JP6071892B2 - 過弗化物の分解処理方法および処理装置 - Google Patents

過弗化物の分解処理方法および処理装置 Download PDF

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JP6071892B2
JP6071892B2 JP2013539634A JP2013539634A JP6071892B2 JP 6071892 B2 JP6071892 B2 JP 6071892B2 JP 2013539634 A JP2013539634 A JP 2013539634A JP 2013539634 A JP2013539634 A JP 2013539634A JP 6071892 B2 JP6071892 B2 JP 6071892B2
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gas
perfluoride
calcium salt
salt
decomposition
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JPWO2013058211A1 (ja
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一芳 入江
一芳 入江
裕二 早坂
裕二 早坂
純一 鳥巣
純一 鳥巣
正直 小野寺
正直 小野寺
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Showa Denko KK
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/75—Multi-step processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2251/00—Reactants
    • B01D2251/40—Alkaline earth metal or magnesium compounds
    • B01D2251/404—Alkaline earth metal or magnesium compounds of calcium
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2255/00—Catalysts
    • B01D2255/20—Metals or compounds thereof
    • B01D2255/206—Rare earth metals
    • B01D2255/2065—Cerium
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2255/00—Catalysts
    • B01D2255/20—Metals or compounds thereof
    • B01D2255/207—Transition metals
    • B01D2255/20707—Titanium
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2255/00—Catalysts
    • B01D2255/20—Metals or compounds thereof
    • B01D2255/207—Transition metals
    • B01D2255/20746—Cobalt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2255/00—Catalysts
    • B01D2255/20—Metals or compounds thereof
    • B01D2255/207—Transition metals
    • B01D2255/20753—Nickel
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2255/00—Catalysts
    • B01D2255/20—Metals or compounds thereof
    • B01D2255/207—Transition metals
    • B01D2255/20784—Chromium
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2255/00—Catalysts
    • B01D2255/20—Metals or compounds thereof
    • B01D2255/207—Transition metals
    • B01D2255/20792—Zinc
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2255/00—Catalysts
    • B01D2255/20—Metals or compounds thereof
    • B01D2255/209—Other metals
    • B01D2255/2094—Tin
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/206—Organic halogen compounds
    • B01D2257/2066—Fluorine
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B01D53/70—Organic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B01D53/8659—Removing halogens or halogen compounds
    • B01D53/8662—Organic halogen compounds
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Treating Waste Gases (AREA)
JP2013539634A 2011-10-19 2012-10-15 過弗化物の分解処理方法および処理装置 Active JP6071892B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011229777 2011-10-19
JP2011229777 2011-10-19
PCT/JP2012/076600 WO2013058211A1 (ja) 2011-10-19 2012-10-15 過弗化物の分解処理方法および処理装置

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JPWO2013058211A1 JPWO2013058211A1 (ja) 2015-04-02
JP6071892B2 true JP6071892B2 (ja) 2017-02-01

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JP (1) JP6071892B2 (ko)
KR (2) KR20140092335A (ko)
CN (1) CN103889553B (ko)
TW (1) TWI533922B (ko)
WO (1) WO2013058211A1 (ko)

Families Citing this family (7)

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Publication number Priority date Publication date Assignee Title
JP6407604B2 (ja) * 2014-07-25 2018-10-17 岩谷産業株式会社 蛍石の製造方法
WO2016157516A1 (ja) 2015-04-03 2016-10-06 株式会社島津製作所 モジュラー型分析システム
KR101659441B1 (ko) * 2016-01-20 2016-09-26 한국에너지기술연구원 다단 촉매 반응 장치 및 이를 이용한 촉매반응 공정
KR102135068B1 (ko) * 2019-09-03 2020-07-17 (주)다산이엔지 폐가스 선별분리 처리장치 및 그 제어방법
CN116963817A (zh) * 2021-03-02 2023-10-27 株式会社力森诺科 氟化氢气体去除装置和氟化氢气体的去除方法
JP7309983B1 (ja) 2022-08-08 2023-07-18 株式会社タクマ 二酸化炭素回収装置、及び二酸化炭素回収方法
KR20240102283A (ko) * 2022-12-26 2024-07-03 엠에이티플러스 주식회사 반도체 및 디스플레이 공정의 폐가스 처리장치

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Publication number Priority date Publication date Assignee Title
JP3217034B2 (ja) 1997-11-14 2001-10-09 株式会社日立製作所 過弗化物の処理方法及びその処理装置
KR200175311Y1 (ko) * 1999-10-19 2000-03-15 주식회사대산정공 고하중용 비계
EP1297884A3 (en) * 2001-09-28 2003-04-16 Japan Pionics Co., Ltd. Treating agent and method for decomposition of fluorocarbons
JP4214717B2 (ja) * 2002-05-31 2009-01-28 株式会社日立製作所 過弗化物処理装置
JP2006312121A (ja) 2005-05-06 2006-11-16 Hitachi Ltd 過フッ化物処理方法および過フッ化物処理装置
JP4966521B2 (ja) * 2005-07-22 2012-07-04 昭和電工株式会社 過弗化物含有排ガスの処理方法及び処理装置
KR100654922B1 (ko) * 2006-01-26 2006-12-06 주식회사 코캣 반도체 제조공정으로부터 발생하는 배가스 처리장치 및방법
KR100766749B1 (ko) 2006-08-16 2007-10-12 주식회사 에코프로 과불화화합물 가스를 포함하는 대용량 배기가스 처리방법및 그 처리장치
US20080119351A1 (en) * 2006-11-22 2008-05-22 Po-Chu Liu Decomposing catalyst for perfluorinated compound, carbon hydrofluoride, perchloro-carbon and carbon hydrochloride gas compounds and method of producing it
JP2010162464A (ja) 2009-01-14 2010-07-29 Ebara Corp ガス処理装置、およびガス処理装置の処理剤交換方法
JP5047202B2 (ja) * 2009-02-04 2012-10-10 大旺新洋株式会社 酸性ガスの中和処理方法

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CN103889553B (zh) 2017-05-03
KR20140092335A (ko) 2014-07-23
WO2013058211A1 (ja) 2013-04-25
TWI533922B (zh) 2016-05-21
TW201332633A (zh) 2013-08-16
KR20160149313A (ko) 2016-12-27
KR101699217B1 (ko) 2017-01-23
JPWO2013058211A1 (ja) 2015-04-02
CN103889553A (zh) 2014-06-25

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