JP6054104B2 - 反応現像画像形成法 - Google Patents
反応現像画像形成法 Download PDFInfo
- Publication number
- JP6054104B2 JP6054104B2 JP2012193009A JP2012193009A JP6054104B2 JP 6054104 B2 JP6054104 B2 JP 6054104B2 JP 2012193009 A JP2012193009 A JP 2012193009A JP 2012193009 A JP2012193009 A JP 2012193009A JP 6054104 B2 JP6054104 B2 JP 6054104B2
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- Japan
- Prior art keywords
- acid dianhydride
- resin composition
- acid
- photosensitive resin
- photoresist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 238000000034 method Methods 0.000 title claims description 17
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- 239000002253 acid Substances 0.000 claims description 52
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- 239000009719 polyimide resin Substances 0.000 claims description 44
- -1 diamine compound Chemical class 0.000 claims description 34
- 239000011342 resin composition Substances 0.000 claims description 25
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