JP6298109B2 - 基板処理装置及びアライメント方法 - Google Patents
基板処理装置及びアライメント方法 Download PDFInfo
- Publication number
- JP6298109B2 JP6298109B2 JP2016136251A JP2016136251A JP6298109B2 JP 6298109 B2 JP6298109 B2 JP 6298109B2 JP 2016136251 A JP2016136251 A JP 2016136251A JP 2016136251 A JP2016136251 A JP 2016136251A JP 6298109 B2 JP6298109 B2 JP 6298109B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- movement
- alignment
- processing
- movement information
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000758 substrate Substances 0.000 title claims description 199
- 238000000034 method Methods 0.000 title claims description 27
- 238000003384 imaging method Methods 0.000 description 5
- 238000007781 pre-processing Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/682—Mask-wafer alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67196—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the transfer chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016136251A JP6298109B2 (ja) | 2016-07-08 | 2016-07-08 | 基板処理装置及びアライメント方法 |
KR1020170086161A KR102006067B1 (ko) | 2016-07-08 | 2017-07-06 | 기판 처리 장치 및 얼라인먼트 방법 |
CN201710549222.2A CN107591346B (zh) | 2016-07-08 | 2017-07-07 | 基板处理装置及对准方法 |
CN202111089795.4A CN113808975B (zh) | 2016-07-08 | 2017-07-07 | 基板处理装置及对准方法 |
KR1020190089809A KR102061456B1 (ko) | 2016-07-08 | 2019-07-24 | 기판 처리 장치 및 얼라인먼트 방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016136251A JP6298109B2 (ja) | 2016-07-08 | 2016-07-08 | 基板処理装置及びアライメント方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018003143A JP2018003143A (ja) | 2018-01-11 |
JP6298109B2 true JP6298109B2 (ja) | 2018-03-20 |
Family
ID=60948377
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016136251A Active JP6298109B2 (ja) | 2016-07-08 | 2016-07-08 | 基板処理装置及びアライメント方法 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP6298109B2 (zh) |
KR (2) | KR102006067B1 (zh) |
CN (2) | CN113808975B (zh) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7379072B2 (ja) * | 2019-01-11 | 2023-11-14 | キヤノントッキ株式会社 | 成膜装置、電子デバイスの製造装置、成膜方法及び電子デバイスの製造装置 |
JP7259476B2 (ja) * | 2019-03-27 | 2023-04-18 | 東京エレクトロン株式会社 | アライメント装置、基板処理装置、アライメント方法及び基板処理方法 |
JP7262703B2 (ja) * | 2019-06-11 | 2023-04-24 | 日本電気硝子株式会社 | ガラスロールの製造方法 |
CN111092039B (zh) * | 2019-12-30 | 2022-04-15 | 武汉大学 | 一种晶片传输系统 |
JP7446169B2 (ja) * | 2020-06-26 | 2024-03-08 | キヤノントッキ株式会社 | 基板搬送装置、基板処理システム、基板搬送方法、電子デバイスの製造方法、プログラム及び記憶媒体 |
CN111926306B (zh) * | 2020-09-22 | 2020-12-22 | 上海陛通半导体能源科技股份有限公司 | 基于多工艺腔传送的沉积设备及晶圆沉积方法 |
JP7177128B2 (ja) * | 2020-09-30 | 2022-11-22 | キヤノントッキ株式会社 | 成膜装置、検知装置、検知方法、及び電子デバイスの製造方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4239572B2 (ja) * | 2002-11-27 | 2009-03-18 | 東京エレクトロン株式会社 | 搬送システムの搬送位置合わせ方法及び処理システム |
JP4849825B2 (ja) * | 2005-05-18 | 2012-01-11 | 東京エレクトロン株式会社 | 処理装置、位置合わせ方法、制御プログラムおよびコンピュータ記憶媒体 |
KR100772843B1 (ko) * | 2006-02-13 | 2007-11-02 | 삼성전자주식회사 | 웨이퍼 얼라인 장치 및 방법 |
JP4961895B2 (ja) * | 2006-08-25 | 2012-06-27 | 東京エレクトロン株式会社 | ウェハ搬送装置、ウェハ搬送方法及び記憶媒体 |
JP2008173744A (ja) * | 2007-01-22 | 2008-07-31 | Tokyo Electron Ltd | 搬送システムの搬送位置合わせ方法 |
JP5064835B2 (ja) * | 2007-02-28 | 2012-10-31 | 株式会社アルバック | 基板搬送装置 |
JP5005428B2 (ja) * | 2007-05-31 | 2012-08-22 | 株式会社アルバック | 基板搬送方法、及び基板搬送装置 |
JP5390753B2 (ja) * | 2007-06-04 | 2014-01-15 | 株式会社アルバック | 基板搬送方法、及び基板搬送装置 |
JP2009194046A (ja) * | 2008-02-13 | 2009-08-27 | Hitachi High-Tech Control Systems Corp | 基板搬送装置および基板の偏心補正方法 |
US8185242B2 (en) * | 2008-05-07 | 2012-05-22 | Lam Research Corporation | Dynamic alignment of wafers using compensation values obtained through a series of wafer movements |
KR101517020B1 (ko) | 2008-05-15 | 2015-05-04 | 삼성디스플레이 주식회사 | 유기전계발광표시장치의 제조장치 및 제조방법 |
JP5208800B2 (ja) * | 2009-02-17 | 2013-06-12 | 東京エレクトロン株式会社 | 基板処理システム及び基板搬送方法 |
JP5773613B2 (ja) * | 2010-10-25 | 2015-09-02 | 東京エレクトロン株式会社 | 異常原因分析方法及び異常分析プログラム |
JP5851099B2 (ja) * | 2011-01-21 | 2016-02-03 | 株式会社日立ハイテクノロジーズ | 真空処理装置の運転方法 |
JP5600703B2 (ja) * | 2012-03-30 | 2014-10-01 | 東京エレクトロン株式会社 | 搬送装置及び搬送方法 |
JP6118044B2 (ja) * | 2012-07-19 | 2017-04-19 | 株式会社Screenホールディングス | 基板処理装置および基板処理方法 |
-
2016
- 2016-07-08 JP JP2016136251A patent/JP6298109B2/ja active Active
-
2017
- 2017-07-06 KR KR1020170086161A patent/KR102006067B1/ko active IP Right Grant
- 2017-07-07 CN CN202111089795.4A patent/CN113808975B/zh active Active
- 2017-07-07 CN CN201710549222.2A patent/CN107591346B/zh active Active
-
2019
- 2019-07-24 KR KR1020190089809A patent/KR102061456B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
CN113808975A (zh) | 2021-12-17 |
KR102061456B1 (ko) | 2019-12-31 |
JP2018003143A (ja) | 2018-01-11 |
KR20180006326A (ko) | 2018-01-17 |
KR102006067B1 (ko) | 2019-07-31 |
KR20190089822A (ko) | 2019-07-31 |
CN107591346B (zh) | 2022-02-11 |
CN113808975B (zh) | 2023-05-16 |
CN107591346A (zh) | 2018-01-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6298109B2 (ja) | 基板処理装置及びアライメント方法 | |
JP7097691B2 (ja) | ティーチング方法 | |
JP6576124B2 (ja) | 液滴吐出装置、液滴吐出方法、プログラム及びコンピュータ記憶媒体 | |
KR102000334B1 (ko) | 얼라인먼트 마크의 검출 방법, 얼라인먼트 방법 및 증착 방법 | |
US8223319B2 (en) | Exposure device | |
JP4865414B2 (ja) | アライメント方法 | |
JP6117724B2 (ja) | 塗布装置および塗布方法 | |
JP2004174669A5 (zh) | ||
JP2020105629A (ja) | アライメントシステム、成膜装置、成膜方法、及び電子デバイスの製造方法 | |
JP2006017895A (ja) | 露光装置 | |
TWI700160B (zh) | 基板搬送方法及基板處理系統 | |
TWI547973B (zh) | 描繪方法以及描繪裝置 | |
WO2017130746A1 (ja) | 露光装置及び露光方法 | |
JP2016062909A (ja) | 基板搬送システム、基板搬送方法、リソグラフィ装置、および物品の製造方法 | |
JP4685066B2 (ja) | 印刷装置 | |
JP2009164450A (ja) | はんだ描画装置および配線基板の製造方法 | |
JP2005072317A (ja) | 実装方法及び装置 | |
US20090303483A1 (en) | Exposure apparatus and device manufacturing method | |
JP2008083520A (ja) | 露光装置およびアライメント方法 | |
JP2017204508A5 (zh) | ||
JP5648242B2 (ja) | 露光システム及びその制御方法 | |
JP5947406B2 (ja) | 変形計測装置並びにシート処理装置 | |
JP2009258682A (ja) | 露光装置、及び露光方法 | |
US20040189973A1 (en) | Substrate exposure system | |
KR102320394B1 (ko) | 노광장치 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A975 | Report on accelerated examination |
Free format text: JAPANESE INTERMEDIATE CODE: A971005 Effective date: 20171106 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20171113 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20171228 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20180129 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20180222 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6298109 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |