JP6342566B1 - 部品保持装置及び部品接合システム - Google Patents
部品保持装置及び部品接合システム Download PDFInfo
- Publication number
- JP6342566B1 JP6342566B1 JP2017220805A JP2017220805A JP6342566B1 JP 6342566 B1 JP6342566 B1 JP 6342566B1 JP 2017220805 A JP2017220805 A JP 2017220805A JP 2017220805 A JP2017220805 A JP 2017220805A JP 6342566 B1 JP6342566 B1 JP 6342566B1
- Authority
- JP
- Japan
- Prior art keywords
- holding device
- component holding
- cover
- arrangement case
- movable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000007789 sealing Methods 0.000 claims abstract description 65
- 239000000463 material Substances 0.000 claims abstract description 38
- 230000008602 contraction Effects 0.000 claims abstract description 6
- 238000010438 heat treatment Methods 0.000 claims description 79
- 238000003825 pressing Methods 0.000 claims description 35
- 239000007789 gas Substances 0.000 claims description 27
- 239000007769 metal material Substances 0.000 claims description 11
- 239000011261 inert gas Substances 0.000 claims description 9
- 230000001603 reducing effect Effects 0.000 claims description 9
- 230000002093 peripheral effect Effects 0.000 description 43
- 238000000034 method Methods 0.000 description 23
- 238000004891 communication Methods 0.000 description 20
- 238000009792 diffusion process Methods 0.000 description 20
- 230000007246 mechanism Effects 0.000 description 19
- 229910052751 metal Inorganic materials 0.000 description 17
- 239000002184 metal Substances 0.000 description 17
- 229910000679 solder Inorganic materials 0.000 description 10
- 238000002844 melting Methods 0.000 description 9
- 230000008018 melting Effects 0.000 description 9
- 230000004048 modification Effects 0.000 description 9
- 238000012986 modification Methods 0.000 description 9
- 239000007790 solid phase Substances 0.000 description 8
- 239000007791 liquid phase Substances 0.000 description 7
- 239000000758 substrate Substances 0.000 description 6
- 238000005476 soldering Methods 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 229910002601 GaN Inorganic materials 0.000 description 4
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 3
- 229910010271 silicon carbide Inorganic materials 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- -1 for example Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000011133 lead Substances 0.000 description 2
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- 239000011135 tin Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 235000019253 formic acid Nutrition 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
Landscapes
- Wire Bonding (AREA)
- Die Bonding (AREA)
- Lining Or Joining Of Plastics Or The Like (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017220805A JP6342566B1 (ja) | 2017-11-16 | 2017-11-16 | 部品保持装置及び部品接合システム |
CN201810971646.2A CN109801856B (zh) | 2017-11-16 | 2018-08-24 | 元件保持装置及元件接合系统 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017220805A JP6342566B1 (ja) | 2017-11-16 | 2017-11-16 | 部品保持装置及び部品接合システム |
Publications (2)
Publication Number | Publication Date |
---|---|
JP6342566B1 true JP6342566B1 (ja) | 2018-06-13 |
JP2019089114A JP2019089114A (ja) | 2019-06-13 |
Family
ID=62556004
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017220805A Active JP6342566B1 (ja) | 2017-11-16 | 2017-11-16 | 部品保持装置及び部品接合システム |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP6342566B1 (zh) |
CN (1) | CN109801856B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2020213502A1 (ja) * | 2019-04-15 | 2021-05-20 | 株式会社新川 | 実装装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05259203A (ja) * | 1992-03-13 | 1993-10-08 | Nippon Telegr & Teleph Corp <Ntt> | 光学素子のボンディング装置及びこの装置を用いたボンディング方法 |
WO2014024343A1 (ja) * | 2012-08-08 | 2014-02-13 | パナソニック株式会社 | 実装方法 |
JP2015060902A (ja) * | 2013-09-18 | 2015-03-30 | 東京エレクトロン株式会社 | 接合方法、プログラム、コンピュータ記憶媒体及び接合システム |
WO2016157461A1 (ja) * | 2015-03-31 | 2016-10-06 | 新電元工業株式会社 | 接合装置、接合方法及び加圧ユニット |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5091296B2 (ja) * | 2010-10-18 | 2012-12-05 | 東京エレクトロン株式会社 | 接合装置 |
SG11201508166RA (en) * | 2013-05-29 | 2015-12-30 | Apic Yamada Corp | Resin molding apparatus and resin molding method |
-
2017
- 2017-11-16 JP JP2017220805A patent/JP6342566B1/ja active Active
-
2018
- 2018-08-24 CN CN201810971646.2A patent/CN109801856B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05259203A (ja) * | 1992-03-13 | 1993-10-08 | Nippon Telegr & Teleph Corp <Ntt> | 光学素子のボンディング装置及びこの装置を用いたボンディング方法 |
WO2014024343A1 (ja) * | 2012-08-08 | 2014-02-13 | パナソニック株式会社 | 実装方法 |
JP2015060902A (ja) * | 2013-09-18 | 2015-03-30 | 東京エレクトロン株式会社 | 接合方法、プログラム、コンピュータ記憶媒体及び接合システム |
WO2016157461A1 (ja) * | 2015-03-31 | 2016-10-06 | 新電元工業株式会社 | 接合装置、接合方法及び加圧ユニット |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2020213502A1 (ja) * | 2019-04-15 | 2021-05-20 | 株式会社新川 | 実装装置 |
JP7132647B2 (ja) | 2019-04-15 | 2022-09-07 | 株式会社新川 | 実装装置 |
KR102503964B1 (ko) * | 2019-04-15 | 2023-02-28 | 가부시키가이샤 신가와 | 실장 장치 |
Also Published As
Publication number | Publication date |
---|---|
CN109801856A (zh) | 2019-05-24 |
JP2019089114A (ja) | 2019-06-13 |
CN109801856B (zh) | 2023-06-20 |
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