JP6261463B2 - 圧力測定装置および圧力測定方法 - Google Patents

圧力測定装置および圧力測定方法 Download PDF

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Publication number
JP6261463B2
JP6261463B2 JP2014133268A JP2014133268A JP6261463B2 JP 6261463 B2 JP6261463 B2 JP 6261463B2 JP 2014133268 A JP2014133268 A JP 2014133268A JP 2014133268 A JP2014133268 A JP 2014133268A JP 6261463 B2 JP6261463 B2 JP 6261463B2
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Japan
Prior art keywords
voltage drop
current
pressure
resistor
value
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JP2014133268A
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Japanese (ja)
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JP2016011877A (ja
JP2016011877A5 (enExample
Inventor
朋秀 南
朋秀 南
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Priority to JP2014133268A priority Critical patent/JP6261463B2/ja
Priority to US14/733,327 priority patent/US9970838B2/en
Publication of JP2016011877A publication Critical patent/JP2016011877A/ja
Publication of JP2016011877A5 publication Critical patent/JP2016011877A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/025—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning with temperature compensating means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
    • G01L21/12—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP2014133268A 2014-06-27 2014-06-27 圧力測定装置および圧力測定方法 Active JP6261463B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2014133268A JP6261463B2 (ja) 2014-06-27 2014-06-27 圧力測定装置および圧力測定方法
US14/733,327 US9970838B2 (en) 2014-06-27 2015-06-08 Pressure measuring device and pressure measuring method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014133268A JP6261463B2 (ja) 2014-06-27 2014-06-27 圧力測定装置および圧力測定方法

Publications (3)

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JP2016011877A JP2016011877A (ja) 2016-01-21
JP2016011877A5 JP2016011877A5 (enExample) 2017-04-13
JP6261463B2 true JP6261463B2 (ja) 2018-01-17

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JP2014133268A Active JP6261463B2 (ja) 2014-06-27 2014-06-27 圧力測定装置および圧力測定方法

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US (1) US9970838B2 (enExample)
JP (1) JP6261463B2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6819163B2 (ja) * 2016-09-12 2021-01-27 株式会社デンソーウェーブ 絶縁型信号伝達装置、電子機器
US10845263B2 (en) 2018-04-17 2020-11-24 Mks Instruments, Inc. Thermal conductivity gauge
JP6609728B1 (ja) * 2018-12-12 2019-11-20 株式会社アルバック 圧力測定システム
CN111721469A (zh) * 2020-06-17 2020-09-29 中国计量大学 一种高灵敏度微型皮拉尼计
WO2022104316A1 (en) 2020-11-16 2022-05-19 Mks Instruments, Inc. Thermal conductivity gauge
US12123794B2 (en) 2022-10-11 2024-10-22 Mks Instruments, Inc. Pirani gauge with model of power dissipation
CN116007831B (zh) * 2022-12-24 2024-04-16 兰州空间技术物理研究所 一种复合式mems真空规及其制作方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61240135A (ja) * 1985-04-17 1986-10-25 Yamatake Honeywell Co Ltd 真空計
US4866640A (en) * 1987-08-20 1989-09-12 Granville-Phillips Company Temperature compensation for pressure gauge
JPH08285582A (ja) * 1995-04-11 1996-11-01 Yupiteru Ind Co Ltd 高度計及びそれを用いた高度補正方法
JP2006153782A (ja) * 2004-11-30 2006-06-15 Mitsuteru Kimura 多孔蓋を有した気体センシングデバイス
EP1772717B1 (en) * 2005-10-04 2011-05-11 Sensirion Holding AG Pressure or gas sensor and sensing method using nano-cavities
JP4994058B2 (ja) * 2007-02-27 2012-08-08 株式会社アルバック 圧力測定装置および圧力測定方法
WO2009096504A1 (ja) * 2008-01-31 2009-08-06 The Ritsumeikan Trust マイクロ真空計
JP5463361B2 (ja) * 2009-09-15 2014-04-09 キヤノンアネルバ株式会社 平均自由行程を測定する装置および真空容器
US8504313B2 (en) * 2010-03-22 2013-08-06 Dennis Cardinale Electronic vacuum gauge and systems and methods of calibration and operation of same
WO2014057536A1 (ja) * 2012-10-10 2014-04-17 株式会社岡野製作所 圧力センサおよび該センサを用いた真空加工装置

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JP2016011877A (ja) 2016-01-21
US9970838B2 (en) 2018-05-15
US20150377732A1 (en) 2015-12-31

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