JP6371818B2 - 炭化物原料の製造方法 - Google Patents
炭化物原料の製造方法 Download PDFInfo
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- JP6371818B2 JP6371818B2 JP2016222135A JP2016222135A JP6371818B2 JP 6371818 B2 JP6371818 B2 JP 6371818B2 JP 2016222135 A JP2016222135 A JP 2016222135A JP 2016222135 A JP2016222135 A JP 2016222135A JP 6371818 B2 JP6371818 B2 JP 6371818B2
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/90—Carbides
- C01B32/914—Carbides of single elements
- C01B32/956—Silicon carbide
- C01B32/963—Preparation from compounds containing silicon
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/90—Carbides
- C01B32/914—Carbides of single elements
- C01B32/956—Silicon carbide
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
- C04B35/573—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by reaction sintering or recrystallisation
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/64—Burning or sintering processes
- C04B35/65—Reaction sintering of free metal- or free silicon-containing compositions
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/02—Epitaxial-layer growth
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Chemistry (AREA)
- Structural Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Crystallography & Structural Chemistry (AREA)
- Metallurgy (AREA)
- Carbon And Carbon Compounds (AREA)
Description
上述の工程(A)の前記金属原料は、Ti、W、Hf、Zr、V、Cr、Ta、B、Nb、Al、Mn、Ni、Fe、Co、Moのうちのいずれかまたはその酸化物とすることができ、前記多孔性炭素材料と前記高純度ケイ素原料の純度は99.99%より大きく、好ましくは99.99999%とすることができ、ケイ素原料の純度が低すぎると、合成して得られる炭化ケイ素原料に含まれる不純物が過多となり、炭化ケイ素単結晶成長プロセスに応用することができなくなる。そのうち、前記多孔性炭素材料のポロシティ範囲は20%〜85%とすることができ、ポロシティが低すぎると、合成して炭化ケイ素構造を生成するとき、多孔性炭素材料の構造が粉末状に崩壊せず、粉砕プロセスを実行しなければ炭化ケイ素粉末が得られなくなる。前記多孔性炭素材料は、グラファイトフェルト、グラファイト絶縁材、発泡炭素、カーボンナノチューブ、炭素繊維、活性炭のうちのいずれかを選択することができ、かつ前記材料は非粉末状態の原料とすることができ(但し、これに限らない)、前記高純度ケイ素原料のケイ素は厚さ範囲10μm〜10000μmのシリコンウェハー、シリコンインゴット、シリコンチップまたはシリコンブロック(但し、これに限らない)から選択することができ、厚さが10μm未満の場合、合成して得られる炭化ケイ素原料の炭素元素が過量になりやすく、逆に厚さが10000μmを超過すると、ケイ素元素が過量になり、炭化ケイ素結晶成長プロセスに使用することができなくなる。同様に、金属原料も金属インゴット、金属ブロック、その他非粉末状態の金属酸化物または金属原料から選択することができる(但し、これに限らない)。
12 成長チャンバ
13 材料源
14 熱源
15 合成炉
S201〜S203 工程
310 グラファイトフェルト
320 シリコンウェハー
Claims (10)
- 炭化物原料の製造方法であって、
(A)多孔性炭素材料とケイ素の厚さの範囲が10μm〜10000μmである高純度ケイ素原料または金属原料を提供し、前記多孔性炭素材料と前記高純度ケイ素原料または金属原料を交互に充填して、層状構造物を形成する工程と、
(B)前記層状構造物を合成炉内に設置して、真空化プロセスを行う工程と、
(C)不活性気体雰囲気下で、前記層状構造物を合成反応させて炭化物原料を得る工程と、
を含み、そのうち、前記炭化物原料が粒径300μm以下の炭化物粉末であることを特徴とする、炭化物原料の製造方法。 - 前記金属原料が、Ti、W、Hf、Zr、V、Cr、Ta、B、Nb、Al、Mn、Ni、Fe、Co、Moのうちのいずれかまたはその酸化物であることを特徴とする、請求項1に記載の炭化物原料の製造方法。
- 前記多孔性炭素材料と前記高純度ケイ素原料の純度が99.99%より高いことを特徴とする、請求項1に記載の炭化物原料の製造方法。
- 前記多孔性炭素材料のポロシティ範囲が20%〜85%であり、前記多孔性炭素材料がグラファイトフェルト、グラファイト絶縁材、発泡炭素、カーボンナノチューブ、炭素繊維、活性炭からいずれかが選択されることを特徴とする、請求項1に記載の炭化物原料の製造方法。
- 前記高純度ケイ素原料が、シリコンウェハー、シリコンインゴット、シリコンチップまたはシリコンブロックであることを特徴とする、請求項1に記載の炭化物原料の製造方法。
- 前記真空化プロセスが、前記合成炉を真空化して炉内の窒素ガス及び酸素を除去し、前記合成炉の温度を900〜1250℃に上げて不純物を除去することを特徴とする、請求項1に記載の炭化物原料の製造方法。
- 前記合成反応が、合成温度範囲1800℃〜2200℃の間及び合成圧力範囲5〜600torrの間というプロセス条件下で実行されることを特徴とする、請求項1に記載の炭化物原料の製造方法。
- 前記工程(A)がさらに、前記層状構造物の底部にドープ用元素を充填することを含むことを特徴とする、請求項1に記載の炭化物原料の製造方法。
- 前記ドープ用元素が、アルミニウム、ボロン、バナジウム、スカンジウム、鉄、コバルト、ニッケル、チタンのうちのいずれかであり、前記炭化物原料を利用して結晶成長プロセスを実行し、p型結晶を得ることを特徴とする、請求項8に記載の炭化物原料の製造方法。
- 前記ドープ用元素が、窒素、リン、ヒ素、アンチモンのうちから選択したいずれかであり、前記炭化物原料を利用して結晶成長プロセスを実行し、n型結晶を得ることを特徴とする、請求項8に記載の炭化物原料の製造方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW105130692 | 2016-09-23 | ||
TW105130692A TWI607968B (zh) | 2016-09-23 | 2016-09-23 | 一種碳化物原料合成之製備方法 |
Publications (2)
Publication Number | Publication Date |
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JP2018048056A JP2018048056A (ja) | 2018-03-29 |
JP6371818B2 true JP6371818B2 (ja) | 2018-08-08 |
Family
ID=61230793
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2016222135A Active JP6371818B2 (ja) | 2016-09-23 | 2016-11-15 | 炭化物原料の製造方法 |
Country Status (3)
Country | Link |
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US (1) | US20180087186A1 (ja) |
JP (1) | JP6371818B2 (ja) |
TW (1) | TWI607968B (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN111908472B (zh) * | 2020-06-30 | 2023-05-16 | 山东天岳先进科技股份有限公司 | 一种掺杂稀土元素的碳化硅粉料及其制备方法与应用 |
CN114956163A (zh) * | 2022-05-10 | 2022-08-30 | 黄石金朝阳科技有限公司 | 惰性气体环境下高纯硫化亚锡材料高效、环保的合成方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB842726A (en) * | 1955-11-04 | 1960-07-27 | Pechiney Prod Chimiques Sa | Improvements in or relating to the production of aluminium |
US3359097A (en) * | 1965-06-28 | 1967-12-19 | Monsanto Res Corp | Method of producing thermoelectric bodies |
DE2852410C2 (de) * | 1978-12-04 | 1981-12-03 | Kernforschungsanlage Jülich GmbH, 5170 Jülich | Verfahren und Vorrichtung zur Herstellung von Siliciumcarbid-Formkörpern |
JPS61132575A (ja) * | 1984-11-30 | 1986-06-20 | イビデン株式会社 | 炭化ケイ素質複合体 |
US4914070A (en) * | 1987-10-19 | 1990-04-03 | Pechiney Electrometallurgie | Process for the production of silicon carbide with a large specific surface area and use for high-temperature catalytic reactions |
US5259866A (en) * | 1990-10-23 | 1993-11-09 | Japan Metals & Chemicals Co., Ltd. | Method for producing high-purity metallic chromium |
FR2741063B1 (fr) * | 1995-11-14 | 1998-02-13 | Europ Propulsion | Procede pour l'introduction dans des substrats poreux d'une composition en fusion a base de silicium |
JP2001294413A (ja) * | 2000-04-11 | 2001-10-23 | Toyota Motor Corp | カーボンナノチューブの製造方法および多孔質SiC材料の製造方法および多孔質SiC材料 |
US6554897B2 (en) * | 2000-09-06 | 2003-04-29 | Silbid Ltd. | Method of producing silicon carbide |
US6616890B2 (en) * | 2001-06-15 | 2003-09-09 | Harvest Precision Components, Inc. | Fabrication of an electrically conductive silicon carbide article |
WO2009140791A1 (en) * | 2008-05-21 | 2009-11-26 | Dalian Institute Of Chemical Physics, Chinese Academy Of Sciences | Process for producing silicon carbide |
JP4548523B2 (ja) * | 2008-07-18 | 2010-09-22 | 日新イオン機器株式会社 | 傍熱型陰極の組立方法 |
JP5706671B2 (ja) * | 2010-11-15 | 2015-04-22 | 独立行政法人産業技術総合研究所 | 昇華再結晶法による炭化ケイ素単結晶製造用炭化ケイ素粉体及びその製造方法 |
CN103840140B (zh) * | 2012-11-21 | 2017-12-26 | 清华大学 | 多孔碳硅复合材料及其制备方法 |
WO2015012954A1 (en) * | 2013-07-26 | 2015-01-29 | Ii-Vi Incorporated | Method for synthesizing ultrahigh-purity silicon carbide |
CN105692622A (zh) * | 2016-03-18 | 2016-06-22 | 宁夏大学 | 一种纳米级碳化硅颗粒的制备方法及其产品 |
-
2016
- 2016-09-23 TW TW105130692A patent/TWI607968B/zh active
- 2016-11-15 JP JP2016222135A patent/JP6371818B2/ja active Active
- 2016-11-15 US US15/352,048 patent/US20180087186A1/en not_active Abandoned
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Publication number | Publication date |
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JP2018048056A (ja) | 2018-03-29 |
US20180087186A1 (en) | 2018-03-29 |
TW201813926A (zh) | 2018-04-16 |
TWI607968B (zh) | 2017-12-11 |
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