JP6154995B2 - 半導体装置及び配線基板、並びにそれらの製造方法 - Google Patents

半導体装置及び配線基板、並びにそれらの製造方法 Download PDF

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Publication number
JP6154995B2
JP6154995B2 JP2012138474A JP2012138474A JP6154995B2 JP 6154995 B2 JP6154995 B2 JP 6154995B2 JP 2012138474 A JP2012138474 A JP 2012138474A JP 2012138474 A JP2012138474 A JP 2012138474A JP 6154995 B2 JP6154995 B2 JP 6154995B2
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Japan
Prior art keywords
forming
pedestal
opening
columnar
metal layer
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JP2012138474A
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English (en)
Japanese (ja)
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JP2014003201A5 (enExample
JP2014003201A (ja
Inventor
洋弘 町田
洋弘 町田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinko Electric Industries Co Ltd
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Shinko Electric Industries Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Shinko Electric Industries Co Ltd filed Critical Shinko Electric Industries Co Ltd
Priority to JP2012138474A priority Critical patent/JP6154995B2/ja
Priority to US13/920,336 priority patent/US9082672B2/en
Publication of JP2014003201A publication Critical patent/JP2014003201A/ja
Publication of JP2014003201A5 publication Critical patent/JP2014003201A5/ja
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/11—Printed elements for providing electric connections to or between printed circuits
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/4007—Surface contacts, e.g. bumps
    • H10W70/05—
    • H10W70/652—
    • H10W90/701—
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/14—Related to the order of processing steps
    • H05K2203/1476—Same or similar kind of process performed in phases, e.g. coarse patterning followed by fine patterning
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/108—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by semi-additive methods; masks therefor
    • H10W72/01235—
    • H10W72/01255—
    • H10W72/019—
    • H10W72/01938—
    • H10W72/01953—
    • H10W72/221—
    • H10W72/234—
    • H10W72/252—
    • H10W72/29—
    • H10W72/923—
    • H10W72/9415—
    • H10W72/952—

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
JP2012138474A 2012-06-20 2012-06-20 半導体装置及び配線基板、並びにそれらの製造方法 Active JP6154995B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2012138474A JP6154995B2 (ja) 2012-06-20 2012-06-20 半導体装置及び配線基板、並びにそれらの製造方法
US13/920,336 US9082672B2 (en) 2012-06-20 2013-06-18 Semiconductor device and method of manufacturing the same, and wiring substrate and method of manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012138474A JP6154995B2 (ja) 2012-06-20 2012-06-20 半導体装置及び配線基板、並びにそれらの製造方法

Publications (3)

Publication Number Publication Date
JP2014003201A JP2014003201A (ja) 2014-01-09
JP2014003201A5 JP2014003201A5 (enExample) 2015-07-23
JP6154995B2 true JP6154995B2 (ja) 2017-06-28

Family

ID=49773731

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012138474A Active JP6154995B2 (ja) 2012-06-20 2012-06-20 半導体装置及び配線基板、並びにそれらの製造方法

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Country Link
US (1) US9082672B2 (enExample)
JP (1) JP6154995B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7117615B2 (ja) * 2017-12-08 2022-08-15 パナソニックＩｐマネジメント株式会社 半導体装置の製造方法
JP7357243B2 (ja) * 2019-04-18 2023-10-06 パナソニックＩｐマネジメント株式会社 半導体装置、半導体装置の実装構造、及び半導体装置の製造方法
JP2021093417A (ja) * 2019-12-09 2021-06-17 イビデン株式会社 プリント配線板、及び、プリント配線板の製造方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3015436B2 (ja) * 1990-09-25 2000-03-06 株式会社東芝 半導体装置およびその接続方法
SG71734A1 (en) * 1997-11-21 2000-04-18 Inst Materials Research & Eng Area array stud bump flip chip and assembly process
JP4403631B2 (ja) * 2000-04-24 2010-01-27 ソニー株式会社 チップ状電子部品の製造方法、並びにその製造に用いる擬似ウエーハの製造方法
US6940178B2 (en) * 2001-02-27 2005-09-06 Chippac, Inc. Self-coplanarity bumping shape for flip chip
JP3851517B2 (ja) * 2001-04-18 2006-11-29 カシオマイクロニクス株式会社 半導体装置およびその製造方法並びにその接合構造
JP2004200247A (ja) * 2002-12-16 2004-07-15 Seiko Epson Corp 端子、端子の形成方法、半導体チップ、半導体実装基板、電子デバイスおよび電子機器
JP2005116632A (ja) * 2003-10-03 2005-04-28 Rohm Co Ltd 半導体装置の製造方法および半導体装置
JP2007073919A (ja) * 2005-09-06 2007-03-22 Tanemasa Asano 突起電極の製造方法およびそれに用いられるベーク装置ならびに電子装置
US7713782B2 (en) * 2006-09-22 2010-05-11 Stats Chippac, Inc. Fusible I/O interconnection systems and methods for flip-chip packaging involving substrate-mounted stud-bumps
JP5865630B2 (ja) * 2011-08-23 2016-02-17 京セラ株式会社 電極構造、半導体素子、半導体装置、サーマルヘッドおよびサーマルプリンタ

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Publication number Publication date
US20130341788A1 (en) 2013-12-26
US9082672B2 (en) 2015-07-14
JP2014003201A (ja) 2014-01-09

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