JP6193028B2 - 検査装置 - Google Patents

検査装置 Download PDF

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Publication number
JP6193028B2
JP6193028B2 JP2013146210A JP2013146210A JP6193028B2 JP 6193028 B2 JP6193028 B2 JP 6193028B2 JP 2013146210 A JP2013146210 A JP 2013146210A JP 2013146210 A JP2013146210 A JP 2013146210A JP 6193028 B2 JP6193028 B2 JP 6193028B2
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Japan
Prior art keywords
metal mask
mask sheet
tension
unit
inspection
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JP2013146210A
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Japanese (ja)
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JP2015017930A (ja
Inventor
真一郎 鶴野
真一郎 鶴野
和宏 出口
和宏 出口
中村　昌弘
昌弘 中村
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新東エスプレシジョン株式会社
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Priority to JP2013146210A priority Critical patent/JP6193028B2/ja
Priority to CN201310447050.XA priority patent/CN104282589B/zh
Publication of JP2015017930A publication Critical patent/JP2015017930A/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2013146210A 2013-07-12 2013-07-12 検査装置 Active JP6193028B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2013146210A JP6193028B2 (ja) 2013-07-12 2013-07-12 検査装置
CN201310447050.XA CN104282589B (zh) 2013-07-12 2013-09-25 检查装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013146210A JP6193028B2 (ja) 2013-07-12 2013-07-12 検査装置

Publications (2)

Publication Number Publication Date
JP2015017930A JP2015017930A (ja) 2015-01-29
JP6193028B2 true JP6193028B2 (ja) 2017-09-06

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ID=52257362

Family Applications (1)

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JP2013146210A Active JP6193028B2 (ja) 2013-07-12 2013-07-12 検査装置

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JP (1) JP6193028B2 (zh)
CN (1) CN104282589B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102304697B1 (ko) * 2020-05-27 2021-09-24 (주)엠시스 메탈 마스크 검사 장치

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102411538B1 (ko) * 2017-09-04 2022-06-22 삼성디스플레이 주식회사 표시 장치의 제조장치 및 표시 장치의 제조방법
JP6986916B2 (ja) * 2017-10-04 2021-12-22 新東エスプレシジョン株式会社 検査装置及び検査方法
JP7162503B2 (ja) * 2018-11-14 2022-10-28 株式会社ダイフク 物品情報取得システム
KR102649699B1 (ko) * 2021-11-09 2024-03-20 (주)샘테크 메탈 마스크 검사기

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3571519B2 (ja) * 1997-02-06 2004-09-29 松下電器産業株式会社 レーザ加工装置およびレーザ加工方法
JP2001062996A (ja) * 1999-08-26 2001-03-13 Toshiba Corp メタルマスクのテンション測定方法及びその装置並びにテンション履歴管理方法及びその装置
JP4293822B2 (ja) * 2003-04-10 2009-07-08 大日本印刷株式会社 金属薄板の枠貼り方法及び装置
JP4784145B2 (ja) * 2005-04-28 2011-10-05 大日本印刷株式会社 金属テープの取り付け方法、マスクユニットの製造方法及びテンション付加用治具
JP5310982B2 (ja) * 2007-11-26 2013-10-09 凸版印刷株式会社 メタルマスク用保持具
KR20110027979A (ko) * 2009-09-11 2011-03-17 삼성모바일디스플레이주식회사 마스크 불량 검사 장치
CN102717187B (zh) * 2011-03-31 2015-03-25 昆山允升吉光电科技有限公司 金属掩模板组装机

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102304697B1 (ko) * 2020-05-27 2021-09-24 (주)엠시스 메탈 마스크 검사 장치

Also Published As

Publication number Publication date
CN104282589A (zh) 2015-01-14
JP2015017930A (ja) 2015-01-29
CN104282589B (zh) 2017-03-01

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