JP6351540B2 - ガス分析装置およびガス分析方法 - Google Patents

ガス分析装置およびガス分析方法 Download PDF

Info

Publication number
JP6351540B2
JP6351540B2 JP2015095974A JP2015095974A JP6351540B2 JP 6351540 B2 JP6351540 B2 JP 6351540B2 JP 2015095974 A JP2015095974 A JP 2015095974A JP 2015095974 A JP2015095974 A JP 2015095974A JP 6351540 B2 JP6351540 B2 JP 6351540B2
Authority
JP
Japan
Prior art keywords
gas
sample
chamber
orifice
analysis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2015095974A
Other languages
English (en)
Japanese (ja)
Other versions
JP2016080679A (ja
JP2016080679A5 (cg-RX-API-DMAC7.html
Inventor
勝 衣川
勝 衣川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to TW104128775A priority Critical patent/TWI567778B/zh
Publication of JP2016080679A publication Critical patent/JP2016080679A/ja
Publication of JP2016080679A5 publication Critical patent/JP2016080679A5/ja
Application granted granted Critical
Publication of JP6351540B2 publication Critical patent/JP6351540B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Sampling And Sample Adjustment (AREA)
JP2015095974A 2014-10-14 2015-05-08 ガス分析装置およびガス分析方法 Expired - Fee Related JP6351540B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW104128775A TWI567778B (zh) 2014-10-14 2015-09-01 氣體分析裝置及氣體分析方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014209988 2014-10-14
JP2014209988 2014-10-14

Publications (3)

Publication Number Publication Date
JP2016080679A JP2016080679A (ja) 2016-05-16
JP2016080679A5 JP2016080679A5 (cg-RX-API-DMAC7.html) 2017-11-09
JP6351540B2 true JP6351540B2 (ja) 2018-07-04

Family

ID=55956158

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015095974A Expired - Fee Related JP6351540B2 (ja) 2014-10-14 2015-05-08 ガス分析装置およびガス分析方法

Country Status (2)

Country Link
JP (1) JP6351540B2 (cg-RX-API-DMAC7.html)
TW (1) TWI567778B (cg-RX-API-DMAC7.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6934239B2 (ja) * 2017-02-27 2021-09-15 国立大学法人東京工業大学 高感度昇温脱離ガス分析装置
JP6919630B2 (ja) * 2018-07-30 2021-08-18 三菱電機株式会社 ガス分析装置およびガス分析方法
CN114981943A (zh) * 2020-01-17 2022-08-30 Atik株式会社 传感器进气流稳定系统
US12469751B2 (en) 2021-06-03 2025-11-11 Applied Materials, Inc. Apparatus to detect and quantify radical concentration in semiconductor processing systems

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60147645A (ja) * 1984-01-13 1985-08-03 Mitsubishi Electric Corp 封入ガス分析装置
JP3772751B2 (ja) * 2002-01-29 2006-05-10 ウシオ電機株式会社 ランプ封入ガス分析装置
JP2006322899A (ja) * 2005-05-20 2006-11-30 Hitachi Ltd ガスモニタリング装置
JP4798007B2 (ja) * 2007-01-24 2011-10-19 三菱電機株式会社 ガス分析方法
JP5645771B2 (ja) * 2011-08-04 2014-12-24 株式会社日立ハイテクノロジーズ 質量分析装置
DE102011081287A1 (de) * 2011-08-19 2013-02-21 Bayer Technology Services Gmbh Mikro-Probenentnahmesystem für kleine Mengen an Fluidproben zur Analyse in der Dampfphase
CN103196785A (zh) * 2013-04-26 2013-07-10 张金川 气体快速测量分析仪及其测量方法

Also Published As

Publication number Publication date
TW201614712A (en) 2016-04-16
TWI567778B (zh) 2017-01-21
JP2016080679A (ja) 2016-05-16

Similar Documents

Publication Publication Date Title
JP6351540B2 (ja) ガス分析装置およびガス分析方法
JP6919630B2 (ja) ガス分析装置およびガス分析方法
KR102074968B1 (ko) 발생 가스 분석 장치 및 발생 가스 분석 방법
WO2015056661A1 (ja) 漏洩試験装置及び方法
CN111141506A (zh) 一种极微小密封器件腔体气体压力和组分测量装置及方法
JP2013533494A (ja) 容器を漏洩試験するための方法及び装置
CN105765381B (zh) 用于测量溶解在液体中的气体的气体浓度的方法及系统
JP2022544885A (ja) 液体封入被験体の気密性試験
JP2016080679A5 (cg-RX-API-DMAC7.html)
JP2009115651A (ja) 試料導入装置、試料分析装置及び試料分析システム
CN206362660U (zh) 一种材料辐射致放气的在线测试装置
JP3683740B2 (ja) 液晶セル内気泡のガス分析装置および該ガス分析装置を使用した液晶セル内気泡のガス分析方法
JP4809100B2 (ja) 火災検出装置
US20240096614A1 (en) Electrode protrusion adjustment for maximizing pressure drop across liquid transport conduit
JP2008241533A (ja) 試料導入装置および試料導入方法
TW202409533A (zh) 洩漏偵測裝置及其用於在測試樣品中偵測氣體洩漏的方法
Li et al. Failure analysis of a thin-film nitride MEMS package
JP2012247202A (ja) 分析方法および装置
CN110085504B (zh) 一种基于小孔原位取样接口的离子源系统及小型化质谱仪
JP5255974B2 (ja) 真空室内のガス成分測定方法、及び真空装置
Goswami et al. Quantitative Characterization of True Leak Rate of Micro to Nanoliter Packages Using Helium Mass Spectrometer
JP4398320B2 (ja) ガス検出装置
US20240085373A1 (en) Dynamic heating of a differential mobility spectrometer cell
JP5985266B2 (ja) 測定方法、大気圧イオン化質量分析装置及び破壊検査装置
JP3127573U (ja) ガスクロマトグラフ

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20170928

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20170928

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20180420

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20180508

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20180605

R150 Certificate of patent or registration of utility model

Ref document number: 6351540

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees