JP6069140B2 - 基板処理システム及び基板処理方法並びに基板処理プログラムを記憶したコンピュータ読み取り可能な記憶媒体 - Google Patents

基板処理システム及び基板処理方法並びに基板処理プログラムを記憶したコンピュータ読み取り可能な記憶媒体 Download PDF

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JP6069140B2
JP6069140B2 JP2013187301A JP2013187301A JP6069140B2 JP 6069140 B2 JP6069140 B2 JP 6069140B2 JP 2013187301 A JP2013187301 A JP 2013187301A JP 2013187301 A JP2013187301 A JP 2013187301A JP 6069140 B2 JP6069140 B2 JP 6069140B2
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substrate
recovery cup
processing
cup
peripheral surface
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JP2015056431A (ja
JP2015056431A5 (enExample
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信彦 毛利
信彦 毛利
小原　隆憲
隆憲 小原
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Tokyo Electron Ltd
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JP2013187301A 2013-09-10 2013-09-10 基板処理システム及び基板処理方法並びに基板処理プログラムを記憶したコンピュータ読み取り可能な記憶媒体 Active JP6069140B2 (ja)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230005183A (ko) * 2020-05-01 2023-01-09 도쿄엘렉트론가부시키가이샤 기판 처리 장치의 컵의 세정 방법, 및 기판 처리 장치

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017018481A1 (ja) * 2015-07-29 2017-02-02 東京エレクトロン株式会社 基板処理装置、基板処理方法および記憶媒体
KR102869664B1 (ko) * 2020-01-14 2025-10-15 주식회사 제우스 컵을 포함하는 반도체 제조 장치 및 그 동작 방법
KR20210128290A (ko) * 2020-04-16 2021-10-26 주식회사 제우스 컵 세정 장치 및 그 동작 방법
JP7777463B2 (ja) * 2022-02-14 2025-11-28 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置、および処理カップの洗浄方法
CN119247708A (zh) * 2024-11-05 2025-01-03 江苏容道社半导体设备科技有限公司 一种具有自清洁功能的晶圆匀胶显影机

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Publication number Priority date Publication date Assignee Title
JPH08323302A (ja) * 1995-05-29 1996-12-10 Dainippon Screen Mfg Co Ltd 基板処理装置
JPH1133468A (ja) * 1997-07-23 1999-02-09 Dainippon Screen Mfg Co Ltd 回転式基板処理装置およびカップの洗浄方法
JP3640837B2 (ja) * 1999-06-28 2005-04-20 大日本スクリーン製造株式会社 基板処理装置
JP4255702B2 (ja) * 2003-01-28 2009-04-15 株式会社荏原製作所 基板処理装置及び方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230005183A (ko) * 2020-05-01 2023-01-09 도쿄엘렉트론가부시키가이샤 기판 처리 장치의 컵의 세정 방법, 및 기판 처리 장치
KR102834986B1 (ko) 2020-05-01 2025-07-16 도쿄엘렉트론가부시키가이샤 기판 처리 장치의 컵의 세정 방법, 및 기판 처리 장치

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