JP2015056431A5 - - Google Patents

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Publication number
JP2015056431A5
JP2015056431A5 JP2013187301A JP2013187301A JP2015056431A5 JP 2015056431 A5 JP2015056431 A5 JP 2015056431A5 JP 2013187301 A JP2013187301 A JP 2013187301A JP 2013187301 A JP2013187301 A JP 2013187301A JP 2015056431 A5 JP2015056431 A5 JP 2015056431A5
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JP
Japan
Prior art keywords
substrate
recovery cup
peripheral surface
inner peripheral
processing
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Application number
JP2013187301A
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English (en)
Japanese (ja)
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JP2015056431A (ja
JP6069140B2 (ja
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Priority to JP2013187301A priority Critical patent/JP6069140B2/ja
Priority claimed from JP2013187301A external-priority patent/JP6069140B2/ja
Publication of JP2015056431A publication Critical patent/JP2015056431A/ja
Publication of JP2015056431A5 publication Critical patent/JP2015056431A5/ja
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Publication of JP6069140B2 publication Critical patent/JP6069140B2/ja
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JP2013187301A 2013-09-10 2013-09-10 基板処理システム及び基板処理方法並びに基板処理プログラムを記憶したコンピュータ読み取り可能な記憶媒体 Active JP6069140B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013187301A JP6069140B2 (ja) 2013-09-10 2013-09-10 基板処理システム及び基板処理方法並びに基板処理プログラムを記憶したコンピュータ読み取り可能な記憶媒体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013187301A JP6069140B2 (ja) 2013-09-10 2013-09-10 基板処理システム及び基板処理方法並びに基板処理プログラムを記憶したコンピュータ読み取り可能な記憶媒体

Publications (3)

Publication Number Publication Date
JP2015056431A JP2015056431A (ja) 2015-03-23
JP2015056431A5 true JP2015056431A5 (enExample) 2016-01-07
JP6069140B2 JP6069140B2 (ja) 2017-02-01

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ID=52820659

Family Applications (1)

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JP2013187301A Active JP6069140B2 (ja) 2013-09-10 2013-09-10 基板処理システム及び基板処理方法並びに基板処理プログラムを記憶したコンピュータ読み取り可能な記憶媒体

Country Status (1)

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JP (1) JP6069140B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017018481A1 (ja) * 2015-07-29 2017-02-02 東京エレクトロン株式会社 基板処理装置、基板処理方法および記憶媒体
KR102869664B1 (ko) * 2020-01-14 2025-10-15 주식회사 제우스 컵을 포함하는 반도체 제조 장치 및 그 동작 방법
KR20210128290A (ko) * 2020-04-16 2021-10-26 주식회사 제우스 컵 세정 장치 및 그 동작 방법
US12368041B2 (en) * 2020-05-01 2025-07-22 Tokyo Electron Limited Cleaning method of cup of substrate processing apparatus and substrate processing apparatus
JP7777463B2 (ja) * 2022-02-14 2025-11-28 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置、および処理カップの洗浄方法
CN119247708A (zh) * 2024-11-05 2025-01-03 江苏容道社半导体设备科技有限公司 一种具有自清洁功能的晶圆匀胶显影机

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08323302A (ja) * 1995-05-29 1996-12-10 Dainippon Screen Mfg Co Ltd 基板処理装置
JPH1133468A (ja) * 1997-07-23 1999-02-09 Dainippon Screen Mfg Co Ltd 回転式基板処理装置およびカップの洗浄方法
JP3640837B2 (ja) * 1999-06-28 2005-04-20 大日本スクリーン製造株式会社 基板処理装置
JP4255702B2 (ja) * 2003-01-28 2009-04-15 株式会社荏原製作所 基板処理装置及び方法

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