JP6288184B2 - ガラス基板およびガラス基板の製造方法 - Google Patents

ガラス基板およびガラス基板の製造方法 Download PDF

Info

Publication number
JP6288184B2
JP6288184B2 JP2016158971A JP2016158971A JP6288184B2 JP 6288184 B2 JP6288184 B2 JP 6288184B2 JP 2016158971 A JP2016158971 A JP 2016158971A JP 2016158971 A JP2016158971 A JP 2016158971A JP 6288184 B2 JP6288184 B2 JP 6288184B2
Authority
JP
Japan
Prior art keywords
polishing
grinding
point
region
start point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2016158971A
Other languages
English (en)
Japanese (ja)
Other versions
JP2018024072A (ja
Inventor
正直 中西
正直 中西
英雄 本村
英雄 本村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Priority to JP2016158971A priority Critical patent/JP6288184B2/ja
Priority to TW106120702A priority patent/TWI726118B/zh
Priority to KR1020170096019A priority patent/KR102289541B1/ko
Priority to CN201811625636.XA priority patent/CN109590817B/zh
Priority to CN201710676478.XA priority patent/CN107363693B/zh
Publication of JP2018024072A publication Critical patent/JP2018024072A/ja
Application granted granted Critical
Publication of JP6288184B2 publication Critical patent/JP6288184B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00Surface treatment of glass, not in the form of fibres or filaments, by etching
    • C03C15/02Surface treatment of glass, not in the form of fibres or filaments, by etching for making a smooth surface
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00Other grinding machines or devices
    • B24B27/0076Other grinding machines or devices grinding machines comprising two or more grinding tools
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00Other grinding machines or devices
    • B24B27/0092Grinding attachments for lathes or the like
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/06Work supports, e.g. adjustable steadies
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/24Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass
    • B24B7/241Methods
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/24Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass
    • B24B7/242Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass for plate glass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/04Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
    • B24D3/06Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
    • B24D3/10Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements for porous or cellular structure, e.g. for use with diamonds as abrasives
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B35/00Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
    • C03B35/14Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands
    • C03B35/20Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands by gripping tongs or supporting frames
    • C03B35/202Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands by gripping tongs or supporting frames by supporting frames
    • C03B35/207Construction or design of supporting frames
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
JP2016158971A 2016-08-12 2016-08-12 ガラス基板およびガラス基板の製造方法 Active JP6288184B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2016158971A JP6288184B2 (ja) 2016-08-12 2016-08-12 ガラス基板およびガラス基板の製造方法
TW106120702A TWI726118B (zh) 2016-08-12 2017-06-21 玻璃基板及玻璃基板的製造方法
KR1020170096019A KR102289541B1 (ko) 2016-08-12 2017-07-28 유리 기판 및 유리 기판의 제조 방법
CN201811625636.XA CN109590817B (zh) 2016-08-12 2017-08-09 玻璃基板
CN201710676478.XA CN107363693B (zh) 2016-08-12 2017-08-09 玻璃基板和玻璃基板的制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016158971A JP6288184B2 (ja) 2016-08-12 2016-08-12 ガラス基板およびガラス基板の製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2018010442A Division JP2018076230A (ja) 2018-01-25 2018-01-25 ガラス基板およびガラス基板の製造方法

Publications (2)

Publication Number Publication Date
JP2018024072A JP2018024072A (ja) 2018-02-15
JP6288184B2 true JP6288184B2 (ja) 2018-03-07

Family

ID=60309483

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016158971A Active JP6288184B2 (ja) 2016-08-12 2016-08-12 ガラス基板およびガラス基板の製造方法

Country Status (4)

Country Link
JP (1) JP6288184B2 (zh)
KR (1) KR102289541B1 (zh)
CN (2) CN107363693B (zh)
TW (1) TWI726118B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018076230A (ja) * 2018-01-25 2018-05-17 旭硝子株式会社 ガラス基板およびガラス基板の製造方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6925507B2 (ja) * 2018-03-14 2021-08-25 富士フイルム株式会社 カバーガラス、紫外線照射システム、及び光学フィルムの製造方法
JP6597858B1 (ja) * 2018-09-04 2019-10-30 Agc株式会社 ディスプレイ用ガラス
JP7138898B2 (ja) * 2019-08-04 2022-09-20 坂東機工株式会社 ガラス板加工装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6325704B1 (en) * 1999-06-14 2001-12-04 Corning Incorporated Method for finishing edges of glass sheets
JP4588863B2 (ja) * 2000-11-21 2010-12-01 旭硝子株式会社 板ガラスの端縁部研磨方法
DE10061366A1 (de) * 2000-12-09 2002-07-04 Schott Glas Schleifscheibe und Verfahren zum Schleifen von Flachfacetten an Glasscheiben, insbesondere an Glaskeramikscheiben
US7323276B2 (en) * 2003-03-26 2008-01-29 Hoya Corporation Substrate for photomask, photomask blank and photomask
US7435161B2 (en) * 2003-06-17 2008-10-14 Cabot Microelectronics Corporation Multi-layer polishing pad material for CMP
WO2010029878A1 (ja) * 2008-09-10 2010-03-18 Hoya株式会社 磁気ディスク用ガラス基板の製造方法、磁気ディスク用ガラス基板、磁気ディスクの製造方法及び磁気ディスク
KR101168712B1 (ko) * 2009-02-13 2012-09-13 호야 가부시키가이샤 마스크블랭크용 기판, 마스크블랭크 및 포토마스크
CN102194626B (zh) * 2010-03-08 2015-11-25 旭硝子株式会社 玻璃基板
JP5534222B2 (ja) * 2010-03-08 2014-06-25 旭硝子株式会社 ガラス基板
KR102223005B1 (ko) * 2014-10-20 2021-03-03 동우 화인켐 주식회사 유리 면취 방법
WO2016067926A1 (ja) * 2014-10-28 2016-05-06 旭硝子株式会社 ガラス及びガラスの製造方法
JP5915718B1 (ja) * 2014-11-07 2016-05-11 旭硝子株式会社 磁気ディスク用ガラス基板及び磁気ディスク

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018076230A (ja) * 2018-01-25 2018-05-17 旭硝子株式会社 ガラス基板およびガラス基板の製造方法

Also Published As

Publication number Publication date
CN109590817B (zh) 2020-12-18
KR20180018332A (ko) 2018-02-21
CN107363693B (zh) 2019-01-11
TW201805107A (zh) 2018-02-16
CN109590817A (zh) 2019-04-09
CN107363693A (zh) 2017-11-21
KR102289541B1 (ko) 2021-08-12
JP2018024072A (ja) 2018-02-15
TWI726118B (zh) 2021-05-01

Similar Documents

Publication Publication Date Title
JP6288184B2 (ja) ガラス基板およびガラス基板の製造方法
JP4406752B2 (ja) ガラス基板の端面加工装置及び端面加工方法
JP5817722B2 (ja) ガラス基板及びガラス基板の製造方法
KR102192452B1 (ko) 레진 본드 지석의 연마용 홈의 제작 방법, 레진 본드 지석, 판상체의 가공 장치 및 판상체의 가공 방법
KR20150050576A (ko) 유리 시트 및 유리 시트 성형 방법
JP5988765B2 (ja) ウェーハの面取り加工方法、ウェーハの面取り加工装置および砥石角度調整用治具
JP4883352B2 (ja) 板状体の面取り方法及びその装置
WO2013108725A1 (ja) ガラス板の製造方法、ディスプレイ用ガラス基板の製造方法及びガラス板
WO2005070619A1 (ja) ウエーハの研削方法及びウエーハ
JP2018076230A (ja) ガラス基板およびガラス基板の製造方法
WO2008059930A1 (fr) Procede de fabrication de substrat de disque
JP7415267B2 (ja) ガラス板の製造方法
JP5726061B2 (ja) ウェハの製造方法および半導体装置の製造方法
JP7022330B2 (ja) 板ガラスの製造方法および製造装置
JP6609847B2 (ja) 板状物の端面加工装置
JP2000176805A (ja) 半導体ウェーハの面取り装置
CN219805799U (zh) 用于对硅片进行倒角的t型的磨轮组件及研磨装置
JP5944581B2 (ja) 半導体ウエハ研削装置、半導体ウエハの製造方法、及び半導体ウエハの研削方法
WO2019187875A1 (ja) 板ガラスの製造方法および製造装置
JP2013235952A (ja) 複合半導体基板およびその製造方法

Legal Events

Date Code Title Description
A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20171121

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20171218

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20180109

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20180122

R150 Certificate of patent or registration of utility model

Ref document number: 6288184

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250