JP6080438B2 - 有機ｅｌ装置の製造方法 - Google Patents

有機ｅｌ装置の製造方法 Download PDF

Info

Publication number
JP6080438B2
JP6080438B2 JP2012191772A JP2012191772A JP6080438B2 JP 6080438 B2 JP6080438 B2 JP 6080438B2 JP 2012191772 A JP2012191772 A JP 2012191772A JP 2012191772 A JP2012191772 A JP 2012191772A JP 6080438 B2 JP6080438 B2 JP 6080438B2
Authority
JP
Japan
Prior art keywords
layer
organic
light shielding
organic compound
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2012191772A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013084579A5 (enExample
JP2013084579A (ja
Inventor
由徳　大介
大介 由徳
佐藤　信彦
信彦 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2012191772A priority Critical patent/JP6080438B2/ja
Priority to US13/613,812 priority patent/US8871537B2/en
Priority to KR1020120106242A priority patent/KR20130035898A/ko
Priority to CN2012103627519A priority patent/CN103035851A/zh
Publication of JP2013084579A publication Critical patent/JP2013084579A/ja
Publication of JP2013084579A5 publication Critical patent/JP2013084579A5/ja
Application granted granted Critical
Publication of JP6080438B2 publication Critical patent/JP6080438B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/20—Changing the shape of the active layer in the devices, e.g. patterning
    • H10K71/231—Changing the shape of the active layer in the devices, e.g. patterning by etching of existing layers
    • H10K71/233—Changing the shape of the active layer in the devices, e.g. patterning by etching of existing layers by photolithographic etching
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/1201—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/30—Devices specially adapted for multicolour light emission
    • H10K59/35—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electroluminescent Light Sources (AREA)
JP2012191772A 2011-09-30 2012-08-31 有機ｅｌ装置の製造方法 Active JP6080438B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2012191772A JP6080438B2 (ja) 2011-09-30 2012-08-31 有機ｅｌ装置の製造方法
US13/613,812 US8871537B2 (en) 2011-09-30 2012-09-13 Method of manufacturing an organic electroluminescence display device
KR1020120106242A KR20130035898A (ko) 2011-09-30 2012-09-25 유기 일렉트로루미네센스 표시장치의 제조 방법
CN2012103627519A CN103035851A (zh) 2011-09-30 2012-09-26 有机电致发光显示装置的制造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011217678 2011-09-30
JP2011217678 2011-09-30
JP2012191772A JP6080438B2 (ja) 2011-09-30 2012-08-31 有機ｅｌ装置の製造方法

Publications (3)

Publication Number Publication Date
JP2013084579A JP2013084579A (ja) 2013-05-09
JP2013084579A5 JP2013084579A5 (enExample) 2015-10-08
JP6080438B2 true JP6080438B2 (ja) 2017-02-15

Family

ID=47992935

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012191772A Active JP6080438B2 (ja) 2011-09-30 2012-08-31 有機ｅｌ装置の製造方法

Country Status (4)

Country Link
US (1) US8871537B2 (enExample)
JP (1) JP6080438B2 (enExample)
KR (1) KR20130035898A (enExample)
CN (1) CN103035851A (enExample)

Families Citing this family (61)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102092557B1 (ko) * 2012-12-12 2020-03-24 엘지디스플레이 주식회사 유기 발광 장치 및 유기 발광 장치 제조 방법
JP6220171B2 (ja) * 2013-07-03 2017-10-25 株式会社ジャパンディスプレイ 有機エレクトロルミネッセンス表示装置
CN105637668B (zh) * 2013-08-29 2018-06-01 富士胶片株式会社 用于将有机层微影图案化的方法
JP6190709B2 (ja) * 2013-12-04 2017-08-30 株式会社ジャパンディスプレイ 有機エレクトロルミネッセンス表示装置
WO2016019277A1 (en) 2014-08-01 2016-02-04 Orthogonal, Inc. Photolithographic patterning of organic electronic devices
JP2017526177A (ja) 2014-08-01 2017-09-07 オーソゴナル，インコーポレイテッド 素子のフォトリソグラフパターン化方法
JP6653315B2 (ja) 2014-08-01 2020-02-26 オーソゴナル，インコーポレイテッド 有機電子デバイスのフォトリソグラフィック・パターニング
US10503065B2 (en) 2014-08-01 2019-12-10 Orthogonal, Inc. Photolithographic patterning of devices
TWI600125B (zh) * 2015-05-01 2017-09-21 精材科技股份有限公司 晶片封裝體及其製造方法
KR102606282B1 (ko) 2017-06-19 2023-11-27 삼성디스플레이 주식회사 디스플레이 장치
CN109326730B (zh) * 2017-08-01 2024-02-13 拓旷(上海)光电科技有限公司 用于有机发光二极管显示器的制造设备
CN107331692B (zh) * 2017-08-25 2019-09-17 深圳市华星光电半导体显示技术有限公司 Oled显示面板及其制作方法
CN111276618A (zh) * 2018-12-05 2020-06-12 陕西坤同半导体科技有限公司 有机功能层及制备有机功能层的方法、显示面板
CN110993835A (zh) * 2019-12-18 2020-04-10 京东方科技集团股份有限公司 一种显示面板及其制作方法
US12581838B2 (en) 2020-12-04 2026-03-17 Semiconductor Energy Laboratory Co., Ltd. Display device, display module, and fabrication method of display device
TW202240886A (zh) 2020-12-04 2022-10-16 日商半導體能源研究所股份有限公司 顯示面板、資料處理裝置及用於製造顯示面板之方法
JP7775218B2 (ja) 2020-12-06 2025-11-25 株式会社半導体エネルギー研究所 表示装置
WO2022123382A1 (ja) 2020-12-07 2022-06-16 株式会社半導体エネルギー研究所 表示装置の作製方法、表示装置、表示モジュール、及び、電子機器
JP7797414B2 (ja) 2020-12-07 2026-01-13 株式会社半導体エネルギー研究所 表示装置
US12507525B2 (en) 2020-12-25 2025-12-23 Semiconductor Energy Laboratory Co., Ltd. Display apparatus, electronic device, and method for manufacturing display apparatus
JPWO2022144661A1 (enExample) 2020-12-29 2022-07-07
US12615913B2 (en) 2020-12-29 2026-04-28 Semiconductor Energy Laboratory Co., Ltd. Method for fabricating display device including forming pixel electrode, el layer, and sacrificial layer
DE102021134032A1 (de) 2020-12-29 2022-06-30 Semiconductor Energy Laboratory Co., Ltd. Licht emittierende Vorrichtung, Licht emittierende Einrichtung, elektronisches Gerät und Beleuchtungsvorrichtung
WO2022153118A1 (ja) * 2021-01-14 2022-07-21 株式会社半導体エネルギー研究所 表示装置の作製方法
CN116745833A (zh) 2021-01-14 2023-09-12 株式会社半导体能源研究所 显示装置及显示装置的制造方法
WO2022153150A1 (ja) 2021-01-14 2022-07-21 株式会社半導体エネルギー研究所 表示装置の作製方法、表示装置、表示モジュール、及び、電子機器
US12598864B2 (en) 2021-01-14 2026-04-07 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing display device, display device, display module, and electronic device
US12588358B2 (en) 2021-01-14 2026-03-24 Semiconductor Energy Laboratory Co., Ltd. Display device and method for manufacturing display device
TW202232796A (zh) 2021-01-14 2022-08-16 日商半導體能源研究所股份有限公司 顯示裝置
US20240188378A1 (en) * 2021-01-22 2024-06-06 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing display device, display device, display module, and electronic device
JP2022115080A (ja) 2021-01-27 2022-08-08 株式会社半導体エネルギー研究所 表示装置
JP7756112B2 (ja) 2021-01-28 2025-10-17 株式会社半導体エネルギー研究所 表示装置の作製方法
KR20230131872A (ko) 2021-01-28 2023-09-14 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치
US20240114720A1 (en) * 2021-02-05 2024-04-04 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing display apparatus
JPWO2022175789A1 (enExample) 2021-02-19 2022-08-25
CN116868157A (zh) 2021-02-25 2023-10-10 株式会社半导体能源研究所 半导体装置及电子设备
WO2022180481A1 (ja) 2021-02-26 2022-09-01 株式会社半導体エネルギー研究所 表示装置および電子機器
US12601045B2 (en) 2021-03-25 2026-04-14 Semiconductor Energy Laboratory Co., Ltd. Manufacturing equipment for light-emitting device
US12349538B2 (en) 2021-03-25 2025-07-01 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device, display device, light-emitting apparatus, electronic device, and lighting device
US12477918B2 (en) 2021-03-31 2025-11-18 Semiconductor Energy Laboratory Co., Ltd. Display apparatus, display module, electronic device, and method for manufacturing display apparatus
US12245485B2 (en) 2021-04-08 2025-03-04 Semiconductor Energy Laboratory Co., Ltd. Display apparatus including light-emitting device and light-receiving device
WO2022224074A1 (ja) 2021-04-22 2022-10-27 株式会社半導体エネルギー研究所 表示装置
JP7773531B2 (ja) 2021-04-22 2025-11-19 株式会社半導体エネルギー研究所 表示装置、及び表示装置の作製方法
US11815689B2 (en) 2021-04-30 2023-11-14 Semiconductor Energy Laboratory Co., Ltd. Electronic device
US12527192B2 (en) 2021-05-13 2026-01-13 Semiconductor Energy Laboratory Co., Ltd. Display apparatus, display module, electronic device, and method for manufacturing display apparatus
US11699391B2 (en) 2021-05-13 2023-07-11 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device, display apparatus, and electronic device
US12426474B2 (en) 2021-05-27 2025-09-23 Semiconductor Energy Laboratory Co., Ltd. Display apparatus, method for manufacturing display apparatus, display module, and electronic device
US12506126B2 (en) 2021-06-17 2025-12-23 Semiconductor Energy Laboratory Co., Ltd. Display device
TW202306210A (zh) 2021-06-25 2023-02-01 日商半導體能源研究所股份有限公司 受光器件、受發光裝置
KR20230000968A (ko) 2021-06-25 2023-01-03 가부시키가이샤 한도오따이 에네루기 켄큐쇼 발광 디바이스, 표시 장치, 발광 장치, 전자 기기, 및 조명 장치
KR20230004278A (ko) 2021-06-30 2023-01-06 가부시키가이샤 한도오따이 에네루기 켄큐쇼 발광 디바이스 및 발광 장치
US12262623B2 (en) 2021-06-30 2025-03-25 Semiconductor Energy Laboratory Co., Ltd. Manufacturing method of display device
JP2023010627A (ja) * 2021-07-08 2023-01-20 株式会社半導体エネルギー研究所 表示装置、及び表示装置の作製方法
US12604662B2 (en) 2021-07-16 2026-04-14 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device and light-emitting apparatus
JPWO2023031718A1 (enExample) 2021-08-31 2023-03-09
KR20240093546A (ko) 2021-10-27 2024-06-24 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치
US20240431191A1 (en) * 2021-11-09 2024-12-26 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing display device
WO2023105338A1 (ja) 2021-12-08 2023-06-15 株式会社半導体エネルギー研究所 電子装置
US12604650B2 (en) 2021-12-20 2026-04-14 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing light-emitting element and light-emitting device using photolithography technique
US12366759B2 (en) 2022-02-09 2025-07-22 Semiconductor Energy Laboratory Co., Ltd. Electronic device
US12598869B2 (en) 2022-03-25 2026-04-07 Semiconductor Energy Laboratory Co., Ltd. Imaging device, display apparatus, and method for manufacturing display apparatus

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4544811B2 (ja) * 2002-05-09 2010-09-15 大日本印刷株式会社 エレクトロルミネッセント素子の製造方法
JP4152685B2 (ja) * 2002-07-22 2008-09-17 大日本印刷株式会社 エレクトロルミネッセント素子形成用基板
JP4426190B2 (ja) * 2003-01-24 2010-03-03 大日本印刷株式会社 エレクトロルミネッセント素子の製造方法
CN101431842B (zh) * 2003-03-27 2012-01-25 精工爱普生株式会社 电光装置和电子设备
JP4507759B2 (ja) * 2004-08-18 2010-07-21 株式会社リコー 有機材料のパターン形成方法
JP5007941B2 (ja) * 2007-07-26 2012-08-22 日本精機株式会社 有機ｅｌパネル
JP5522991B2 (ja) 2008-07-11 2014-06-18 キヤノン株式会社 有機ｅｌ表示装置

Also Published As

Publication number Publication date
US8871537B2 (en) 2014-10-28
US20130084664A1 (en) 2013-04-04
CN103035851A (zh) 2013-04-10
JP2013084579A (ja) 2013-05-09
KR20130035898A (ko) 2013-04-09

Similar Documents

Publication Publication Date Title
JP2013084579A (ja) 有機ｅｌ装置の製造方法
JP6120505B2 (ja) 有機発光素子及びその製造方法
JP5901325B2 (ja) 有機ｅｌ表示装置の製造方法
US9899458B2 (en) Organic light-emitting display device and method of manufacturing the same
CN104009186B (zh) 有机发光显示装置及其制造方法
US9219253B2 (en) Method for manufacturing organic EL display device
US20130084531A1 (en) Method of producing organic electroluminescence display device
US10388902B1 (en) Structure for a high resolution light-emitting device
JP5620494B2 (ja) 発光素子、表示装置、および発光素子の製造方法
KR102374845B1 (ko) 컬러필터 어레이 기판 및 그 제조방법과 이를 이용한 유기전계발광 표시장치
JP2014120218A (ja) 有機ｅｌ表示装置の製造方法
US20120252149A1 (en) Method of manufacturing organic electroluminescence display device
CN103314462A (zh) 有机el显示面板和有机el显示装置
JP2013168242A (ja) 有機発光装置の製造方法
JP2014150057A (ja) 有機発光装置及びその製造方法
JP2016091841A (ja) 有機発光デバイスと有機表示装置
JP2014044810A (ja) 有機ｅｌ装置の製造方法
KR102132444B1 (ko) 유기발광다이오드 표시장치의 제조방법
KR102290616B1 (ko) 병렬적 다중 층의 고-분해능 패터닝
WO2012017496A1 (ja) 発光素子、発光素子を備えた発光装置および発光素子の製造方法
US20210249637A1 (en) Method for manufacturing electroluminescent device with sacrificial layer
US20130126833A1 (en) Method of manufacturing organic el apparatus
JP6159981B2 (ja) 発光素子、表示装置及び発光素子の製造方法
CN115210896B (zh) 显示装置
JP2013157225A (ja) 表示装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20150825

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20150825

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20160427

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20160531

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20160729

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20161220

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20170117

R151 Written notification of patent or utility model registration

Ref document number: 6080438

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151