JP6096510B2 - 圧電セラミック組成物、該組成物を製造する方法及び該組成物を含む電気的構成部品 - Google Patents
圧電セラミック組成物、該組成物を製造する方法及び該組成物を含む電気的構成部品 Download PDFInfo
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- 239000000203 mixture Substances 0.000 title claims description 80
- 239000000919 ceramic Substances 0.000 title claims description 36
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 230000005684 electric field Effects 0.000 claims description 23
- 239000000654 additive Substances 0.000 claims description 20
- 239000011159 matrix material Substances 0.000 claims description 19
- 230000000996 additive effect Effects 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 12
- 230000007704 transition Effects 0.000 claims description 12
- 238000005245 sintering Methods 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 239000000843 powder Substances 0.000 claims description 6
- 229910052749 magnesium Inorganic materials 0.000 claims description 4
- 229910052725 zinc Inorganic materials 0.000 claims description 4
- 150000004649 carbonic acid derivatives Chemical class 0.000 claims description 3
- 229910044991 metal oxide Inorganic materials 0.000 claims description 3
- 150000004706 metal oxides Chemical class 0.000 claims description 3
- 150000002823 nitrates Chemical class 0.000 claims description 3
- 239000002245 particle Substances 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 229910052726 zirconium Inorganic materials 0.000 claims description 3
- 150000004677 hydrates Chemical class 0.000 claims description 2
- 150000004679 hydroxides Chemical class 0.000 claims description 2
- 229910052760 oxygen Inorganic materials 0.000 claims description 2
- 150000002739 metals Chemical class 0.000 claims 3
- 150000003839 salts Chemical class 0.000 claims 3
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical group [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims 2
- 229910052783 alkali metal Inorganic materials 0.000 claims 2
- 150000001340 alkali metals Chemical class 0.000 claims 2
- 238000001354 calcination Methods 0.000 claims 2
- 239000011777 magnesium Substances 0.000 claims 2
- 239000010936 titanium Substances 0.000 claims 2
- 239000011701 zinc Substances 0.000 claims 2
- 238000007792 addition Methods 0.000 claims 1
- 150000001450 anions Chemical class 0.000 claims 1
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 150000001875 compounds Chemical class 0.000 claims 1
- 238000007493 shaping process Methods 0.000 claims 1
- 229910000314 transition metal oxide Inorganic materials 0.000 claims 1
- 239000012071 phase Substances 0.000 description 50
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 14
- 239000000463 material Substances 0.000 description 14
- 239000011734 sodium Substances 0.000 description 14
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 12
- 230000005611 electricity Effects 0.000 description 10
- 238000012512 characterization method Methods 0.000 description 8
- 230000007423 decrease Effects 0.000 description 8
- 238000002441 X-ray diffraction Methods 0.000 description 6
- 230000010287 polarization Effects 0.000 description 6
- 239000006104 solid solution Substances 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 230000006835 compression Effects 0.000 description 5
- 238000007906 compression Methods 0.000 description 5
- 239000013078 crystal Substances 0.000 description 4
- 230000028161 membrane depolarization Effects 0.000 description 3
- 229910002113 barium titanate Inorganic materials 0.000 description 2
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- FSAJRXGMUISOIW-UHFFFAOYSA-N bismuth sodium Chemical compound [Na].[Bi] FSAJRXGMUISOIW-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000383 hazardous chemical Substances 0.000 description 2
- BITYAPCSNKJESK-UHFFFAOYSA-N potassiosodium Chemical compound [Na].[K] BITYAPCSNKJESK-UHFFFAOYSA-N 0.000 description 2
- 229910052700 potassium Inorganic materials 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- 238000003746 solid phase reaction Methods 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 229910015902 Bi 2 O 3 Inorganic materials 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 101100513046 Neurospora crassa (strain ATCC 24698 / 74-OR23-1A / CBS 708.71 / DSM 1257 / FGSC 987) eth-1 gene Proteins 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- UKDIAJWKFXFVFG-UHFFFAOYSA-N potassium;oxido(dioxo)niobium Chemical compound [K+].[O-][Nb](=O)=O UKDIAJWKFXFVFG-UHFFFAOYSA-N 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- UYLYBEXRJGPQSH-UHFFFAOYSA-N sodium;oxido(dioxo)niobium Chemical compound [Na+].[O-][Nb](=O)=O UYLYBEXRJGPQSH-UHFFFAOYSA-N 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 231100000701 toxic element Toxicity 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
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Description
a)特別に配向されたセラミックス又は単結晶の製造によって本来そなわっている圧電特性の異方性効果が使用されることができる(最大d33値203pC/N)、
b)特別な単結晶上の分極処理によって又は進歩した焼結技術の使用によって非180°分域はサブミクロンスケールにまで精製されることができ、そしてピエゾ効果上のその限界の外部からの寄与が著しく改善されることができる(最大d33値500pC/N)、
c)「ランダムな」電界効果(例えば酸素空格子点と一組になったアクセプタ置換)の使用下に結晶又はセラミックスは電界を置いたり除いたりすることによって、完全に分極及び再度の減極されることができる。したがって完全に可逆的な分域切換が、電気により生じる超大なひずみの原因となる。しかしながら、比較的低いキュリー温度Tc(〜130℃)によって制限されて、この物質の族の使用は高性能アクチュエータからほぼ除外されている。
この例では正方晶系の強誘電相と擬似立方晶系の非強誘電相との間の一連のMPBを(Bi0.5Na0.5)TiO3、BaTiO3及びBi(Mg0.5Ti0.5)O3、即ち(BNT−BT−BMT)、によって形成された三成分系の範囲内で形成した。
この例では菱面体の強誘電相と擬似立方晶系の非強誘電相との間の一連のMPBを(Bi0.5Na0.5)TiO3、BaTiO3及びBi(Mg0.5Ti0.5)O3、即ち(BNT−BT−BMT)、によって形成された三成分系の範囲内で形成した。
この例では強誘電MPB組成と擬似立方晶系の非強誘電相との間のMPBを(Bi0.5Na0.5)TiO3、BaTiO3及びBi(Mg0.5Ti0.5)O3、即ち(BNT−BT−BMT)、によって形成された三成分系の範囲内で形成した。
この例では正方晶系の強誘電相と擬似立方晶系の非強誘電相との間のMPBを(Bi0.5K0.5)TiO3、BaTiO3及びBi(Mg0.5Ti0.5)O3、即ち(BKT−BT−BMT)、によって形成された三成分系の範囲内で形成した。
この例では正方晶系の強誘電相と擬似立方晶系の非強誘電相との間のMPBを(Bi0.5Na0.5)TiO3、BaTiO3及びBi(Zn0.5Ti0.5)O3、即ち(BNT−BT−BZT)、によって形成された三成分系の範囲内で形成した。
この例ではMPB組成のマトリックス材料を(Bi0.5Na0.5)TiO3、BaTiO3及びBi(Mg0.5Ti0.5)O3、即ち(BNT−BT−BMT)から製造した。少量(0.5重量%)の非ペロブスカイト添加剤を焼結前に添加した。
Claims (11)
- ペロブスカイト構造を有する少なくとも三つのマトリックス成分を含むマトリックス材料を含むか、又は、当該マトリックス成分のみからなる圧電セラミック組成物であって、
第1のマトリックス成分は(Bi0.5A0.5)EO3であり、
第2のマトリックス成分はBaEO3であり、
第3のマトリックス成分はBi(Me0.5E0.5)O3であり、
Aがアルカリ金属又はアルカリ金属の混合物から選択されており、
Eがチタン、ジルコニウム及びチタンとジルコニウムの混合物から独立に選択されており、
Meが亜鉛、マグネシウム及び亜鉛とマグネシウムの混合物から選択されており、
マトリックス成分の含量が、電界により強誘電相に構造的に転移する、モルフォトロピック相境界近くの疑似立方晶系の非強誘電相の組成物を形成するよう選択されている、
圧電セラミック組成物。 - 前記組成物が前記マトリックス材料及び添加剤を含むか、又は、該マトリックス材料と該添加剤のみから成り、該添加剤が金属酸化物である、請求項1に記載の圧電セラミック組成物。
- 式:
k(Bi0.5A0.5)EO3−lBaEO3−mBi(Me0.5E0.5)O3
(式中、
0<k≦0.96、
0<l≦0.96、
0.04≦m≦0.15及び
k+l+m=1)
で示されるマトリックス材料を含むか又は該マトリックス材料のみから成る、請求項1又は2に記載の圧電セラミック組成物。 - マトリックス材料及び添加剤を含むか又はマトリックス材料及び添加剤のみから成り、
前記組成物が次の式:
a[k(Bi0.5A0.5)EO3−lBaEO3−mBi(Me0.5E0.5)O3]−bMfOg,
(式中、Mは一価の金属、二価の金属及び三価の金属ならびにこれらの混合物から選択されており、MfOgはその相応の金属酸化物M2O、MO又はM2O3を表わし、
a+b=1であり、さらに、セラミック組成物の0≦b≦3重量%及び97≦a≦100重量%である)で表される、請求項1から3のいずれか一項に記載の圧電セラミック組成物。 - 前記添加剤が遷移金属酸化物から選択されている、請求項2又は4に記載の圧電セラミック組成物。
- 前記組成物が350pm/Vより大きな有効圧電定数d33*を有する、請求項1から5のいずれか一項に記載の圧電セラミック組成物。
- A)セラミック組成物中の前記第1のマトリックス成分、前記第2のマトリックス成分及び前記第3のマトリックス成分又は任意の添加剤に含まれている金属の金属塩の粉末を用意し、該金属塩のアニオンが酸化物、か焼によって少なくとも部分的に酸化物に変換可能であるか又は変換されたアニオン、及びこれらの混合物から選択されており、さらに粗製粒子の含量を該当する成分又は該当する添加剤についての式の化学量論に従って選択し、
B)得られた混合物を成形及び焼結する、
ことによる請求項1から6のいずれか一項に記載の圧電セラミック組成物を製造する方法。 - 工程A)とB)の間に次の工程:
C)工程A)で用意された粉末の混合物をか焼する工程、
を含む、請求項7に記載の方法。 - 前記金属塩を酸化物、水酸化物、炭酸塩、硝酸塩、水和物及び類似の化合物から選択する、請求項7又は8に記載の方法。
- 前記焼結を温度950〜1200℃で実施する、請求項7から9のいずれか一項に記載の方法。
- 請求項1から6までのいずれか1項に記載の圧電セラミック組成物を含む電気的構成部品。
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US20130161556A1 (en) | 2010-09-30 | 2013-06-27 | Yu Hong Jeon | Lead-free piezoelectric material based on bismuth zinc titanate-bismuth potassium titanate-bismuth sodium titanate |
JP5747487B2 (ja) * | 2010-11-29 | 2015-07-15 | セイコーエプソン株式会社 | 液体噴射ヘッド、液体噴射装置、圧電素子、および圧電セラミックス |
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US9520445B2 (en) | 2011-07-12 | 2016-12-13 | Helmholtz-Zentrum Dresden-Rossendorf E. V. | Integrated non-volatile memory elements, design and use |
CN105008307B (zh) * | 2013-01-28 | 2019-08-23 | 惠普发展公司,有限责任合伙企业 | 无铅压电材料 |
JP5761540B2 (ja) | 2013-06-28 | 2015-08-12 | セイコーエプソン株式会社 | 圧電材料、圧電素子、液体噴射ヘッド、液体噴射装置、超音波センサー、圧電モーター及び発電装置 |
JP2015038953A (ja) | 2013-06-28 | 2015-02-26 | セイコーエプソン株式会社 | 圧電材料、圧電素子、液体噴射ヘッド、液体噴射装置、超音波センサー、圧電モーター及び発電装置 |
JP5754660B2 (ja) | 2013-06-28 | 2015-07-29 | セイコーエプソン株式会社 | 圧電材料、圧電素子、液体噴射ヘッド、液体噴射装置、超音波センサー、圧電モーター及び発電装置 |
US9780294B2 (en) | 2013-11-13 | 2017-10-03 | Tdk Corporation | Piezoelectric composition and piezoelectric element |
JP2015137193A (ja) * | 2014-01-21 | 2015-07-30 | エプコス アクチエンゲゼルシャフトEpcos Ag | 誘電体磁器組成物、誘電体素子、電子部品および積層電子部品 |
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