JP6057779B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JP6057779B2 JP6057779B2 JP2013038599A JP2013038599A JP6057779B2 JP 6057779 B2 JP6057779 B2 JP 6057779B2 JP 2013038599 A JP2013038599 A JP 2013038599A JP 2013038599 A JP2013038599 A JP 2013038599A JP 6057779 B2 JP6057779 B2 JP 6057779B2
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- Japan
- Prior art keywords
- signal line
- semiconductor
- semiconductor substrate
- signal
- polysilicon layer
- Prior art date
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- 239000004065 semiconductor Substances 0.000 title claims description 141
- 239000000758 substrate Substances 0.000 claims description 62
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 38
- 229920005591 polysilicon Polymers 0.000 claims description 38
- 239000000463 material Substances 0.000 claims description 6
- 239000010410 layer Substances 0.000 description 45
- 238000002955 isolation Methods 0.000 description 17
- 230000003071 parasitic effect Effects 0.000 description 10
- 230000008878 coupling Effects 0.000 description 8
- 238000010168 coupling process Methods 0.000 description 8
- 238000005859 coupling reaction Methods 0.000 description 8
- 230000000644 propagated effect Effects 0.000 description 8
- 230000001902 propagating effect Effects 0.000 description 6
- 230000006866 deterioration Effects 0.000 description 4
- 230000002238 attenuated effect Effects 0.000 description 3
- 230000001965 increasing effect Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
- H01L23/64—Impedance arrangements
- H01L23/66—High-frequency adaptations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/5222—Capacitive arrangements or effects of, or between wiring layers
- H01L23/5225—Shielding layers formed together with wiring layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/5228—Resistive arrangements or effects of, or between, wiring layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
- H01L23/53204—Conductive materials
- H01L23/53271—Conductive materials containing semiconductor material, e.g. polysilicon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
- H01L23/585—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries comprising conductive layers or plates or strips or rods or rings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0642—Isolation within the component, i.e. internal isolation
- H01L29/0649—Dielectric regions, e.g. SiO2 regions, air gaps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/58—Structural electrical arrangements for semiconductor devices not otherwise provided for
- H01L2223/64—Impedance arrangements
- H01L2223/66—High-frequency adaptations
- H01L2223/6605—High-frequency electrical connections
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Semiconductor Integrated Circuits (AREA)
- Element Separation (AREA)
Description
[1]上記実施の形態では、信号線103の直下にポリシリコン層102を形成する場合について説明した。しかし、信号線103の直下に形成される層は、ポリシリコン層に限らず、信号線と半導体基板との間に生じる寄生容量による信号線から半導体基板への信号の不要な伝搬を抑えることができる素材(絶縁層)から形成されればよい。
102 ポリシリコン層
103,109 信号線
105,106,305 半導体素子
107,303 第1層
301 S1ポート
302 S2ポート
304 第2層
108,306 トレンチ型絶縁領域
Claims (3)
- 半導体基板と、
前記半導体基板の表面部に形成され、信号を発する第1の半導体素子と、
前記第1の半導体素子と接続された信号線と、
前記信号線の直下に、前記信号線に沿って、前記半導体基板上に位置するように形成されたポリシリコン層と、
前記信号線の直下であって、前記信号線と接続されない第2の半導体素子と、
を具備し、
前記半導体基板内において、前記第1の半導体素子、及び、前記第2の半導体素子の少なくとも一方の周囲を取り囲むように、トレンチ型絶縁領域が形成され、
前記ポリシリコン層は、前記第1の半導体素子、及び、前記第2の半導体素子、が形成される範囲以外であって、前記トレンチ型絶縁領域を含む範囲に形成される、
半導体装置。 - 前記ポリシリコン層の幅は、少なくとも、前記信号線の幅よりも広い、
請求項1記載の半導体装置。 - 前記半導体基板は、単一の抵抗率の素材、または、抵抗率の異なる複数の素材により構成されている、
請求項1記載の半導体装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013038599A JP6057779B2 (ja) | 2013-02-28 | 2013-02-28 | 半導体装置 |
US14/764,745 US20150371961A1 (en) | 2013-02-28 | 2013-11-29 | Semiconductor device |
PCT/JP2013/007040 WO2014132311A1 (ja) | 2013-02-28 | 2013-11-29 | 半導体装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013038599A JP6057779B2 (ja) | 2013-02-28 | 2013-02-28 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014167954A JP2014167954A (ja) | 2014-09-11 |
JP6057779B2 true JP6057779B2 (ja) | 2017-01-11 |
Family
ID=51427616
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013038599A Expired - Fee Related JP6057779B2 (ja) | 2013-02-28 | 2013-02-28 | 半導体装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US20150371961A1 (ja) |
JP (1) | JP6057779B2 (ja) |
WO (1) | WO2014132311A1 (ja) |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02105532A (ja) * | 1988-10-14 | 1990-04-18 | Nec Corp | 半導体集積回路装置 |
JPH03231444A (ja) * | 1990-02-07 | 1991-10-15 | Matsushita Electron Corp | 半導体装置 |
JPH06169061A (ja) * | 1992-01-17 | 1994-06-14 | Ricoh Co Ltd | 入出力保護装置 |
JP4383755B2 (ja) * | 2002-02-27 | 2009-12-16 | キヤノン株式会社 | 撮像装置 |
EP1341377B1 (en) * | 2002-02-27 | 2018-04-11 | Canon Kabushiki Kaisha | Signal processing device for image pickup apparatus |
KR100734507B1 (ko) * | 2005-05-12 | 2007-07-03 | 하이맥스 테크놀로지스, 인코포레이션 | 고전압 소자의 전류 누설을 방지하기 위한 구조 |
JP2007067012A (ja) * | 2005-08-29 | 2007-03-15 | Matsushita Electric Ind Co Ltd | 半導体装置 |
KR20070093335A (ko) * | 2006-03-13 | 2007-09-18 | 마쯔시다덴기산교 가부시키가이샤 | 고체 촬상장치 및 그 구동방법 |
JP5078416B2 (ja) * | 2006-04-27 | 2012-11-21 | キヤノン株式会社 | 反射型液晶表示装置及び反射型液晶表示装置用の基板 |
JP5041511B2 (ja) * | 2006-08-22 | 2012-10-03 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
TWI585730B (zh) * | 2006-09-29 | 2017-06-01 | 半導體能源研究所股份有限公司 | 顯示裝置和電子裝置 |
US7959261B2 (en) * | 2007-05-08 | 2011-06-14 | Lexmark International, Inc. | Micro-fluid ejection devices having reduced input/output addressable heaters |
JP2009135149A (ja) * | 2007-11-28 | 2009-06-18 | Panasonic Corp | 半導体集積回路 |
JP2009177044A (ja) * | 2008-01-28 | 2009-08-06 | Panasonic Corp | 電気ヒューズ回路 |
-
2013
- 2013-02-28 JP JP2013038599A patent/JP6057779B2/ja not_active Expired - Fee Related
- 2013-11-29 WO PCT/JP2013/007040 patent/WO2014132311A1/ja active Application Filing
- 2013-11-29 US US14/764,745 patent/US20150371961A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
JP2014167954A (ja) | 2014-09-11 |
US20150371961A1 (en) | 2015-12-24 |
WO2014132311A1 (ja) | 2014-09-04 |
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