JP6157047B2 - Icデバイス用ソケット - Google Patents
Icデバイス用ソケット Download PDFInfo
- Publication number
- JP6157047B2 JP6157047B2 JP2011019937A JP2011019937A JP6157047B2 JP 6157047 B2 JP6157047 B2 JP 6157047B2 JP 2011019937 A JP2011019937 A JP 2011019937A JP 2011019937 A JP2011019937 A JP 2011019937A JP 6157047 B2 JP6157047 B2 JP 6157047B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- substrate
- power supply
- conductive contact
- divided
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 claims description 115
- 239000000463 material Substances 0.000 claims description 33
- 239000004020 conductor Substances 0.000 claims description 15
- 238000007689 inspection Methods 0.000 claims description 8
- 239000010410 layer Substances 0.000 description 289
- 239000003990 capacitor Substances 0.000 description 12
- 239000003989 dielectric material Substances 0.000 description 12
- 230000006870 function Effects 0.000 description 12
- 239000011810 insulating material Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000008054 signal transmission Effects 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 125000001731 2-cyanoethyl group Chemical group [H]C([H])(*)C([H])([H])C#N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 239000002033 PVDF binder Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229920001218 Pullulan Polymers 0.000 description 1
- 239000004373 Pullulan Substances 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000004323 axial length Effects 0.000 description 1
- 229910052454 barium strontium titanate Inorganic materials 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229920000636 poly(norbornene) polymer Polymers 0.000 description 1
- 229920006122 polyamide resin Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 235000019423 pullulan Nutrition 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/02—Arrangements of circuit components or wiring on supporting structure
- H05K7/10—Plug-in assemblages of components, e.g. IC sockets
- H05K7/1053—Plug-in assemblages of components, e.g. IC sockets having interior leads
- H05K7/1061—Plug-in assemblages of components, e.g. IC sockets having interior leads co-operating by abutting
- H05K7/1069—Plug-in assemblages of components, e.g. IC sockets having interior leads co-operating by abutting with spring contact pieces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0433—Sockets for IC's or transistors
- G01R1/0483—Sockets for un-leaded IC's having matrix type contact fields, e.g. BGA or PGA devices; Sockets for unpackaged, naked chips
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
- G01R1/07371—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate card or back card with apertures through which the probes pass
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Connecting Device With Holders (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011019937A JP6157047B2 (ja) | 2011-02-01 | 2011-02-01 | Icデバイス用ソケット |
| PCT/US2012/023061 WO2012106220A1 (en) | 2011-02-01 | 2012-01-30 | Socket for ic device |
| TW101103120A TWI521815B (zh) | 2011-02-01 | 2012-01-31 | 用於積體電路裝置之插座 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011019937A JP6157047B2 (ja) | 2011-02-01 | 2011-02-01 | Icデバイス用ソケット |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015180991A Division JP6484532B2 (ja) | 2015-09-14 | 2015-09-14 | Icデバイス用ソケット |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012159422A JP2012159422A (ja) | 2012-08-23 |
| JP2012159422A5 JP2012159422A5 (enExample) | 2014-03-20 |
| JP6157047B2 true JP6157047B2 (ja) | 2017-07-05 |
Family
ID=45563617
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011019937A Expired - Fee Related JP6157047B2 (ja) | 2011-02-01 | 2011-02-01 | Icデバイス用ソケット |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP6157047B2 (enExample) |
| TW (1) | TWI521815B (enExample) |
| WO (1) | WO2012106220A1 (enExample) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI494576B (zh) * | 2013-12-03 | 2015-08-01 | Tohoku Seiki Ind Co Ltd | IC processor |
| CN106716143B (zh) | 2014-06-20 | 2019-08-13 | 艾科塞拉公司 | 测试插座组件和相关方法 |
| KR101735774B1 (ko) | 2015-11-30 | 2017-05-16 | 주식회사 아이에스시 | 테스트용 러버 소켓 |
| US9958918B2 (en) * | 2016-05-23 | 2018-05-01 | Qualcomm Incorporated | Systems and methods to separate power domains in a processing device |
| IT201600127581A1 (it) * | 2016-12-16 | 2018-06-16 | Technoprobe Spa | Testa di misura per un’apparecchiatura di test di dispositivi elettronici con migliorate proprietà di filtraggio |
| TWI713807B (zh) * | 2016-12-16 | 2020-12-21 | 義大利商探針科技公司 | 具有增進的頻率性質的測試頭 |
| IT201700021389A1 (it) * | 2017-02-24 | 2018-08-24 | Technoprobe Spa | Testa di misura con migliorate proprietà in frequenza |
| IT201700021400A1 (it) * | 2017-02-24 | 2018-08-24 | Technoprobe Spa | Testa di misura a sonde verticali con migliorate proprietà in frequenza |
| IT201700021397A1 (it) * | 2017-02-24 | 2018-08-24 | Technoprobe Spa | Testa di misura con migliorate proprietà in frequenza |
| KR101920822B1 (ko) * | 2017-04-21 | 2019-02-13 | 리노공업주식회사 | 프로브 소켓 |
| WO2019079595A1 (en) * | 2017-10-20 | 2019-04-25 | Formfactor, Inc. | DIRECT METALLIC GUIDE PLATE |
| JP7346026B2 (ja) * | 2018-12-26 | 2023-09-19 | 株式会社日本マイクロニクス | 電気的接続装置 |
| KR102295761B1 (ko) | 2020-06-01 | 2021-09-01 | 리노공업주식회사 | 검사소켓 |
| WO2021261288A1 (ja) * | 2020-06-22 | 2021-12-30 | 株式会社ヨコオ | 検査装置 |
| TWI788113B (zh) | 2021-11-23 | 2022-12-21 | 創意電子股份有限公司 | 檢測裝置及其測試插座 |
| CN119335233A (zh) * | 2024-09-20 | 2025-01-21 | 强一半导体(苏州)股份有限公司 | 用于探针卡的金属化导引板及其制造方法 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001249163A (ja) * | 2000-03-06 | 2001-09-14 | Takai Kogyo Kk | Icデバイスの試験用ソケット |
| JP4259928B2 (ja) | 2003-06-11 | 2009-04-30 | 株式会社リコー | 移送物体検出装置,原稿読取装置および画像形成装置 |
| JP4607004B2 (ja) * | 2005-12-27 | 2011-01-05 | 株式会社ヨコオ | 検査ユニット |
| JP5259945B2 (ja) * | 2006-10-30 | 2013-08-07 | スリーエム イノベイティブ プロパティズ カンパニー | 熱放散機能を備えたicソケット |
| US7663387B2 (en) * | 2007-09-27 | 2010-02-16 | Yokowo Co., Ltd. | Test socket |
| JP4985779B2 (ja) * | 2007-10-24 | 2012-07-25 | 富士通株式会社 | プリント基板ユニットおよびソケット |
| JP4659087B2 (ja) * | 2008-12-17 | 2011-03-30 | パナソニック株式会社 | 差動平衡信号伝送基板 |
| KR101126690B1 (ko) * | 2009-07-02 | 2012-04-02 | 남재우 | Mems 기술을 이용한 테스트 소켓 및 그 제조방법 |
-
2011
- 2011-02-01 JP JP2011019937A patent/JP6157047B2/ja not_active Expired - Fee Related
-
2012
- 2012-01-30 WO PCT/US2012/023061 patent/WO2012106220A1/en not_active Ceased
- 2012-01-31 TW TW101103120A patent/TWI521815B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| TWI521815B (zh) | 2016-02-11 |
| WO2012106220A1 (en) | 2012-08-09 |
| JP2012159422A (ja) | 2012-08-23 |
| TW201246727A (en) | 2012-11-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6157047B2 (ja) | Icデバイス用ソケット | |
| JP6158023B2 (ja) | プローブカード用ファインピッチインターフェース | |
| JP5960383B2 (ja) | 接触子ホルダ | |
| JP6116112B2 (ja) | Icデバイス用ソケット | |
| US9341648B2 (en) | Probe card and manufacturing method thereof | |
| JP4775554B2 (ja) | Bga用lsiテストソケット | |
| US8957693B2 (en) | IC device testing socket | |
| KR20210053151A (ko) | 프로브 카드 장치 | |
| JP6157048B2 (ja) | Icデバイス用ソケット | |
| JP2011086453A (ja) | 高周波検査ソケット | |
| JP6484532B2 (ja) | Icデバイス用ソケット | |
| KR20220120623A (ko) | 자동 테스트 장비에서의 프로브 카드 어셈블리 | |
| JP2018009994A (ja) | Icデバイス用ソケット | |
| KR20120076265A (ko) | 프로브 카드용 세라믹 기판 및 그 제조방법 | |
| US11977100B2 (en) | Inspection jig | |
| JP2016153796A (ja) | Icデバイス検査用ソケット | |
| JP2011146342A (ja) | コンタクトピンホルダ | |
| JP2018021914A (ja) | Icデバイス用ソケット | |
| JP2016026295A (ja) | Icデバイス用ソケット | |
| WO2012067125A1 (ja) | プローブユニット | |
| JP6109247B2 (ja) | Icデバイス用ソケット | |
| US12055561B2 (en) | Contact terminal, inspection jig, and inspection device | |
| US12013416B2 (en) | Contact terminal, inspection jig, and inspection device | |
| KR20170057563A (ko) | 인터페이스 보드 | |
| KR20240076112A (ko) | 프로브와 그 제조방법 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140130 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20140130 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20140904 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140916 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20150512 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150914 |
|
| A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20150924 |
|
| A912 | Re-examination (zenchi) completed and case transferred to appeal board |
Free format text: JAPANESE INTERMEDIATE CODE: A912 Effective date: 20151113 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20160928 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20170213 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20170606 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 6157047 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |