KR101864770B1 - 위치 측정 장치 및 이러한 위치 측정 장치를 포함하는 시스템 - Google Patents

위치 측정 장치 및 이러한 위치 측정 장치를 포함하는 시스템 Download PDF

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KR101864770B1
KR101864770B1 KR1020130025270A KR20130025270A KR101864770B1 KR 101864770 B1 KR101864770 B1 KR 101864770B1 KR 1020130025270 A KR1020130025270 A KR 1020130025270A KR 20130025270 A KR20130025270 A KR 20130025270A KR 101864770 B1 KR101864770 B1 KR 101864770B1
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South Korea
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measurement
measuring device
position measuring
along
region
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KR20130108121A (ko
Inventor
볼프강 독터. 홀자프펠
외르크 독터. 드레셔
마르쿠스 독터. 마이스너
랄프 독터. 요르거
베른하르트 독터. 무쉬
토마스 칼버러
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덕터 요한네스 하이덴하인 게엠베하
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34746—Linear encoders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D2205/00—Indexing scheme relating to details of means for transferring or converting the output of a sensing member
    • G01D2205/90—Two-dimensional encoders, i.e. having one or two codes extending in two directions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
KR1020130025270A 2012-03-22 2013-03-08 위치 측정 장치 및 이러한 위치 측정 장치를 포함하는 시스템 Active KR101864770B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102012204572.4 2012-03-22
DE102012204572A DE102012204572A1 (de) 2012-03-22 2012-03-22 Positionsmesseinrichtung und Anordnung mit einer derartigen Positionsmesseinrichtung

Publications (2)

Publication Number Publication Date
KR20130108121A KR20130108121A (ko) 2013-10-02
KR101864770B1 true KR101864770B1 (ko) 2018-06-05

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KR1020130025270A Active KR101864770B1 (ko) 2012-03-22 2013-03-08 위치 측정 장치 및 이러한 위치 측정 장치를 포함하는 시스템

Country Status (6)

Country Link
US (1) US9389065B2 (enExample)
EP (1) EP2642254B1 (enExample)
JP (1) JP6278605B2 (enExample)
KR (1) KR101864770B1 (enExample)
CN (1) CN103322910B (enExample)
DE (1) DE102012204572A1 (enExample)

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AU2013365772B2 (en) 2012-12-19 2017-08-10 Basf Se Detector for optically detecting at least one object
JP6440696B2 (ja) 2013-06-13 2018-12-19 ビーエーエスエフ ソシエタス・ヨーロピアＢａｓｆ Ｓｅ 少なくとも１つの物体の方位を光学的に検出する検出器
AU2014280332B2 (en) 2013-06-13 2017-09-07 Basf Se Detector for optically detecting at least one object
CN105637382B (zh) 2013-08-19 2017-08-25 巴斯夫欧洲公司 用于确定至少一种物体的位置的检测器
JP6403776B2 (ja) 2013-08-19 2018-10-10 ビーエーエスエフ ソシエタス・ヨーロピアＢａｓｆ Ｓｅ 光学検出器
JP6660931B2 (ja) 2014-07-08 2020-03-11 ビーエーエスエフ ソシエタス・ヨーロピアＢａｓｆ Ｓｅ 少なくとも１つの物体の位置を決定するための検出器
JP6578006B2 (ja) 2014-09-29 2019-09-18 ビーエーエスエフ ソシエタス・ヨーロピアＢａｓｆ Ｓｅ 少なくとも１個の物体の位置を光学的に求めるための検出器
EP3230841B1 (en) 2014-12-09 2019-07-03 Basf Se Optical detector
US10775505B2 (en) 2015-01-30 2020-09-15 Trinamix Gmbh Detector for an optical detection of at least one object
CN108027239B (zh) 2015-07-17 2020-07-24 特里纳米克斯股份有限公司 用于光学检测至少一个对象的检测器
JP6755316B2 (ja) 2015-09-14 2020-09-16 トリナミクス ゲゼルシャフト ミット ベシュレンクテル ハフツング 少なくとも１つの物体の少なくとも１つの画像を記録するカメラ
KR102492134B1 (ko) 2016-07-29 2023-01-27 트리나미엑스 게엠베하 광학 센서 및 광학적 검출용 검출기
WO2018077870A1 (en) 2016-10-25 2018-05-03 Trinamix Gmbh Nfrared optical detector with integrated filter
KR102431355B1 (ko) 2016-10-25 2022-08-10 트리나미엑스 게엠베하 적어도 하나의 대상체의 광학적 검출을 위한 검출기
US11860292B2 (en) 2016-11-17 2024-01-02 Trinamix Gmbh Detector and methods for authenticating at least one object
CN109964144B (zh) 2016-11-17 2023-07-18 特里纳米克斯股份有限公司 用于光学探测至少一个对象的检测器
JP7204667B2 (ja) 2017-04-20 2023-01-16 トリナミクス ゲゼルシャフト ミット ベシュレンクテル ハフツング 光検出器
JP7237024B2 (ja) 2017-06-26 2023-03-10 トリナミクス ゲゼルシャフト ミット ベシュレンクテル ハフツング 少なくとも１つの物体の位置を決定するための検出器
JP7141313B2 (ja) * 2018-11-06 2022-09-22 Dmg森精機株式会社 変位検出装置
CN111721210B (zh) * 2020-06-19 2021-11-12 深圳市汉森软件有限公司 变换逻辑光栅分辨率后的初始化方法、装置、设备及介质

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JP2009068112A (ja) 2008-10-24 2009-04-02 Canon Anelva Corp マグネトロンスパッタリング装置

Also Published As

Publication number Publication date
US20130235390A1 (en) 2013-09-12
CN103322910B (zh) 2017-10-27
US9389065B2 (en) 2016-07-12
DE102012204572A1 (de) 2013-09-26
EP2642254A2 (de) 2013-09-25
EP2642254A3 (de) 2015-04-15
JP2013195432A (ja) 2013-09-30
KR20130108121A (ko) 2013-10-02
JP6278605B2 (ja) 2018-02-14
EP2642254B1 (de) 2015-11-25
CN103322910A (zh) 2013-09-25

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