JP2016011877A5 - - Google Patents

Download PDF

Info

Publication number
JP2016011877A5
JP2016011877A5 JP2014133268A JP2014133268A JP2016011877A5 JP 2016011877 A5 JP2016011877 A5 JP 2016011877A5 JP 2014133268 A JP2014133268 A JP 2014133268A JP 2014133268 A JP2014133268 A JP 2014133268A JP 2016011877 A5 JP2016011877 A5 JP 2016011877A5
Authority
JP
Japan
Prior art keywords
current
voltage drop
current value
resistor
electric resistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2014133268A
Other languages
English (en)
Japanese (ja)
Other versions
JP6261463B2 (ja
JP2016011877A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2014133268A priority Critical patent/JP6261463B2/ja
Priority claimed from JP2014133268A external-priority patent/JP6261463B2/ja
Priority to US14/733,327 priority patent/US9970838B2/en
Publication of JP2016011877A publication Critical patent/JP2016011877A/ja
Publication of JP2016011877A5 publication Critical patent/JP2016011877A5/ja
Application granted granted Critical
Publication of JP6261463B2 publication Critical patent/JP6261463B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2014133268A 2014-06-27 2014-06-27 圧力測定装置および圧力測定方法 Active JP6261463B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2014133268A JP6261463B2 (ja) 2014-06-27 2014-06-27 圧力測定装置および圧力測定方法
US14/733,327 US9970838B2 (en) 2014-06-27 2015-06-08 Pressure measuring device and pressure measuring method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014133268A JP6261463B2 (ja) 2014-06-27 2014-06-27 圧力測定装置および圧力測定方法

Publications (3)

Publication Number Publication Date
JP2016011877A JP2016011877A (ja) 2016-01-21
JP2016011877A5 true JP2016011877A5 (enExample) 2017-04-13
JP6261463B2 JP6261463B2 (ja) 2018-01-17

Family

ID=54930172

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014133268A Active JP6261463B2 (ja) 2014-06-27 2014-06-27 圧力測定装置および圧力測定方法

Country Status (2)

Country Link
US (1) US9970838B2 (enExample)
JP (1) JP6261463B2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6819163B2 (ja) * 2016-09-12 2021-01-27 株式会社デンソーウェーブ 絶縁型信号伝達装置、電子機器
US10845263B2 (en) 2018-04-17 2020-11-24 Mks Instruments, Inc. Thermal conductivity gauge
WO2020121576A1 (ja) * 2018-12-12 2020-06-18 株式会社アルバック 真空計及びこの真空計を備える圧力測定システム
CN111721469A (zh) * 2020-06-17 2020-09-29 中国计量大学 一种高灵敏度微型皮拉尼计
CN116547510A (zh) 2020-11-16 2023-08-04 万机仪器公司 导热仪
US12123794B2 (en) 2022-10-11 2024-10-22 Mks Instruments, Inc. Pirani gauge with model of power dissipation
JP2024074543A (ja) * 2022-11-21 2024-05-31 アズビル株式会社 調整装置及び隔膜真空計
CN116007831B (zh) * 2022-12-24 2024-04-16 兰州空间技术物理研究所 一种复合式mems真空规及其制作方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61240135A (ja) * 1985-04-17 1986-10-25 Yamatake Honeywell Co Ltd 真空計
US4866640A (en) * 1987-08-20 1989-09-12 Granville-Phillips Company Temperature compensation for pressure gauge
JPH08285582A (ja) * 1995-04-11 1996-11-01 Yupiteru Ind Co Ltd 高度計及びそれを用いた高度補正方法
JP2006153782A (ja) * 2004-11-30 2006-06-15 Mitsuteru Kimura 多孔蓋を有した気体センシングデバイス
EP1772717B1 (en) * 2005-10-04 2011-05-11 Sensirion Holding AG Pressure or gas sensor and sensing method using nano-cavities
JP4994058B2 (ja) * 2007-02-27 2012-08-08 株式会社アルバック 圧力測定装置および圧力測定方法
EP2237009A4 (en) * 2008-01-31 2013-01-16 Ritsumeikan Trust MICRO VACUUM GAUGE
CN102630298B (zh) * 2009-09-15 2014-08-13 佳能安内华股份有限公司 平均自由程测量装置、真空计和平均自由程测量方法
US8504313B2 (en) * 2010-03-22 2013-08-06 Dennis Cardinale Electronic vacuum gauge and systems and methods of calibration and operation of same
JP5764723B2 (ja) * 2012-10-10 2015-08-19 株式会社岡野製作所 圧力センサおよび該センサを用いた真空加工装置

Similar Documents

Publication Publication Date Title
JP2015045515A5 (enExample)
AR102054A1 (es) Sistema electrónico de provisión de aerosoles
JP2014529847A5 (enExample)
JP2015062013A5 (enExample)
JP2016523356A5 (enExample)
JP2009081415A5 (enExample)
MX383965B (es) Elemento calentador como sensor para control de temperatura en sistemas transitorios.
JP2016177941A5 (enExample)
MX2014006660A (es) Flujometro termico.
JP2016505218A5 (enExample)
ATE524713T1 (de) Temperaturdetektor
DK4074145T3 (da) Plasmagasstrømvolumenmålings- og styresystem til metalbasererede trådplasmabueanvendelser i additivfremstilling
JP6561719B2 (ja) ガスセンサ
JP2012058043A5 (enExample)
CN109323732B (zh) 热式流量计以及流量校正方法
JP6263272B2 (ja) 電流検出装置および電流を検出する方法
TWI731177B (zh) 流體感測器、具備該流體感測器的流體控制裝置以及調整方法
JPWO2020255427A5 (enExample)
US9970962B2 (en) Non-contact type voltage sensor for dual-wire power cable and method for compensating installation position variation thereof
JP2011219173A5 (enExample)
CN103713013B (zh) 测试管状材料轴向导热系数的装置
WO2014011674A3 (en) Methods and apparatuses for forming semiconductor films
CN203720120U (zh) 一种测试管状材料轴向导热系数的装置
RU2014108450A (ru) Способ определения места протечки теплотрассы
CN207243986U (zh) 真空镀膜设备