JP6234497B2 - エンコーダ装置及びエンコーダ装置付き運動案内装置 - Google Patents
エンコーダ装置及びエンコーダ装置付き運動案内装置 Download PDFInfo
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- JP6234497B2 JP6234497B2 JP2016050530A JP2016050530A JP6234497B2 JP 6234497 B2 JP6234497 B2 JP 6234497B2 JP 2016050530 A JP2016050530 A JP 2016050530A JP 2016050530 A JP2016050530 A JP 2016050530A JP 6234497 B2 JP6234497 B2 JP 6234497B2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
- G01D5/2053—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by a movable non-ferromagnetic conductive element
- G01D5/206—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by a movable non-ferromagnetic conductive element constituting a short-circuiting element
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
- G01D5/2053—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by a movable non-ferromagnetic conductive element
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/24428—Error prevention
- G01D5/24433—Error prevention by mechanical means
- G01D5/24438—Special design of the sensing element or scale
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
- G01D5/2454—Encoders incorporating incremental and absolute signals
- G01D5/2455—Encoders incorporating incremental and absolute signals with incremental and absolute tracks on the same encoder
- G01D5/2457—Incremental encoders having reference marks
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Description
Claims (8)
- リファレンスマークとヘッドとを備えるエンコーダ装置であって、
前記リファレンスマークは、第一スケールコイルと、前記第一スケールコイルに電気的に接続される第二スケールコイルと、を有し、
前記ヘッドは、前記第一スケールコイルに非接触で電磁波を送信する送信コイルと、前記第二スケールコイルから非接触で電磁波を受信する受信コイルと、前記第一スケールコイルに前記送信コイルが対向し、前記第二スケールコイルに前記受信コイルが対向する場合、前記受信コイルが受信した電磁波から原点信号生成用のパルスを生成する電気回路と、を有するエンコーダ装置。 - 前記エンコーダ装置は、インクリメンタル型磁気スケールを備え、
前記ヘッドは、前記インクリメンタル型磁気スケールの磁界を読み取る磁気センサを備えることを特徴とする請求項1に記載のエンコーダ装置。 - 前記リファレンスマークと前記インクリメンタル型磁気スケールとが重ねて配置されることを特徴とする請求項2に記載のエンコーダ装置。
- 前記磁気センサは、前記送信コイルと前記受信コイルとの間に配置されることを特徴とする請求項2又は3に記載のエンコーダ装置。
- 前記電気回路は、
前記受信コイルが受信した電磁波を検波し、電磁波の交流を直流に整流する検波・整流回路と、
前記検波・整流回路が整流した直流電圧を所定の閾値と比較し、前記原点信号生成用のパルスを生成するコンパレータと、を備えることを特徴とする請求項1ないし4のいずれか1項に記載のエンコーダ装置。 - 前記エンコーダ装置は、第一部材に対して相対移動する第二部材の位置を検出し、
前記第一スケールコイルと前記第二スケールコイルとが、前記第二部材の相対移動方向に離れて配置されることを特徴とする請求項1ないし5のいずれか1項に記載のエンコーダ装置。 - 前記送信コイルが送信する電磁波の周波数は、前記インクリメンタル型磁気スケールの磁界の周波数の10倍以上であることを特徴とする請求項2ないし4のいずれか1項に記載のエンコーダ装置。
ここで、前記インクリメンタル型磁気スケールの磁界の周波数はV/Pから求められ、前記エンコーダ装置は第一部材に対して相対移動する第二部材の位置を検出し、前記Vは前記第一部材に対する前記第二部材の相対速度であり、前記Pは前記インクリメンタル型磁気スケールの磁極間ピッチである。 - 請求項1ないし7のいずれか1項に記載のエンコーダ装置と、
前記リファレンスマークが取り付けられる軌道レールと、
前記ヘッドが取り付けられ、前記軌道レールに移相対動可能に組み付けられるキャリッジと、を備えるエンコーダ装置付き運動案内装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
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JP2016050530A JP6234497B2 (ja) | 2016-03-15 | 2016-03-15 | エンコーダ装置及びエンコーダ装置付き運動案内装置 |
US16/084,164 US10591317B2 (en) | 2016-03-15 | 2017-02-16 | Encoder apparatus and motion guide apparatus with encoder apparatus |
CN201780016419.8A CN108779992B (zh) | 2016-03-15 | 2017-02-16 | 编码器装置以及带编码器装置的运动引导装置 |
DE112017000908.1T DE112017000908B4 (de) | 2016-03-15 | 2017-02-16 | Encodervorrichtung und Bewegungsführungsvorrichtung mit Encodervorrichtung |
PCT/JP2017/005630 WO2017159196A1 (ja) | 2016-03-15 | 2017-02-16 | エンコーダ装置及びエンコーダ装置付き運動案内装置 |
TW106107188A TWI646310B (zh) | 2016-03-15 | 2017-03-06 | 編碼器裝置及附有編碼器裝置之運動導引裝置 |
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JP2016050530A JP6234497B2 (ja) | 2016-03-15 | 2016-03-15 | エンコーダ装置及びエンコーダ装置付き運動案内装置 |
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JP6234497B2 true JP6234497B2 (ja) | 2017-11-22 |
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US (1) | US10591317B2 (ja) |
JP (1) | JP6234497B2 (ja) |
CN (1) | CN108779992B (ja) |
DE (1) | DE112017000908B4 (ja) |
TW (1) | TWI646310B (ja) |
WO (1) | WO2017159196A1 (ja) |
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TWI702772B (zh) * | 2019-12-03 | 2020-08-21 | 東元電機股份有限公司 | 應用於增量型編碼器之外接供電裝置及其供電方法 |
JP2021096160A (ja) * | 2019-12-17 | 2021-06-24 | 株式会社ミツトヨ | スケールおよびエンコーダ |
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2017
- 2017-02-16 US US16/084,164 patent/US10591317B2/en active Active
- 2017-02-16 WO PCT/JP2017/005630 patent/WO2017159196A1/ja active Application Filing
- 2017-02-16 CN CN201780016419.8A patent/CN108779992B/zh active Active
- 2017-02-16 DE DE112017000908.1T patent/DE112017000908B4/de active Active
- 2017-03-06 TW TW106107188A patent/TWI646310B/zh active
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DE112017000908T5 (de) | 2018-10-31 |
US20190346286A1 (en) | 2019-11-14 |
TW201805601A (zh) | 2018-02-16 |
DE112017000908B4 (de) | 2019-11-07 |
JP2017166883A (ja) | 2017-09-21 |
CN108779992B (zh) | 2020-06-02 |
TWI646310B (zh) | 2019-01-01 |
US10591317B2 (en) | 2020-03-17 |
WO2017159196A1 (ja) | 2017-09-21 |
CN108779992A (zh) | 2018-11-09 |
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