JP6278605B2 - 位置測定装置とこのような位置測定装置を備えた構造体 - Google Patents

位置測定装置とこのような位置測定装置を備えた構造体 Download PDF

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Publication number
JP6278605B2
JP6278605B2 JP2013056864A JP2013056864A JP6278605B2 JP 6278605 B2 JP6278605 B2 JP 6278605B2 JP 2013056864 A JP2013056864 A JP 2013056864A JP 2013056864 A JP2013056864 A JP 2013056864A JP 6278605 B2 JP6278605 B2 JP 6278605B2
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Prior art keywords
measurement
measuring device
position measuring
reflector
along
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Japanese (ja)
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JP2013195432A (ja
JP2013195432A5 (enExample
Inventor
ヴォルフガング・ホルツアプフェル
イェルク・ドレシャー
マルクス・マイスナー
ラルフ・イェルガー
ベルンハルト・ムシュ
トーマス・ケルベラー
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Dr Johannes Heidenhain GmbH
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Dr Johannes Heidenhain GmbH
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Publication of JP2013195432A5 publication Critical patent/JP2013195432A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34746—Linear encoders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D2205/00—Indexing scheme relating to details of means for transferring or converting the output of a sensing member
    • G01D2205/90—Two-dimensional encoders, i.e. having one or two codes extending in two directions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP2013056864A 2012-03-22 2013-03-19 位置測定装置とこのような位置測定装置を備えた構造体 Active JP6278605B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102012204572A DE102012204572A1 (de) 2012-03-22 2012-03-22 Positionsmesseinrichtung und Anordnung mit einer derartigen Positionsmesseinrichtung
DE102012204572.4 2012-03-22

Publications (3)

Publication Number Publication Date
JP2013195432A JP2013195432A (ja) 2013-09-30
JP2013195432A5 JP2013195432A5 (enExample) 2016-01-07
JP6278605B2 true JP6278605B2 (ja) 2018-02-14

Family

ID=47827024

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Application Number Title Priority Date Filing Date
JP2013056864A Active JP6278605B2 (ja) 2012-03-22 2013-03-19 位置測定装置とこのような位置測定装置を備えた構造体

Country Status (6)

Country Link
US (1) US9389065B2 (enExample)
EP (1) EP2642254B1 (enExample)
JP (1) JP6278605B2 (enExample)
KR (1) KR101864770B1 (enExample)
CN (1) CN103322910B (enExample)
DE (1) DE102012204572A1 (enExample)

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AU2013365772B2 (en) 2012-12-19 2017-08-10 Basf Se Detector for optically detecting at least one object
CN105452808A (zh) 2013-06-13 2016-03-30 巴斯夫欧洲公司 用于光学检测至少一个对象的取向的检测器
US9989623B2 (en) 2013-06-13 2018-06-05 Basf Se Detector for determining a longitudinal coordinate of an object via an intensity distribution of illuminated pixels
WO2015024870A1 (en) 2013-08-19 2015-02-26 Basf Se Detector for determining a position of at least one object
EP3036503B1 (en) 2013-08-19 2019-08-07 Basf Se Optical detector
KR102397527B1 (ko) 2014-07-08 2022-05-13 바스프 에스이 하나 이상의 물체의 위치를 결정하기 위한 검출기
WO2016051323A1 (en) * 2014-09-29 2016-04-07 Basf Se Detector for optically determining a position of at least one object
EP3230841B1 (en) 2014-12-09 2019-07-03 Basf Se Optical detector
CN107438775B (zh) 2015-01-30 2022-01-21 特里纳米克斯股份有限公司 用于至少一个对象的光学检测的检测器
WO2017012986A1 (en) 2015-07-17 2017-01-26 Trinamix Gmbh Detector for optically detecting at least one object
CN108141579B (zh) 2015-09-14 2020-06-12 特里纳米克斯股份有限公司 3d相机
CN109564927B (zh) 2016-07-29 2023-06-20 特里纳米克斯股份有限公司 光学传感器和用于光学检测的检测器
JP2019532517A (ja) 2016-10-25 2019-11-07 トリナミクス ゲゼルシャフト ミット ベシュレンクテル ハフツング 光学的に検出するための光検出器
JP7241684B2 (ja) 2016-10-25 2023-03-17 トリナミクス ゲゼルシャフト ミット ベシュレンクテル ハフツング 少なくとも１個の対象物の光学的な検出のための検出器
US11860292B2 (en) 2016-11-17 2024-01-02 Trinamix Gmbh Detector and methods for authenticating at least one object
EP3571522B1 (en) 2016-11-17 2023-05-10 trinamiX GmbH Detector for optically detecting at least one object
US11060922B2 (en) 2017-04-20 2021-07-13 Trinamix Gmbh Optical detector
US11067692B2 (en) 2017-06-26 2021-07-20 Trinamix Gmbh Detector for determining a position of at least one object
JP7141313B2 (ja) * 2018-11-06 2022-09-22 Dmg森精機株式会社 変位検出装置
CN111721210B (zh) * 2020-06-19 2021-11-12 深圳市汉森软件有限公司 变换逻辑光栅分辨率后的初始化方法、装置、设备及介质

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JPH08247790A (ja) * 1995-03-10 1996-09-27 Sefuto Kenkyusho:Kk 位置検出装置
DE19633337A1 (de) * 1996-08-07 1998-02-12 Harry Prof Dr Ing Trumpold Positionsmeßsystem
JP4576014B2 (ja) * 1999-12-21 2010-11-04 オリンパス株式会社 光学式エンコーダー
EP1319170B1 (de) * 2000-09-14 2005-03-09 Dr. Johannes Heidenhain GmbH Positionsmesseinrichtung
US7102729B2 (en) * 2004-02-03 2006-09-05 Asml Netherlands B.V. Lithographic apparatus, measurement system, and device manufacturing method
DE102005029917A1 (de) * 2005-06-28 2007-01-04 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
WO2007034824A1 (ja) * 2005-09-21 2007-03-29 Matsushita Electric Industrial Co., Ltd. 角度測定装置及び方法
JP4932284B2 (ja) * 2006-03-03 2012-05-16 株式会社ミツトヨ 光電式エンコーダ
JP4601006B2 (ja) * 2006-09-29 2010-12-22 本田技研工業株式会社 エアクリーナ装置
JP2008108906A (ja) * 2006-10-25 2008-05-08 Canon Inc 位置決め装置
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DE102007035345A1 (de) 2006-11-20 2008-05-21 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
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US7804579B2 (en) 2007-06-21 2010-09-28 Asml Netherlands B.V. Control system, lithographic projection apparatus, method of controlling a support structure, and a computer program product
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JP5344180B2 (ja) * 2008-02-08 2013-11-20 株式会社ニコン 位置計測システム及び位置計測方法、移動体装置、移動体駆動方法、露光装置及び露光方法、パターン形成装置、並びにデバイス製造方法
KR20100041024A (ko) * 2008-10-13 2010-04-22 한국표준과학연구원 2차원 회절 격자를 이용한 6 자유도 측정 장치
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EP3006902B1 (en) * 2010-03-30 2018-04-11 Zygo Corporation Lithography method and lithography system
JP5656467B2 (ja) * 2010-06-17 2015-01-21 Dmg森精機株式会社 位置検出装置
JP5754971B2 (ja) * 2011-02-14 2015-07-29 キヤノン株式会社 形状測定装置及び形状測定方法
DE102012201393A1 (de) 2012-02-01 2013-08-01 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung und Anordnung mit mehreren Positionsmesseinrichtungen

Also Published As

Publication number Publication date
EP2642254A2 (de) 2013-09-25
EP2642254A3 (de) 2015-04-15
JP2013195432A (ja) 2013-09-30
CN103322910B (zh) 2017-10-27
US20130235390A1 (en) 2013-09-12
US9389065B2 (en) 2016-07-12
CN103322910A (zh) 2013-09-25
KR20130108121A (ko) 2013-10-02
EP2642254B1 (de) 2015-11-25
DE102012204572A1 (de) 2013-09-26
KR101864770B1 (ko) 2018-06-05

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