TW201614712A - Gas analysis apparatus and gas analysis method - Google Patents
Gas analysis apparatus and gas analysis methodInfo
- Publication number
- TW201614712A TW201614712A TW104128775A TW104128775A TW201614712A TW 201614712 A TW201614712 A TW 201614712A TW 104128775 A TW104128775 A TW 104128775A TW 104128775 A TW104128775 A TW 104128775A TW 201614712 A TW201614712 A TW 201614712A
- Authority
- TW
- Taiwan
- Prior art keywords
- gas analysis
- gas
- orifice
- mass spectrometer
- room
- Prior art date
Links
Landscapes
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
A gas analysis apparatus (100) includes: a sample room (1), an analyzing room (11), a gas discharging device (E2), a first orifice (O1), a second orifice (O2) and a mass spectrometer (21). The sample room (1), the mass spectrometer (21) and the gas discharging device (E2) are connected to the analyzing room (11). When a conductance of the first orifice (O1) is set to C1, a measurement period of the mass spectrometer (21) is set to T and a volume of the sample room (1) is set to V1, C1 = n,V1/T and n is 0.01 or more and 1 or less. When a conductance of the second orifice (O2) is set to C2, an amount of the gas that is sealed in a simple (3) is set to Q and a measurement upper pressure of the mass spectrometer (21) is set to Pmax, C2=m,Q,C1/V1/Pmax and m is 0.01 or more and 1 or less. C1 and C2 are constant at least during the analysis of the gas.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014209988 | 2014-10-14 | ||
JP2015095974A JP6351540B2 (en) | 2014-10-14 | 2015-05-08 | Gas analyzer and gas analysis method |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201614712A true TW201614712A (en) | 2016-04-16 |
TWI567778B TWI567778B (en) | 2017-01-21 |
Family
ID=55956158
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW104128775A TWI567778B (en) | 2014-10-14 | 2015-09-01 | Gas analysis apparatus and gas analysis method |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP6351540B2 (en) |
TW (1) | TWI567778B (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6919630B2 (en) * | 2018-07-30 | 2021-08-18 | 三菱電機株式会社 | Gas analyzer and gas analysis method |
US20220392812A1 (en) * | 2021-06-03 | 2022-12-08 | Applied Materials, Inc. | Apparatus to detect and quantify radical concentration in semiconductor processing systems |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60147645A (en) * | 1984-01-13 | 1985-08-03 | Mitsubishi Electric Corp | Analytical equipment for sealing gas |
JP3772751B2 (en) * | 2002-01-29 | 2006-05-10 | ウシオ電機株式会社 | Lamp filled gas analyzer |
JP2006322899A (en) * | 2005-05-20 | 2006-11-30 | Hitachi Ltd | Gas-monitoring apparatus |
JP4798007B2 (en) * | 2007-01-24 | 2011-10-19 | 三菱電機株式会社 | Gas analysis method |
JP5645771B2 (en) * | 2011-08-04 | 2014-12-24 | 株式会社日立ハイテクノロジーズ | Mass spectrometer |
DE102011081287A1 (en) * | 2011-08-19 | 2013-02-21 | Bayer Technology Services Gmbh | Micro-sampling system for small quantities of fluid samples for analysis in the vapor phase |
CN103196785A (en) * | 2013-04-26 | 2013-07-10 | 张金川 | Gas rapid measuring analysis mete and measuring method thereof |
-
2015
- 2015-05-08 JP JP2015095974A patent/JP6351540B2/en active Active
- 2015-09-01 TW TW104128775A patent/TWI567778B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP2016080679A (en) | 2016-05-16 |
JP6351540B2 (en) | 2018-07-04 |
TWI567778B (en) | 2017-01-21 |
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Legal Events
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MM4A | Annulment or lapse of patent due to non-payment of fees |