系は、
前記処理容器内に第1の処理ガスを供給する第1のガス供給部と、
前記処理容器内に第2の処理ガスを供給する第2のガス供給部と、
を有し、
該プラズマ処理装置は、前記処理容器内のプラズマ生成時又はプラズマ消滅時のプラズマ状態に応じて前記第1の処理ガスの供給量及び前記第2の処理ガスの供給量を個別に調整するよう前記第1のガス供給部及び前記第2のガス供給部を制御する制御器を更に備え、
前記支持構造体は、被処理体を回転可能且つ傾斜可能に支持するよう構成されており、
該プラズマ処理装置は、イオン引き込みのためのバイアス電圧として、パルス変調された直流電圧を前記支持構造体に印加するバイアス電力供給部を更に備える、
プラズマ処理装置。 - 前記支持構造体は、鉛直方向に直交する方向に延びる第1軸線上で延在する傾斜軸部を有し、
該プラズマ処理装置は、前記傾斜軸部を軸支し前記支持構造体を前記第1軸線を中心に回転させる駆動装置を更に備え、該駆動装置は前記処理容器の外部に設けられており、
前記支持構造体は、その中空の内部を大気圧に維持可能な封止構造を有する、
請求項1に記載のプラズマ処理装置。 - 前記支持構造体は、
前記被処理体を保持する保持部であり、前記第1軸線に直交する第2軸線を中心に回転可能な保持部と、
該支持構造体の中空の内部を前記保持部と共に形成する容器部と、
前記支持構造体を封止する磁性流体シール部と、
前記容器部内に設けられた回転モータであり、前記保持部を回転させる該回転モータと、
を更に有する、請求項2に記載のプラズマ処理装置。 - 前記容器部は、略円筒形状を有しており、該容器部の中心軸線である前記第2軸線は、前記支持構造体が傾斜されていない状態において前記処理容器の前記中心軸線に一致する、請求項3に記載のプラズマ処理装置。
- 前記支持構造体は、前記容器部内に設けられ、前記回転モータと前記保持部とを連結する伝導ベルトを更に有する、請求項3又は4に記載のプラズマ処理装置。
- 前記傾斜軸部は筒形状を有しており、
前記バイアス電力供給部は、前記傾斜軸部の内孔を通って前記容器部の内側に延びる配線を介して前記保持部に電気的に接続されている、
請求項3〜5の何れか一項に記載のプラズマ処理装置。 - 前記支持構造体が傾斜されていない状態において、前記第2軸線は前記プラズマ源の中心軸線と一致する、請求項3〜6の何れか一項に記載のプラズマ処理装置。
- 前記傾斜軸部は、前記支持構造体の中心と前記保持部との間の位置を含む前記第1軸線上で延在している、請求項3〜7の何れか一項に記載のプラズマ処理装置。
- 前記支持構造体は、60度以内の角度で傾斜可能である、請求項8に記載のプラズマ処理装置。
- 前記傾斜軸部は、前記支持構造体の重心を含む前記第1軸線上で延在している、請求項3〜7の何れか一項に記載のプラズマ処理装置。
- 前記保持部は、静電チャックを有する、請求項3〜10の何れか一項に記載のプラズマ処理装置。
- 前記処理容器内に設けられた整流部材を更に備え、
前記整流部材は、下端において閉じられた略円筒形状を有し、
前記整流部材は、上部及び下部を有し、
前記整流部材の前記上部は、前記支持構造体を側方から囲むように、前記処理容器の内壁面に沿って延在し、
前記整流部材の前記下部は、前記処理容器内の前記内壁面に沿ってその幅が徐々に狭くなるテーパー形状を有しており、その下端において平板状をなしており、
前記整流部材の前記下部には、複数の貫通孔が形成されている、
請求項1〜11の何れか一項に記載のプラズマ処理装置。 - 前記排気系は、前記処理容器内の前記空間における圧力を、0.5Pa〜2.666Paの範囲内の圧力に制御するように構成されている、請求項1〜12の何れか一項に記載のプラズマ処理装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014210666A JP6373160B2 (ja) | 2014-10-15 | 2014-10-15 | プラズマ処理装置 |
KR1020177007007A KR102444488B1 (ko) | 2014-10-15 | 2015-10-08 | 플라즈마 처리 장치 |
US15/519,072 US20170221682A1 (en) | 2014-10-15 | 2015-10-08 | Plasma processing apparatus |
PCT/JP2015/078645 WO2016060063A1 (ja) | 2014-10-15 | 2015-10-08 | プラズマ処理装置 |
CN201580049735.6A CN107078049B (zh) | 2014-10-15 | 2015-10-08 | 等离子体处理装置 |
TW104133456A TWI668726B (zh) | 2014-10-15 | 2015-10-13 | Plasma processing device |
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CN109819664B (zh) * | 2017-09-21 | 2021-01-05 | 株式会社日立高新技术 | 磁隧道结元件的制造方法以及感应耦合型等离子处理装置 |
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TW201614711A (en) | 2016-04-16 |
CN107078049B (zh) | 2021-12-24 |
US20170221682A1 (en) | 2017-08-03 |
KR20170070006A (ko) | 2017-06-21 |
WO2016060063A1 (ja) | 2016-04-21 |
KR102444488B1 (ko) | 2022-09-16 |
CN107078049A (zh) | 2017-08-18 |
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