JP6067407B2 - 検査装置 - Google Patents

検査装置 Download PDF

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Publication number
JP6067407B2
JP6067407B2 JP2013030766A JP2013030766A JP6067407B2 JP 6067407 B2 JP6067407 B2 JP 6067407B2 JP 2013030766 A JP2013030766 A JP 2013030766A JP 2013030766 A JP2013030766 A JP 2013030766A JP 6067407 B2 JP6067407 B2 JP 6067407B2
Authority
JP
Japan
Prior art keywords
inspection
inspected
inspection object
transport
light emitters
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2013030766A
Other languages
English (en)
Japanese (ja)
Other versions
JP2014160016A (ja
Inventor
浩一 佐々木
浩一 佐々木
晋也 松田
晋也 松田
秋久 加藤
秋久 加藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daiichi Jitsugyo Viswill Co Ltd
Original Assignee
Daiichi Jitsugyo Viswill Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daiichi Jitsugyo Viswill Co Ltd filed Critical Daiichi Jitsugyo Viswill Co Ltd
Priority to JP2013030766A priority Critical patent/JP6067407B2/ja
Priority to KR1020157023911A priority patent/KR102148965B1/ko
Priority to CN201380073441.8A priority patent/CN105008852B/zh
Priority to PCT/JP2013/084577 priority patent/WO2014129082A1/ja
Publication of JP2014160016A publication Critical patent/JP2014160016A/ja
Application granted granted Critical
Publication of JP6067407B2 publication Critical patent/JP6067407B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details

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  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Textile Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Quality & Reliability (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Theoretical Computer Science (AREA)
JP2013030766A 2013-02-20 2013-02-20 検査装置 Active JP6067407B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2013030766A JP6067407B2 (ja) 2013-02-20 2013-02-20 検査装置
KR1020157023911A KR102148965B1 (ko) 2013-02-20 2013-12-25 검사 장치
CN201380073441.8A CN105008852B (zh) 2013-02-20 2013-12-25 检查装置
PCT/JP2013/084577 WO2014129082A1 (ja) 2013-02-20 2013-12-25 検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013030766A JP6067407B2 (ja) 2013-02-20 2013-02-20 検査装置

Publications (2)

Publication Number Publication Date
JP2014160016A JP2014160016A (ja) 2014-09-04
JP6067407B2 true JP6067407B2 (ja) 2017-01-25

Family

ID=51390893

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013030766A Active JP6067407B2 (ja) 2013-02-20 2013-02-20 検査装置

Country Status (4)

Country Link
JP (1) JP6067407B2 (zh)
KR (1) KR102148965B1 (zh)
CN (1) CN105008852B (zh)
WO (1) WO2014129082A1 (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7246938B2 (ja) 2019-01-18 2023-03-28 第一実業ビスウィル株式会社 検査装置
JP7504643B2 (ja) * 2020-03-30 2024-06-24 第一実業ビスウィル株式会社 検査装置
KR102368707B1 (ko) * 2021-09-07 2022-02-28 주식회사 하이브비젼 라인 스캔용 논-램버시안 표면 검사 시스템

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0827179B2 (ja) * 1986-07-30 1996-03-21 株式会社マキ製作所 果実・そ菜類の撮像用照明装置
US4902123A (en) * 1987-11-25 1990-02-20 Taunton Technologies, Inc. Topography measuring apparatus
JPH05231837A (ja) * 1991-12-25 1993-09-07 Toshiba Corp 形状測定方法及び装置
JPH05288527A (ja) 1992-04-10 1993-11-02 Matsushita Electric Ind Co Ltd 実装基板外観検査方法およびその装置
JPH0921755A (ja) * 1995-07-05 1997-01-21 Suinku:Kk 検査用搬送装置および検査装置
JP3371668B2 (ja) * 1996-01-31 2003-01-27 株式会社豊田中央研究所 面方向検出装置
CN1296288A (zh) * 1999-10-20 2001-05-23 奎比克视频株式会社 检查半导体器件的外观的系统及其方法
WO2004001285A2 (en) * 2002-06-21 2003-12-31 Pressco Technology Inc. Patterned illumination method and apparatus for machine vision systems
JP4713279B2 (ja) * 2005-08-31 2011-06-29 第一実業ビスウィル株式会社 照明装置及びこれを備えた外観検査装置
JP4740826B2 (ja) * 2006-02-23 2011-08-03 株式会社神戸製鋼所 形状測定装置、形状測定方法
JP5291140B2 (ja) * 2006-02-23 2013-09-18 株式会社神戸製鋼所 形状測定装置、形状測定方法
JP2008002848A (ja) * 2006-06-20 2008-01-10 Tateyama Machine Kk 棒状回転工具の欠陥検査装置と欠陥検査方法
JP2008145300A (ja) * 2006-12-11 2008-06-26 Sharp Corp 蛍光体層厚み判定方法および発光装置の製造方法
JP4466669B2 (ja) * 2007-03-26 2010-05-26 Ｔｄｋ株式会社 外観検査装置
JP5060808B2 (ja) * 2007-03-27 2012-10-31 オリンパス株式会社 外観検査装置
JP4493048B2 (ja) 2007-08-03 2010-06-30 第一実業ビスウィル株式会社 検査装置
JP4905495B2 (ja) * 2009-04-10 2012-03-28 Ｔｄｋ株式会社 外観検査装置
JP4870807B2 (ja) * 2009-11-06 2012-02-08 関東自動車工業株式会社 エッジ検出方法及び画像処理装置

Also Published As

Publication number Publication date
KR102148965B1 (ko) 2020-08-28
KR20150119884A (ko) 2015-10-26
WO2014129082A1 (ja) 2014-08-28
JP2014160016A (ja) 2014-09-04
CN105008852A (zh) 2015-10-28
CN105008852B (zh) 2017-09-26

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