JP6352436B2 - 成膜装置 - Google Patents
成膜装置 Download PDFInfo
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- JP6352436B2 JP6352436B2 JP2016552844A JP2016552844A JP6352436B2 JP 6352436 B2 JP6352436 B2 JP 6352436B2 JP 2016552844 A JP2016552844 A JP 2016552844A JP 2016552844 A JP2016552844 A JP 2016552844A JP 6352436 B2 JP6352436 B2 JP 6352436B2
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- 230000008021 deposition Effects 0.000 title 1
- 239000000758 substrate Substances 0.000 claims description 162
- 230000015572 biosynthetic process Effects 0.000 claims description 33
- 230000007246 mechanism Effects 0.000 claims description 21
- 150000002500 ions Chemical class 0.000 claims description 15
- 230000007723 transport mechanism Effects 0.000 claims description 13
- 238000001816 cooling Methods 0.000 claims description 10
- 239000003507 refrigerant Substances 0.000 claims description 9
- 238000000926 separation method Methods 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 7
- 238000004544 sputter deposition Methods 0.000 claims description 7
- 230000032258 transport Effects 0.000 claims 3
- 239000012528 membrane Substances 0.000 claims 1
- 238000000034 method Methods 0.000 description 6
- 230000001629 suppression Effects 0.000 description 3
- 238000011109 contamination Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C23C14/34—Sputtering
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3464—Sputtering using more than one target
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
- C23C14/566—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases using a load-lock chamber
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
- C23C16/4586—Elements in the interior of the support, e.g. electrodes, heating or cooling devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3488—Constructional details of particle beam apparatus not otherwise provided for, e.g. arrangement, mounting, housing, environment; special provisions for cleaning or maintenance of the apparatus
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67201—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the load-lock chamber
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
- H01L21/67213—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process comprising at least one ion or electron beam chamber
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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Description
Claims (17)
- 第1面および第2面を有する複数の基板の前記第1面および前記第2面に膜を形成する成膜装置であって、
チャンバーと、
互いに反対側に位置する第1チャックおよび第2チャックを有し、前記チャンバーの中において、前記第1チャックでは第1基板の前記第2面の側を保持し、前記第2チャックでは第2基板の前記第1面の側を保持する保持部と、
前記第1チャックおよび前記第2チャックによってそれぞれ保持された前記第1基板および前記第2基板が前記チャンバーの中の成膜領域を通過するように前記保持部を移動させる駆動部と、
前記第1チャックによって保持された前記第1基板の前記第1面に膜を形成する第1成膜部と、
前記第2チャックによって保持された前記第2基板の前記第2面に膜を形成する第2成膜部と、
前記第1チャックによって前記第2面の側が保持された前記第1基板の前記第1面に前記第1成膜部によって膜が形成された後に、前記第1基板の前記第1面の側が前記第2チャックによって保持されるように前記第1基板を操作する操作機構と、
前記保持部を冷却する冷却部と、
を備えることを特徴とする成膜装置。 - 前記冷却部は、前記保持部に配置された冷媒流路と、前記冷媒流路に冷媒を供給する供給部と、を含む、
ことを特徴とする請求項1に記載の成膜装置。 - 前記チャンバーに設けられた開口に一端が接続され、他端が閉塞部材によって閉塞されたベローズと、
前記保持部と前記閉塞部材とを接続する中空部材と、を更に備え、
前記供給部は、前記中空部材を通して前記チャンバーの外部から前記保持部に冷媒を供給する、
ことを特徴とする請求項2に記載の成膜装置。 - 前記駆動部が前記保持部を移動させる動作に応じて前記閉塞部材を移動させる第2駆動部を更に備える、
ことを特徴とする請求項3に記載の成膜装置。 - 前記駆動部は、前記第1基板および前記第2基板の被処理面に平行な移動経路に沿って前記保持部を移動させる、
ことを特徴とする請求項1乃至4のいずれか1項に記載の成膜装置。 - 前記第1成膜部および前記第2成膜部は、前記移動経路に沿って第1方向に前記第1基板および前記第2基板が移動しているとき、および、前記移動経路に沿って前記第1方向とは反対方向である第2方向に前記第1基板および前記第2基板が移動しているときの双方において、前記第1基板および前記第2基板に膜を形成する、
ことを特徴とする請求項5に記載の成膜装置。 - 前記第1成膜部および前記第2成膜部は、前記第1チャックによって保持された前記第1基板の前記第1面と、前記第2チャックによって保持された前記第2基板の前記第2面とに膜を同時に形成する、
ことを特徴とする請求項1乃至6のいずれか1項に記載の成膜装置。 - 前記保持部は、膜を形成する際の前記保持部の可動域において前記第1成膜部と前記第2成膜部とが対面しないように前記第1成膜部の側の空間と前記第2成膜部の側の空間とを分離する分離部を含む、
ことを特徴とする請求項1乃至7のいずれか1項に記載の成膜装置。 - 前記分離部は、膜を形成する際の前記保持部の前記可動域の全域において前記第1成膜部と前記第2成膜部とが対面しないように前記第1成膜部の側の空間と前記第2成膜部の側の空間とを分離する、
ことを特徴とする請求項8に記載の成膜装置。 - 前記保持部と前記操作機構との間で前記第1基板および前記第2基板を搬送する搬送機構を更に備え、
前記駆動部は、前記保持部を移動経路に沿って移動させ、
前記搬送機構は、前記第1基板および前記第2基板を前記移動経路と平行な方向に搬送し、
前記操作機構は、コンテナを移動させるように構成され、前記搬送機構によって前記保持部の前記第1チャックから搬送されてきた前記第1基板が前記コンテナに収容された状態で前記コンテナを前記移動経路と直交する方向に移動させ、
前記第1チャックから搬送されてきた前記第1基板が前記コンテナに収容された状態における前記操作機構による前記コンテナの移動は、前記搬送機構によって前記第1基板が前記コンテナから前記第2チャックに搬送されるようになされる、
ことを特徴とする請求項1に記載の成膜装置。 - 前記第1成膜部および前記第2成膜部は、前記第1基板および前記第2基板に複数種類の膜を形成することができるように構成されている、
ことを特徴とする請求項1乃至10のいずれか1項に記載の成膜装置。 - 前記第1成膜部および前記第2成膜部は、前記成膜領域に成膜物質が供給されるようにプラズマを発生するプラズマ発生部を含む、
ことを特徴とする請求項1乃至11のいずれか1項に記載の成膜装置。 - 前記第1成膜部および前記第2成膜部は、スパッタリングによって前記第1基板および前記第2基板に膜を形成する、
ことを特徴とする請求項12に記載の成膜装置。 - 前記成膜領域を通過している前記第1基板および前記第2基板にイオンを照射するイオンガンを更に備える、
ことを特徴とする請求項1乃至13のいずれか1項に記載の成膜装置。 - 第1面および第2面を有する複数の基板の前記第1面および前記第2面に膜を形成する成膜装置であって、
チャンバーと、
互いに反対側に位置する第1チャックおよび第2チャックを有し、前記チャンバーの中において、前記第1チャックでは基板の前記第2面の側を保持し、前記第2チャックでは基板の前記第1面の側を保持する保持部と、
前記第1チャックおよび前記第2チャックによってそれぞれ保持された基板が前記チャンバーの中の成膜領域を通過するように前記保持部を移動させる駆動部と、
前記第1チャックによって保持された基板に膜を形成する第1成膜部と、
前記第2チャックによって保持された基板に膜を形成する第2成膜部と、
前記第1チャックによって前記第2面の側が保持され前記第1成膜部によって前記第1面に膜が形成された基板を前記第2チャックによって前記第1面の側が保持されるように操作する操作機構と、
を備えることを特徴とする成膜装置。 - 前記保持部と前記操作機構との間で基板を搬送する搬送機構を更に備え、
前記駆動部は、前記保持部を移動経路に沿って移動させ、
前記搬送機構は、基板を前記移動経路と平行な方向に搬送し、
前記操作機構は、コンテナを移動させるように構成され、前記搬送機構によって前記保持部の前記第1チャックから搬送されてきた第1基板が前記コンテナに収容された状態で前記コンテナを前記移動経路と直交する方向に移動させ、
前記第1チャックから搬送されてきた前記第1基板が前記コンテナに収容された状態における前記操作機構による前記コンテナの移動は、前記搬送機構によって前記第1基板が前記コンテナから前記第2チャックに搬送されるようになされる、
ことを特徴とする請求項15に記載の成膜装置。 - チャンバーと、
互いに反対側に位置する第1チャックおよび第2チャックを有し、前記チャンバーの中において、前記第1チャックおよび前記第2チャックのそれぞれによって基板を保持する保持部と、
前記第1チャックおよび前記第2チャックによってそれぞれ保持された基板が前記チャンバーの中の成膜領域を通過するように前記保持部を移動させる駆動部と、
前記第1チャックによって保持された基板に膜を形成する第1成膜部と、
前記第2チャックによって保持された基板に膜を形成する第2成膜部と、を備え、
前記保持部は、膜を形成する際の前記保持部の可動域の全域において前記第1成膜部と前記第2成膜部とが対面しないように前記第1成膜部の側の空間と前記第2成膜部の側の空間とを分離する分離部を含む、
ことを特徴とする成膜装置。
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