JP6143598B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP6143598B2 JP6143598B2 JP2013160783A JP2013160783A JP6143598B2 JP 6143598 B2 JP6143598 B2 JP 6143598B2 JP 2013160783 A JP2013160783 A JP 2013160783A JP 2013160783 A JP2013160783 A JP 2013160783A JP 6143598 B2 JP6143598 B2 JP 6143598B2
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- 239000004065 semiconductor Substances 0.000 title claims description 271
- 239000000758 substrate Substances 0.000 claims description 81
- 238000002955 isolation Methods 0.000 claims description 18
- 229910002601 GaN Inorganic materials 0.000 description 58
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 57
- 229910052751 metal Inorganic materials 0.000 description 11
- 239000002184 metal Substances 0.000 description 11
- 229910052581 Si3N4 Inorganic materials 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 8
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 7
- 229910010271 silicon carbide Inorganic materials 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 230000004888 barrier function Effects 0.000 description 6
- 230000015556 catabolic process Effects 0.000 description 6
- 239000010936 titanium Substances 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 230000003071 parasitic effect Effects 0.000 description 5
- 229910052814 silicon oxide Inorganic materials 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 description 3
- NWAIGJYBQQYSPW-UHFFFAOYSA-N azanylidyneindigane Chemical compound [In]#N NWAIGJYBQQYSPW-UHFFFAOYSA-N 0.000 description 3
- 239000000470 constituent Substances 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 230000000087 stabilizing effect Effects 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- AUCDRFABNLOFRE-UHFFFAOYSA-N alumane;indium Chemical compound [AlH3].[In] AUCDRFABNLOFRE-UHFFFAOYSA-N 0.000 description 1
- IVHJCRXBQPGLOV-UHFFFAOYSA-N azanylidynetungsten Chemical compound [W]#N IVHJCRXBQPGLOV-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
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- H—ELECTRICITY
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- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
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- H01L29/267—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, elements provided for in two or more of the groups H01L29/16, H01L29/18, H01L29/20, H01L29/22, H01L29/24, e.g. alloys in different semiconductor regions, e.g. heterojunctions
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- H01L21/8252—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using III-V technology
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- H01L27/0605—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits made of compound material, e.g. AIIIBV
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- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0611—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region
- H01L27/0617—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region comprising components of the field-effect type
- H01L27/0629—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region comprising components of the field-effect type in combination with diodes, or resistors, or capacitors
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- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
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- H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
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- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/107—Substrate region of field-effect devices
- H01L29/1075—Substrate region of field-effect devices of field-effect transistors
- H01L29/1079—Substrate region of field-effect devices of field-effect transistors with insulated gate
- H01L29/1087—Substrate region of field-effect devices of field-effect transistors with insulated gate characterised by the contact structure of the substrate region, e.g. for controlling or preventing bipolar effect
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- H01L29/4175—Source or drain electrodes for field effect devices for lateral devices where the connection to the source or drain region is done through at least one part of the semiconductor substrate thickness, e.g. with connecting sink or with via-hole
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- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
- H01L29/7393—Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
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- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
- H01L29/7786—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT
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Description
本実施形態の半導体装置は、第1導電型のSi(シリコン)またはSiC(炭化シリコン)の半導体基板と、半導体基板表面の第2導電型の半導体領域と、半導体基板上のGaN系半導体層と、GaN系半導体層に設けられ、半導体領域に電気的に接続される第1の電極と、第2の電極を有する横型素子と、を備える。
本実施形態の半導体装置は、横型素子が、アノード電極とカソード電極を備えるダイオードであり、第1の電極がアノード電極であること以外は、基本的に第1の実施形態と同様である。したがって、第1の実施形態と重複する内容については記載を省略する。
本実施形態の半導体装置は、第1導電型のSiまたはSiCの半導体基板と、半導体基板表面の第2導電型の第1および第2の半導体領域と、半導体基板上のGaN系半導体層と、GaN系半導体層に設けられ、第1の半導体領域に電気的に接続される第1の電極と、第2の電極を有する第1の横型素子と、GaN系半導体層に設けられ、第2の半導体領域に電気的に接続される第3の電極と、第4の電極を有する第2の横型素子と、を備える。
本実施形態の半導体装置は、櫛型のゲート電極を有するマルチフィンガー構造のトランジスタを備えること以外は、第3の実施形態と同様である。したがって、第3の実施形態と重複する内容については記載を省略する。
第1のトランジスタ100aと第2のトランジスタ100bは、それぞれ、素子分離領域24で囲まれる。
本実施形態の半導体装置は、第1の横型素子がトランジスタであり、第2の横型素子がダイオードであること以外は第3の実施形態と同様である。したがって、第3の実施形態と重複する内容については記載を省略する。また、トランジスタやダイオードの構造等、第1および第2の実施形態と重複する内容についても記載を省略する。
本実施形態の半導体装置は、半導体基板がSOI(Silicon On Insulator)基板であること以外は、第3の実施形態と同様である。したがって、第3の実施形態と重複する内容については記載を省略する。
10a シリコン基板
10b 埋め込み層
10c SOI層
11 半導体領域
11a 第1の半導体領域
11b 第2の半導体領域
12 GaN系半導体層
14 絶縁膜
16 ゲート電極
16a 第1のゲート電極
16b 第2のゲート電極
18 ソース電極
18a 第1のソース電極
18b 第2のソース電極
20 ドレイン電極
20a 第1のドレイン電極
20b 第2のドレイン電極
22 導電部
22a 第1の導電部
22b 第2の導電部
24 素子分離領域
100 トランジスタ
100a 第1のトランジスタ
100b 第2のトランジスタ
200 ダイオード
200a 第1のダイオード
200b 第2のダイオード
Claims (6)
- グラウンド電位に固定される第1導電型のSiまたはSiCの半導体基板と、
前記半導体基板表面の第2導電型の半導体領域と、
前記半導体基板上のGaN系半導体層と、
前記GaN系半導体層の前記半導体領域上方に設けられ、ソース電極、ゲート電極、およびドレイン電極を有する横型トランジスタと、
前記GaN系半導体層内に設けられ前記トランジスタを囲む素子分離領域と、
を備え、
前記ソース電極が前記半導体領域に電気的に接続され、
前記半導体領域が前記ソース電極、前記ゲート電極、及び前記ドレイン電極の直下にあり、
前記半導体基板表面の前記半導体領域の端部が、前記素子分離領域直下にあることを特徴とする半導体装置。 - 前記GaN系半導体層上の前記ソース電極と前記ドレイン電極との間に絶縁膜が設けられることを特徴とする請求項1記載の半導体装置。
- 前記半導体領域上に、前記ソース電極と前記半導体領域を電気的に接続し、前記GaN系半導体層を貫通する導電部が設けられることを特徴とする請求項1または請求項2記載の半導体装置。
- グラウンド電位に固定される第1導電型のSiまたはSiCの半導体基板と、
前記半導体基板表面の第2導電型の第1および第2の半導体領域と、
前記半導体基板上のGaN系半導体層と、
前記GaN系半導体層の前記第1の半導体領域上方に設けられ、第1のソース電極、第1のゲート電極、および第1のドレイン電極を有する第1の横型トランジスタと、
前記GaN系半導体層の前記第2の半導体領域上方に設けられ、第2のソース電極、第2のゲート電極、および第2のドレイン電極を有する第2の横型トランジスタと、
前記GaN系半導体層内に設けられ、前記第1の横型トランジスタと前記第2の横型トランジスタのそれぞれを囲む素子分離領域と、
を備え、
前記第1のソース電極が前記第1の半導体領域に電気的に接続され、
前記第1の半導体領域が前記第1のソース電極、前記第1のゲート電極、および前記第1のドレイン電極の直下にあり、
前記第2のソース電極が前記第2の半導体領域に電気的に接続され、
前記第2の半導体領域が前記第2のソース電極、前記第2のゲート電極、および前記第2のドレイン電極の直下にあり、
前記第1の半導体領域の端部と、前記第2の半導体領域の端部が、それぞれ前記素子分離領域の直下にあることを特徴とする半導体装置。 - 前記GaN系半導体層上の前記第1のソース電極と第1のドレイン電極との間、および、前記第2のソース電極と第2のドレイン電極との間に絶縁膜が設けられることを特徴とする請求項4記載の半導体装置。
- 前記第1の半導体領域上に、前記第1のソース電極と前記第1の半導体領域を電気的に接続し、前記GaN系半導体層を貫通する第1の導電部が設けられ、前記第2の半導体領域上に、前記第2のソース電極と前記第2の半導体領域を電気的に接続し、前記GaN系半導体層を貫通する第2の導電部が設けられることを特徴とする請求項4または請求項5記載の半導体装置。
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US14/447,892 US9349807B2 (en) | 2013-08-01 | 2014-07-31 | Semiconductor device having GaN-based layer |
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