JP6039411B2 - インクジェットヘッド用基板、インクジェットヘッド、インクジェットヘッドの製造方法 - Google Patents

インクジェットヘッド用基板、インクジェットヘッド、インクジェットヘッドの製造方法 Download PDF

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Publication number
JP6039411B2
JP6039411B2 JP2012285440A JP2012285440A JP6039411B2 JP 6039411 B2 JP6039411 B2 JP 6039411B2 JP 2012285440 A JP2012285440 A JP 2012285440A JP 2012285440 A JP2012285440 A JP 2012285440A JP 6039411 B2 JP6039411 B2 JP 6039411B2
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JP
Japan
Prior art keywords
protective layer
ink
inkjet head
upper protective
heating resistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2012285440A
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English (en)
Japanese (ja)
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JP2014124921A (ja
JP2014124921A5 (enExample
Inventor
誠 櫻井
誠 櫻井
譲 石田
譲 石田
初井　琢也
琢也 初井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2012285440A priority Critical patent/JP6039411B2/ja
Priority to US14/138,295 priority patent/US9061489B2/en
Priority to CN201310741027.1A priority patent/CN103895349B/zh
Publication of JP2014124921A publication Critical patent/JP2014124921A/ja
Publication of JP2014124921A5 publication Critical patent/JP2014124921A5/ja
Application granted granted Critical
Publication of JP6039411B2 publication Critical patent/JP6039411B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/0451—Control methods or devices therefor, e.g. driver circuits, control circuits for detecting failure, e.g. clogging, malfunctioning actuator
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/0458—Control methods or devices therefor, e.g. driver circuits, control circuits controlling heads based on heating elements forming bubbles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2012285440A 2012-12-27 2012-12-27 インクジェットヘッド用基板、インクジェットヘッド、インクジェットヘッドの製造方法 Expired - Fee Related JP6039411B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2012285440A JP6039411B2 (ja) 2012-12-27 2012-12-27 インクジェットヘッド用基板、インクジェットヘッド、インクジェットヘッドの製造方法
US14/138,295 US9061489B2 (en) 2012-12-27 2013-12-23 Substrate for inkjet head and inkjet head having protection layer including individual sections corresponding to heating resistors
CN201310741027.1A CN103895349B (zh) 2012-12-27 2013-12-27 喷墨头用的基板以及喷墨头

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012285440A JP6039411B2 (ja) 2012-12-27 2012-12-27 インクジェットヘッド用基板、インクジェットヘッド、インクジェットヘッドの製造方法

Publications (3)

Publication Number Publication Date
JP2014124921A JP2014124921A (ja) 2014-07-07
JP2014124921A5 JP2014124921A5 (enExample) 2016-02-18
JP6039411B2 true JP6039411B2 (ja) 2016-12-07

Family

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Family Applications (1)

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JP2012285440A Expired - Fee Related JP6039411B2 (ja) 2012-12-27 2012-12-27 インクジェットヘッド用基板、インクジェットヘッド、インクジェットヘッドの製造方法

Country Status (3)

Country Link
US (1) US9061489B2 (enExample)
JP (1) JP6039411B2 (enExample)
CN (1) CN103895349B (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6566709B2 (ja) 2015-05-07 2019-08-28 キヤノン株式会社 インクジェット記録ヘッド用基板
JP6504938B2 (ja) * 2015-06-25 2019-04-24 キヤノン株式会社 液体吐出ヘッド用基板および液体吐出ヘッド
US10272671B2 (en) 2015-10-08 2019-04-30 Hewlett-Packard Development Company, L.P. Isolating failed resistors
JP2018176697A (ja) * 2017-04-21 2018-11-15 キヤノン株式会社 液体吐出ヘッドのヒューズ部の切断方法、液体吐出装置
JP7071067B2 (ja) * 2017-06-21 2022-05-18 キヤノン株式会社 液体吐出ヘッド用基板、液体吐出ヘッド、および液体吐出ヘッド用基板の製造方法
JP2019069533A (ja) * 2017-10-06 2019-05-09 キヤノン株式会社 液体吐出ヘッド用基板、液体吐出ヘッド、液体吐出ヘッド用基板におけるヒューズ部の切断方法
JP7183049B2 (ja) * 2018-02-22 2022-12-05 キヤノン株式会社 液体吐出ヘッド用基板および液体吐出ヘッド
JP7159060B2 (ja) * 2018-02-22 2022-10-24 キヤノン株式会社 液体吐出ヘッド用基板、液体吐出ヘッド、液体吐出ヘッド用基板の製造方法
JP7286349B2 (ja) * 2018-04-27 2023-06-05 キヤノン株式会社 液体吐出ヘッド用基板、液体吐出ヘッド用基板の製造方法、および液体吐出ヘッド
JP7134733B2 (ja) 2018-06-25 2022-09-12 キヤノン株式会社 記録素子基板、液体吐出ヘッド、および液体吐出装置
JP7760311B2 (ja) 2021-09-29 2025-10-27 キヤノン株式会社 液体吐出ヘッド用基板、液体吐出ヘッド、及び液体吐出ヘッド用基板の製造方法

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US8075102B2 (en) 2008-06-19 2011-12-13 Canon Kabushiki Kaisha Substrate for ink jet head and ink jet head
JP5393275B2 (ja) * 2008-06-24 2014-01-22 キヤノン株式会社 液体吐出ヘッド
JP5328607B2 (ja) 2008-11-17 2013-10-30 キヤノン株式会社 液体吐出ヘッド用基板、該基板を有する液体吐出ヘッド、該ヘッドのクリーニング方法および前記ヘッドを用いる液体吐出装置
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Also Published As

Publication number Publication date
CN103895349B (zh) 2016-01-20
JP2014124921A (ja) 2014-07-07
US9061489B2 (en) 2015-06-23
US20140184700A1 (en) 2014-07-03
CN103895349A (zh) 2014-07-02

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