JP6121576B1 - 成膜装置 - Google Patents
成膜装置 Download PDFInfo
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- JP6121576B1 JP6121576B1 JP2016001947A JP2016001947A JP6121576B1 JP 6121576 B1 JP6121576 B1 JP 6121576B1 JP 2016001947 A JP2016001947 A JP 2016001947A JP 2016001947 A JP2016001947 A JP 2016001947A JP 6121576 B1 JP6121576 B1 JP 6121576B1
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- 230000008021 deposition Effects 0.000 title claims description 3
- 238000010891 electric arc Methods 0.000 claims abstract description 10
- 230000006698 induction Effects 0.000 claims description 16
- 238000011084 recovery Methods 0.000 claims description 10
- 230000015572 biosynthetic process Effects 0.000 claims description 6
- 238000012546 transfer Methods 0.000 claims description 5
- 230000001939 inductive effect Effects 0.000 claims 3
- 238000012423 maintenance Methods 0.000 abstract description 6
- 238000012545 processing Methods 0.000 description 43
- 238000000034 method Methods 0.000 description 25
- 230000008569 process Effects 0.000 description 18
- 230000001681 protective effect Effects 0.000 description 12
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- 239000000470 constituent Substances 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000005484 gravity Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910021385 hard carbon Inorganic materials 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/02—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma
- H05H1/10—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma using externally-applied magnetic fields only, e.g. Q-machines, Yin-Yang, base-ball
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0605—Carbon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32055—Arc discharge
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/48—Generating plasma using an arc
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Optics & Photonics (AREA)
- Physical Vapour Deposition (AREA)
- Plasma Technology (AREA)
Abstract
Description
Claims (8)
- アーク放電によってプラズマを発生させるプラズマ発生部と、前記プラズマ発生部で発生したプラズマによって部材に膜が形成される成膜部とを備える成膜装置であって、
前記プラズマ発生部は、
ターゲットを保持し前記ターゲットに負電位を印加するターゲット保持部と、
正電位が印加されるアノードと、
前記ターゲットからのドロップレットを捕集する捕集器と、を含み、
前記アノードは、開口を有し、前記捕集器は、前記開口の中に配置され、
前記アノードは、前記ターゲットの下方に配置されている、
ことを特徴とする成膜装置。 - 前記アノードは、第1筒形状部を有し、前記捕集器は、プラズマを通過させるように前記第1筒形状部の内側に配置された第2筒形状部と、前記第2筒形状部から前記第1筒形状部の内壁に延びたフランジ部とを含む、
ことを特徴とする請求項1に記載の成膜装置。 - ドロップレットを回収する回収部と、
前記捕集器によって捕集されたドロップレットを前記回収部に移送する移送部と、を更に備えることを特徴とする請求項1又は2に記載の成膜装置。 - 前記プラズマ発生部は、放電チャンバを含み、前記ターゲット保持部、前記アノードおよび前記捕集器は、前記放電チャンバの中に配置され、前記回収部は、前記放電チャンバの外に配置され、前記放電チャンバと前記回収部との間にバルブが設けられている、
ことを特徴とする請求項3に記載の成膜装置。 - 前記プラズマ発生部から前記成膜部にプラズマを誘導する誘導部を更に備え、
前記誘導部は、屈曲したダクトと、ドロップレットを捕集するように前記ダクトの内側に配置された複数のバッフルとを含み、
前記複数のバッフルのうち前記プラズマ発生部に最も近い第1バッフルの開口寸法と、前記捕集器における前記誘導部の側の開口寸法とが等しい、
ことを特徴とする請求項1乃至4のいずれか1項に記載の成膜装置。 - 前記プラズマ発生部から前記成膜部にプラズマを誘導する誘導部を更に備え、
前記誘導部は、屈曲したダクトと、ドロップレットを捕集するように前記ダクトの内側に配置された複数のバッフルとを含み、
前記複数のバッフルのうち前記プラズマ発生部に最も近い第1バッフルの開口寸法と、前記第2筒形状部における前記誘導部の側の開口寸法とが等しい、
ことを特徴とする請求項2に記載の成膜装置。 - 前記誘導部は、プラズマを誘導する磁場を発生する複数のコイルを更に含み、前記複数のコイルは、前記ダクトのうち前記捕集器と前記第1バッフルとの間の部分に設けられた第1コイルを含む、
ことを特徴とする請求項5又は6に記載の成膜装置。 - 前記成膜部は、前記プラズマ発生部より低い位置に配置されている、
ことを特徴とする請求項1乃至7のいずれか1項に記載の成膜装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016001947A JP6121576B1 (ja) | 2016-01-07 | 2016-01-07 | 成膜装置 |
SG10201609941UA SG10201609941UA (en) | 2016-01-07 | 2016-11-25 | Deposition apparatus |
US15/395,200 US10917960B2 (en) | 2016-01-07 | 2016-12-30 | Deposition apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016001947A JP6121576B1 (ja) | 2016-01-07 | 2016-01-07 | 成膜装置 |
Publications (2)
Publication Number | Publication Date |
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JP6121576B1 true JP6121576B1 (ja) | 2017-04-26 |
JP2017122266A JP2017122266A (ja) | 2017-07-13 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2016001947A Active JP6121576B1 (ja) | 2016-01-07 | 2016-01-07 | 成膜装置 |
Country Status (3)
Country | Link |
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US (1) | US10917960B2 (ja) |
JP (1) | JP6121576B1 (ja) |
SG (1) | SG10201609941UA (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2023195058A1 (ja) * | 2022-04-04 | 2023-10-12 | 国立大学法人豊橋技術科学大学 | 成膜装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11246964A (ja) * | 1997-12-19 | 1999-09-14 | Ulvac Corp | 蒸着源及び蒸着装置 |
US20080105657A1 (en) * | 2006-11-03 | 2008-05-08 | Atomic Energy Council - Institute Of Nuclear Energy Research | Macroparticle-filtered coating plasma source device |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4511593A (en) * | 1983-01-17 | 1985-04-16 | Multi-Arc Vacuum Systems Inc. | Vapor deposition apparatus and method |
WO1997038149A1 (en) * | 1996-04-08 | 1997-10-16 | Ronald Christy | Cathodic arc cathode |
US5895955A (en) * | 1997-01-10 | 1999-04-20 | Advanced Micro Devices, Inc. | MOS transistor employing a removable, dual layer etch stop to protect implant regions from sidewall spacer overetch |
US5902462A (en) * | 1997-03-27 | 1999-05-11 | Krauss; Alan R. | Filtered cathodic arc deposition apparatus and method |
RU2186151C2 (ru) * | 1999-12-29 | 2002-07-27 | Закрытое акционерное общество "Патинор Коутингс Лимитед" | Устройство для нанесения покрытий в вакууме |
JP3860954B2 (ja) * | 2000-07-07 | 2006-12-20 | 株式会社日立グローバルストレージテクノロジーズ | リアルタイムパーティクルフィルタを具備したプラズマ処理装置 |
JP2004060019A (ja) * | 2002-07-30 | 2004-02-26 | Fuji Electric Holdings Co Ltd | 真空アーク蒸着装置、および、真空アーク蒸着方法 |
JP4438326B2 (ja) | 2003-06-13 | 2010-03-24 | 日新電機株式会社 | 偏向磁場型真空アーク蒸着装置 |
JP4889957B2 (ja) | 2005-03-25 | 2012-03-07 | 株式会社フェローテック | プラズマ生成装置におけるドロップレット除去装置及びドロップレット除去方法 |
JP2007254770A (ja) | 2006-03-20 | 2007-10-04 | Fujitsu Ltd | 成膜方法及び成膜装置 |
JP5189784B2 (ja) * | 2007-03-30 | 2013-04-24 | 株式会社フェローテック | プラズマガン周辺を電気的中性にしたプラズマ生成装置 |
JP5586078B2 (ja) | 2009-02-27 | 2014-09-10 | 国立大学法人豊橋技術科学大学 | 静電トラップを具備するプラズマ発生装置及びプラズマ加工装置 |
JP4690477B2 (ja) * | 2009-07-01 | 2011-06-01 | 株式会社フェローテック | 陽極壁多分割型プラズマ発生装置及びプラズマ処理装置 |
-
2016
- 2016-01-07 JP JP2016001947A patent/JP6121576B1/ja active Active
- 2016-11-25 SG SG10201609941UA patent/SG10201609941UA/en unknown
- 2016-12-30 US US15/395,200 patent/US10917960B2/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11246964A (ja) * | 1997-12-19 | 1999-09-14 | Ulvac Corp | 蒸着源及び蒸着装置 |
US20080105657A1 (en) * | 2006-11-03 | 2008-05-08 | Atomic Energy Council - Institute Of Nuclear Energy Research | Macroparticle-filtered coating plasma source device |
Also Published As
Publication number | Publication date |
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US20170202077A1 (en) | 2017-07-13 |
US10917960B2 (en) | 2021-02-09 |
SG10201609941UA (en) | 2017-08-30 |
JP2017122266A (ja) | 2017-07-13 |
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