JP6063376B2 - 摺動部材 - Google Patents
摺動部材 Download PDFInfo
- Publication number
- JP6063376B2 JP6063376B2 JP2013502237A JP2013502237A JP6063376B2 JP 6063376 B2 JP6063376 B2 JP 6063376B2 JP 2013502237 A JP2013502237 A JP 2013502237A JP 2013502237 A JP2013502237 A JP 2013502237A JP 6063376 B2 JP6063376 B2 JP 6063376B2
- Authority
- JP
- Japan
- Prior art keywords
- dlc film
- friction
- members
- sliding
- steel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
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Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H57/00—General details of gearing
- F16H57/04—Features relating to lubrication or cooling or heating
- F16H57/0463—Grease lubrication; Drop-feed lubrication
- F16H57/0464—Grease lubrication
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M169/00—Lubricating compositions characterised by containing as components a mixture of at least two types of ingredient selected from base-materials, thickeners or additives, covered by the preceding groups, each of these compounds being essential
- C10M169/06—Mixtures of thickeners and additives
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/02—Parts of sliding-contact bearings
- F16C33/04—Brasses; Bushes; Linings
- F16C33/06—Sliding surface mainly made of metal
- F16C33/10—Construction relative to lubrication
- F16C33/102—Construction relative to lubrication with grease as lubricant
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/02—Parts of sliding-contact bearings
- F16C33/04—Brasses; Bushes; Linings
- F16C33/06—Sliding surface mainly made of metal
- F16C33/12—Structural composition; Use of special materials or surface treatments, e.g. for rust-proofing
- F16C33/122—Multilayer structures of sleeves, washers or liners
- F16C33/124—Details of overlays
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H57/00—General details of gearing
- F16H57/04—Features relating to lubrication or cooling or heating
- F16H57/041—Coatings or solid lubricants, e.g. antiseize layers or pastes
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2201/00—Inorganic compounds or elements as ingredients in lubricant compositions
- C10M2201/06—Metal compounds
- C10M2201/065—Sulfides; Selenides; Tellurides
- C10M2201/066—Molybdenum sulfide
-
- C—CHEMISTRY; METALLURGY
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- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2213/00—Organic macromolecular compounds containing halogen as ingredients in lubricant compositions
- C10M2213/06—Perfluoro polymers
- C10M2213/062—Polytetrafluoroethylene [PTFE]
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2219/00—Organic non-macromolecular compounds containing sulfur, selenium or tellurium as ingredients in lubricant compositions
- C10M2219/06—Thio-acids; Thiocyanates; Derivatives thereof
- C10M2219/062—Thio-acids; Thiocyanates; Derivatives thereof having carbon-to-sulfur double bonds
- C10M2219/066—Thiocarbamic type compounds
- C10M2219/068—Thiocarbamate metal salts
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2223/00—Organic non-macromolecular compounds containing phosphorus as ingredients in lubricant compositions
- C10M2223/02—Organic non-macromolecular compounds containing phosphorus as ingredients in lubricant compositions having no phosphorus-to-carbon bonds
- C10M2223/04—Phosphate esters
- C10M2223/045—Metal containing thio derivatives
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2030/00—Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
- C10N2030/06—Oiliness; Film-strength; Anti-wear; Resistance to extreme pressure
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2040/00—Specified use or application for which the lubricating composition is intended
- C10N2040/04—Oil-bath; Gear-boxes; Automatic transmissions; Traction drives
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2040/00—Specified use or application for which the lubricating composition is intended
- C10N2040/04—Oil-bath; Gear-boxes; Automatic transmissions; Traction drives
- C10N2040/042—Oil-bath; Gear-boxes; Automatic transmissions; Traction drives for automatic transmissions
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2040/00—Specified use or application for which the lubricating composition is intended
- C10N2040/04—Oil-bath; Gear-boxes; Automatic transmissions; Traction drives
- C10N2040/044—Oil-bath; Gear-boxes; Automatic transmissions; Traction drives for manual transmissions
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
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- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2050/00—Form in which the lubricant is applied to the material being lubricated
- C10N2050/10—Semi-solids; greasy
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H19/00—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion
- F16H19/02—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion for interconverting rotary or oscillating motion and reciprocating motion
- F16H19/04—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion for interconverting rotary or oscillating motion and reciprocating motion comprising a rack
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- Sliding-Contact Bearings (AREA)
Description
また、本発明は、相対する二つの部材の間にジアルキルジチオカルバミン酸モリブデン、ジチオリン酸モリブデン、二硫化モリブデン、ポリテトラフルオロエチレンのうちの少なくとも一つを潤滑添加剤として含有し、銅系の添加剤を含有しないグリースを介在させて互いに摺動する摺動部材であって、前記二つの部材のうちの少なくとも一つの部材の摺動面に、水素を含み、ヤング率が201GPa以上253GPa以下、前記グリースを介在させた摩擦係数が0.057以上0.106以下、膜厚が0.5〜20μmである非晶質硬質炭素膜を形成したことを特徴としている。
構造変化して得られた黒鉛質物質や潤滑添加剤が摩擦化学反応により形成した物質は、いずれも層状構造物質であり、摩擦界面や摩擦によって生成されたトライボフィルムは、これらが混在した状態になる。
本発明では、比較的硬質でありながら適度な硬さを有する非晶質硬質炭素膜を、構造変換や摩擦化学反応に、積極的に関与させることによって、摩擦界面や部材表面に異なる複数の層状構造物質相を十分に生成させ、混在させる。混在する各層状構造物質は、それぞれ異なる摩擦特性を有していると考えられるため、これらが十分に生成され、混在することによって、その効果を重畳的に得ることができる結果、より幅広い範囲で安定して低摩擦化を図ることが可能となる。また、水素を含む非晶質硬質炭素膜でよいので、AIP法によるよりも安価且つ簡便にこれを得ることができる。
図1は、摺動部材の一例として、ステアリング装置のラックアンドピニオン摺動機構を、ラックの軸方向と平行且つラックに設けられた歯車に対して垂直な方向に切断した断面図である。
一方、DLC膜5のヤング率が300GPaを超えると、DLC膜5の炭素成分の黒鉛質物質への構造変化や潤滑添加剤の摩擦化学反応を促進するには十分であるものの、相手攻撃性が大きくなり過ぎるため、長期使用により相手材の摩耗が激しくなることが予想されるので好ましくない。
DLC膜5のヤング率は、225GPaとするのが好ましく、247GPaとするのがより好ましく、253GPaとするのがさらに好ましい。
ヤング率は、ISO 14577に準拠したナノインデンテーション法で測定することができ、精度よく算出することができる。
なお、DLC膜5の膜厚は0.5〜20μm程度あれば、前記した作用効果を奏することができる。DLC膜5の好ましい膜厚は1〜10μm程度である。
チタンまたはチタン合金としては、JISで規格されている1〜4種を挙げることができる。
二つの部材2、3は、DLC膜5の形成を阻害するものでなければ、焼入れ、焼もどし、焼なまし、焼ならしなどの熱処理や、浸炭や窒化処理などを目的とした表面処理、さらには、研磨、ショットピーニング、エッチングなどの一般的な表面仕上処理を施すことができる。
セッケン系増ちょう剤は、油脂または脂肪酸をアルカリ金属またはアルカリ土類金属の水酸化物でケン化したものである。これらの金属としては、ナトリウム、リチウム、カリウム、マグネシウム、カルシウムなどが挙げられるが、アルミニウムであってもよい。油脂または脂肪酸としては、ステアリン酸、12−ヒドロキシステアリン酸、ラウリン酸、ミリスチン酸、パルミチン酸、オレイン酸のうちの少なくとも一つが挙げられる。セッケン系増ちょう剤として具体的には、カルシウムセッケン、カルシウム複合セッケン、ナトリウムセッケン、アルミニウムセッケン、アルミニウム複合セッケン、リチウムセッケン、リチウム複合セッケンなどがある。
非セッケン系増ちょう剤は、有機系および無機系のうちの少なくとも一方を用いることができる。有機系の非セッケン系増ちょう剤としては、ウレア化合物(ポリウレア)、ナトリウムテレフタラメート、PTFE、インダスレン、フタロシアニンなどが挙げられる。無機系の非セッケン系増ちょう剤としては、有機物で表面処理されたベントナイト、シリカゲルなどが挙げられる。
なお、市販されているグリース中には増ちょう剤が約5〜20質量%含有されている。本発明では、かかる含有量で増ちょう剤が含有されていれば所望の効果を得ることができるが、適宜含有量を増減させてもよい。
さらに、プラズマCVD法によってDLC膜5を成膜できるため、安価且つ簡便に、低摩擦性に優れた摺動部材1を製造することができる。
まず、SUJ2材からなる直径φ20mmのディスク材D(図2参照)の表面を鏡面研磨した。そして、鏡面研磨した表面の上に、表1に示す条件でDLC膜を成膜し、実施例1〜4および比較例1、2、4〜6に係るディスク材Dを作製した。なお、比較例3に係るディスク材DにはDLC膜を成膜しなかった。表1中のC2H2はアセチレン、C7H8はトルエン、CH4はメタンを表す。固体炭素としては等方性黒鉛を用いた。
実施例1〜4および比較例1〜6のDLC膜の水素含有量は、ラザフォード後方散乱分光法(Rutherford Backscattering Spectrometry;RBS)により測定した。RBSでは、試料にヘリウム(He)イオンを照射して、特に水素含有量については、反跳して前方に散乱した水素を検出した結果より算出した。
これに対して、比較例1、2は、ヤング率が200GPa未満であったため、摩擦係数が大きくなった。これは、DLC膜の硬さが低かったため、DLC膜の炭素成分の黒鉛質物質への構造変化が不十分であり、同時に、潤滑添加剤の摩擦化学反応が十分に進行しなかったことによると考えられる。
また、比較例3は、ディスク材の表面にDLC膜を形成しなかったため、摩擦係数が大きくなった。
そして、比較例4は、グリースが本発明で狙いとするような潤滑添加剤を含有していないため、摩擦係数が大きくなった。
なお、比較例5、6は、いずれも摩擦係数は合格していたものの、DLC膜のヤング率が高過ぎるため、相手攻撃性が大きく、長期使用により相手材の摩耗が激しくなることが予想されるので好ましくないと判断された。
これに対し、実施例5のフリクショントルクは、比較例7の約20%減となる約1.2〜1.3N・mであった。また、フリクショントルクの変動が殆どなく、終始安定していた。
さらに、プラズマCVD法によってDLC膜を成膜でき、安価且つ簡便に、低摩擦性に優れた摺動部材を製造できることが示唆された。
2 部材
2a 摺動面
3 部材
4 グリース
5 DLC膜(非晶質硬質炭素膜)
Claims (2)
- 相対する二つの部材の間にジアルキルジチオカルバミン酸モリブデン、ジチオリン酸モリブデン、二硫化モリブデン、ポリテトラフルオロエチレンのうちの少なくとも一つを潤滑添加剤として含有し、銅系の添加剤を含有しないグリースを介在させて互いに摺動する摺動部材であって、
前記二つの部材のうちの少なくとも一つの部材の摺動面に、水素を17〜29原子%含み、ヤング率が201GPa以上253GPa以下、膜厚が0.5〜20μmである非晶質硬質炭素膜を形成したことを特徴とする摺動部材。 - 相対する二つの部材の間にジアルキルジチオカルバミン酸モリブデン、ジチオリン酸モリブデン、二硫化モリブデン、ポリテトラフルオロエチレンのうちの少なくとも一つを潤滑添加剤として含有し、銅系の添加剤を含有しないグリースを介在させて互いに摺動する摺動部材であって、
前記二つの部材のうちの少なくとも一つの部材の摺動面に、水素を含み、ヤング率が201GPa以上253GPa以下、前記グリースを介在させた摩擦係数が0.057以上0.106以下、膜厚が0.5〜20μmである非晶質硬質炭素膜を形成したことを特徴とする摺動部材。
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PCT/JP2012/053523 WO2012117854A1 (ja) | 2011-02-28 | 2012-02-15 | 摺動部材 |
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JP6809155B2 (ja) * | 2016-02-08 | 2021-01-06 | 日本製鉄株式会社 | 摺動部材ならびにその製造方法および使用方法 |
CN108048160B (zh) * | 2017-12-18 | 2020-12-01 | 中国科学院兰州化学物理研究所 | 一种碳结构薄膜与石墨烯添加剂固液复合减摩抗磨的方法 |
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JPH0754150A (ja) * | 1993-06-11 | 1995-02-28 | Zexel Corp | 非晶質硬質炭素膜及びその製造方法 |
JP2001316686A (ja) * | 2000-04-28 | 2001-11-16 | Shojiro Miyake | 硬質炭素皮膜摺動部材 |
JP2003336542A (ja) * | 2002-05-21 | 2003-11-28 | Toyota Central Res & Dev Lab Inc | 高耐摩耗性および高耐焼付き性摺動部材およびその製造方法 |
JP2005314454A (ja) * | 2004-04-27 | 2005-11-10 | Toyota Central Res & Dev Lab Inc | 低摩擦摺動部材 |
JP2005336456A (ja) * | 2004-04-27 | 2005-12-08 | Toyota Central Res & Dev Lab Inc | 低摩擦摺動部材 |
JP2007083726A (ja) * | 2006-10-06 | 2007-04-05 | Rikogaku Shinkokai | 保護膜 |
JP2008255160A (ja) * | 2007-04-02 | 2008-10-23 | Toyota Motor Corp | 摺動構造 |
JP2009062206A (ja) * | 2007-09-05 | 2009-03-26 | Honda Motor Co Ltd | 水素化アモルファスカーボン膜 |
JP2010215950A (ja) * | 2009-03-16 | 2010-09-30 | Toyota Motor Corp | 摺動部材及びその製造方法 |
-
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- 2012-02-15 WO PCT/JP2012/053523 patent/WO2012117854A1/ja active Application Filing
- 2012-02-15 JP JP2013502237A patent/JP6063376B2/ja not_active Expired - Fee Related
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0754150A (ja) * | 1993-06-11 | 1995-02-28 | Zexel Corp | 非晶質硬質炭素膜及びその製造方法 |
JP2001316686A (ja) * | 2000-04-28 | 2001-11-16 | Shojiro Miyake | 硬質炭素皮膜摺動部材 |
JP2003336542A (ja) * | 2002-05-21 | 2003-11-28 | Toyota Central Res & Dev Lab Inc | 高耐摩耗性および高耐焼付き性摺動部材およびその製造方法 |
JP2005314454A (ja) * | 2004-04-27 | 2005-11-10 | Toyota Central Res & Dev Lab Inc | 低摩擦摺動部材 |
JP2005336456A (ja) * | 2004-04-27 | 2005-12-08 | Toyota Central Res & Dev Lab Inc | 低摩擦摺動部材 |
JP2007083726A (ja) * | 2006-10-06 | 2007-04-05 | Rikogaku Shinkokai | 保護膜 |
JP2008255160A (ja) * | 2007-04-02 | 2008-10-23 | Toyota Motor Corp | 摺動構造 |
JP2009062206A (ja) * | 2007-09-05 | 2009-03-26 | Honda Motor Co Ltd | 水素化アモルファスカーボン膜 |
JP2010215950A (ja) * | 2009-03-16 | 2010-09-30 | Toyota Motor Corp | 摺動部材及びその製造方法 |
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