JP6108120B2 - 太陽電池の製造方法 - Google Patents
太陽電池の製造方法 Download PDFInfo
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- JP6108120B2 JP6108120B2 JP2014525573A JP2014525573A JP6108120B2 JP 6108120 B2 JP6108120 B2 JP 6108120B2 JP 2014525573 A JP2014525573 A JP 2014525573A JP 2014525573 A JP2014525573 A JP 2014525573A JP 6108120 B2 JP6108120 B2 JP 6108120B2
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- substrate
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- solar cell
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- 238000004519 manufacturing process Methods 0.000 title claims description 22
- 239000000758 substrate Substances 0.000 claims description 106
- 238000000034 method Methods 0.000 claims description 28
- 239000004065 semiconductor Substances 0.000 claims description 24
- 238000005530 etching Methods 0.000 claims description 17
- 239000000126 substance Substances 0.000 claims description 17
- 238000004140 cleaning Methods 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 16
- 239000007789 gas Substances 0.000 description 23
- 239000010410 layer Substances 0.000 description 10
- 239000000243 solution Substances 0.000 description 10
- 239000007788 liquid Substances 0.000 description 5
- 229910021419 crystalline silicon Inorganic materials 0.000 description 4
- 239000008155 medical solution Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000004745 nonwoven fabric Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000002759 woven fabric Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0236—Special surface textures
- H01L31/02363—Special surface textures of the semiconductor body itself, e.g. textured active layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/67086—Apparatus for fluid treatment for etching for wet etching with the semiconductor substrates being dipped in baths or vessels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67326—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Electromagnetism (AREA)
- Photovoltaic Devices (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Description
まず、例えば、図1及び図2に示すようなカセット10に複数の基板11をセットする。ここで、基板11は、半導体材料からなる基板であってもよいし、半導体層などが表面上に配された半導体材料からなる基板であってもよい。
次に、図3に示されるように、カセット10にセットされ、x軸方向に沿って相互に間隔をおいて配された複数の基板11を、カセット10ごと、洗浄槽12に溜められた薬液13に浸漬することにより複数の基板11を処理する処理工程を行う。この処理工程は、基板11のエッチング工程や洗浄工程等である。例えばエッチング工程を行う場合は、薬液13をエッチング液とすることができる。例えば洗浄工程を行う場合は、薬液13を洗浄液とすることができる。
11…基板
12…洗浄槽
13…薬液
14a…気体
14b…シート通過後の泡
15…気体供給部
16…シート
Claims (6)
- 半導体材料からなる基板を有する太陽電池の製造方法であって、
複数の前記基板を保持可能な形状を有し底部に壁面が設けられていないカセットに保持され、一方向に沿って配した複数の前記基板を薬液に浸漬することにより処理する処理工程を備え、
前記複数の基板の下方に気体を供給する気体供給部を配置すると共に、前記薬液中において、複数の貫通孔を有し、前記気体供給部で供給された気体によって上下方向に移動する可撓性のシートを、上方向に移動すると前記複数の基板のうち少なくとも一つが当接し、かつ、前記当接した基板が移動する様に前記気体供給部と前記複数の基板との間に配置し、前記気体供給部から供給された気体で泡を発生させながら前記処理工程を行う、太陽電池の製造方法。 - 前記貫通孔は、前記貫通孔を通過した泡の直径が前記貫通孔を通過する前の気体からなる泡の直径よりも小さくなるような直径を有する、請求項1に記載の太陽電池の製造方法。
- 前記貫通孔の前記複数の基板の配列方向及び幅方向の長さは、隣り合う前記基板間の間隔の1/2以下である、請求項1または2に記載の太陽電池の製造方法。
- 隣り合う前記基板間の間隔が、前記基板の厚さの100倍以下となるように前記複数の基板を配する、請求項1〜3のいずれか一項に記載の太陽電池の製造方法。
- 前記基板の厚さが300μm以下である、請求項1〜4のいずれか一項に記載の太陽電池の製造方法。
- 前記処理工程として、
前記基板を洗浄液に浸漬することにより洗浄する洗浄工程と、
前記基板をエッチング液に浸漬することによりエッチングするエッチング工程と、
のうちの少なくとも一方を行う、請求項1〜5のいずれか一項に記載の太陽電池の製造方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2012/068069 WO2014013536A1 (ja) | 2012-07-17 | 2012-07-17 | 太陽電池の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2014013536A1 JPWO2014013536A1 (ja) | 2016-06-23 |
JP6108120B2 true JP6108120B2 (ja) | 2017-04-05 |
Family
ID=49948392
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014525573A Expired - Fee Related JP6108120B2 (ja) | 2012-07-17 | 2012-07-17 | 太陽電池の製造方法 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP6108120B2 (ja) |
WO (1) | WO2014013536A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7116694B2 (ja) * | 2019-02-21 | 2022-08-10 | キオクシア株式会社 | 基板処理装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51140471A (en) * | 1975-05-30 | 1976-12-03 | Hitachi Ltd | Device for washing semiconductor wafer |
JPH0730685Y2 (ja) * | 1984-08-01 | 1995-07-12 | 三洋電機株式会社 | エツチング装置 |
JPH04171724A (ja) * | 1990-11-05 | 1992-06-18 | Hitachi Ltd | 半導体基板の洗浄方法及び装置 |
JPH11354476A (ja) * | 1998-06-10 | 1999-12-24 | Memc Kk | シリコンウエハの保管方法 |
JP2003093982A (ja) * | 2001-09-26 | 2003-04-02 | Seiko Epson Corp | 液体処理方法、液体処理装置、及び、フラットパネル表示装置の製造方法 |
JP2010074102A (ja) * | 2008-09-22 | 2010-04-02 | Mitsubishi Electric Corp | シリコン基板のエッチング方法、シリコン基板のエッチング液、シリコン基板のエッチング装置 |
JP2013239693A (ja) * | 2012-04-18 | 2013-11-28 | Mitsubishi Electric Corp | テクスチャー化シリコン基板の製造方法、処理装置、および太陽電池素子の製造方法 |
-
2012
- 2012-07-17 JP JP2014525573A patent/JP6108120B2/ja not_active Expired - Fee Related
- 2012-07-17 WO PCT/JP2012/068069 patent/WO2014013536A1/ja active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2014013536A1 (ja) | 2014-01-23 |
JPWO2014013536A1 (ja) | 2016-06-23 |
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