JP6021761B2 - ガスセンサ装置 - Google Patents

ガスセンサ装置 Download PDF

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Publication number
JP6021761B2
JP6021761B2 JP2013175449A JP2013175449A JP6021761B2 JP 6021761 B2 JP6021761 B2 JP 6021761B2 JP 2013175449 A JP2013175449 A JP 2013175449A JP 2013175449 A JP2013175449 A JP 2013175449A JP 6021761 B2 JP6021761 B2 JP 6021761B2
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JP
Japan
Prior art keywords
sensor
pressure
signal
sensor element
concentration
Prior art date
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Expired - Fee Related
Application number
JP2013175449A
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English (en)
Japanese (ja)
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JP2015045515A (ja
JP2015045515A5 (https=
Inventor
中野　洋
洋 中野
松本　昌大
昌大 松本
哲 浅野
哲 浅野
忍 田代
忍 田代
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Astemo Ltd
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Hitachi Automotive Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Automotive Systems Ltd filed Critical Hitachi Automotive Systems Ltd
Priority to JP2013175449A priority Critical patent/JP6021761B2/ja
Priority to CN201480047460.8A priority patent/CN105492898B/zh
Priority to DE112014003909.8T priority patent/DE112014003909T5/de
Priority to PCT/JP2014/052386 priority patent/WO2015029460A1/ja
Priority to US14/914,231 priority patent/US9958305B2/en
Publication of JP2015045515A publication Critical patent/JP2015045515A/ja
Publication of JP2015045515A5 publication Critical patent/JP2015045515A5/ja
Application granted granted Critical
Publication of JP6021761B2 publication Critical patent/JP6021761B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
    • G01N27/18—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by changes in the thermal conductivity of a surrounding material to be tested
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0062—General constructional details of gas analysers, e.g. portable test equipment concerning the measuring method or the display, e.g. intermittent measurement or digital display
    • G01N33/0067—General constructional details of gas analysers, e.g. portable test equipment concerning the measuring method or the display, e.g. intermittent measurement or digital display by measuring the rate of variation of the concentration

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Fluid Mechanics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Medicinal Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Combustion & Propulsion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measuring Volume Flow (AREA)
JP2013175449A 2013-08-27 2013-08-27 ガスセンサ装置 Expired - Fee Related JP6021761B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2013175449A JP6021761B2 (ja) 2013-08-27 2013-08-27 ガスセンサ装置
CN201480047460.8A CN105492898B (zh) 2013-08-27 2014-02-03 气体传感器装置
DE112014003909.8T DE112014003909T5 (de) 2013-08-27 2014-02-03 Gassensorvorrichtung
PCT/JP2014/052386 WO2015029460A1 (ja) 2013-08-27 2014-02-03 ガスセンサ装置
US14/914,231 US9958305B2 (en) 2013-08-27 2014-02-03 Gas sensor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013175449A JP6021761B2 (ja) 2013-08-27 2013-08-27 ガスセンサ装置

Publications (3)

Publication Number Publication Date
JP2015045515A JP2015045515A (ja) 2015-03-12
JP2015045515A5 JP2015045515A5 (https=) 2016-03-03
JP6021761B2 true JP6021761B2 (ja) 2016-11-09

Family

ID=52586047

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013175449A Expired - Fee Related JP6021761B2 (ja) 2013-08-27 2013-08-27 ガスセンサ装置

Country Status (5)

Country Link
US (1) US9958305B2 (https=)
JP (1) JP6021761B2 (https=)
CN (1) CN105492898B (https=)
DE (1) DE112014003909T5 (https=)
WO (1) WO2015029460A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017083320A (ja) * 2015-10-28 2017-05-18 日立オートモティブシステムズ株式会社 物理量検出装置

Families Citing this family (48)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6099094B2 (ja) * 2013-06-21 2017-03-22 日立オートモティブシステムズ株式会社 ガスセンサ装置およびガスセンサ装置の取付け構造
US10449320B2 (en) * 2013-10-15 2019-10-22 Fisher & Paykel Healthcare Limited Sensing and control arrangements for respiratory device
JP5826355B1 (ja) * 2014-10-03 2015-12-02 三菱電機株式会社 流量測定装置
JP6686276B2 (ja) * 2014-12-09 2020-04-22 株式会社デンソー エアフロメータ
JP5933782B1 (ja) * 2015-03-16 2016-06-15 三菱電機株式会社 流量測定装置に一体に設けられた物理量測定装置および物理量測定方法
EP3332225B1 (en) * 2015-08-07 2020-10-28 Brewer Science, Inc. Environmental sensor system and signal processor
JP6641789B2 (ja) * 2015-08-27 2020-02-05 株式会社デンソー 空気流量測定装置
DE102015219501A1 (de) * 2015-10-08 2017-04-13 Robert Bosch Gmbh Sensorvorrichtung zur Erfassung mindestens einer Strömungseigenschaft eines fluiden Mediums
JP6520636B2 (ja) * 2015-10-16 2019-05-29 株式会社デンソー 物理量センササブアセンブリおよび物理量測定装置
JP6501902B2 (ja) * 2015-10-28 2019-04-17 日立オートモティブシステムズ株式会社 内燃機関制御装置
JP6611694B2 (ja) * 2015-12-15 2019-11-27 株式会社堀場製作所 排ガス計測システム
JP6421763B2 (ja) * 2016-01-13 2018-11-14 トヨタ自動車株式会社 湿度センサの異常検出装置
DE112017001130T5 (de) * 2016-05-23 2018-11-22 Hitachi Automotive Systems, Ltd. Feuchtemessvorrichtung
GB201609905D0 (en) * 2016-06-07 2016-07-20 Ge Oil & Gas Device and system for fluid flow measurement
JP6812688B2 (ja) * 2016-07-20 2021-01-13 株式会社デンソー 吸気流量測定装置
KR101839809B1 (ko) 2016-08-12 2018-03-19 (주)포인트엔지니어링 마이크로 센서
DE112017002858T5 (de) * 2016-08-26 2019-02-28 Hitachi Automotive Systems, Ltd. Thermisches Feuchtigkeitsmessgerät
US10650621B1 (en) 2016-09-13 2020-05-12 Iocurrents, Inc. Interfacing with a vehicular controller area network
JP6544365B2 (ja) * 2017-02-08 2019-07-17 株式会社デンソー 絶対湿度センサ
JP6798336B2 (ja) * 2017-02-08 2020-12-09 株式会社デンソー 絶対湿度センサ
WO2018179248A1 (ja) * 2017-03-30 2018-10-04 三菱電機株式会社 換気装置
US11105292B2 (en) 2017-04-21 2021-08-31 Hitachi Automotive Systems, Ltd. Humidity measurement device
JP2018179922A (ja) * 2017-04-21 2018-11-15 日立オートモティブシステムズ株式会社 車載用センサモジュール
JP6916667B2 (ja) * 2017-05-24 2021-08-11 株式会社堀場製作所 プローブデバイス、及び、排ガス分析装置
JP7253551B2 (ja) * 2017-08-14 2023-04-06 ハーン－シッカート－ゲゼルシャフト フュア アンゲヴァンテ フォアシュング アインゲトラーゲナー フェライン 呼吸空気の呼気ｃｏ２濃度を決定するためのガスセンサ
JP7168340B2 (ja) * 2018-04-11 2022-11-09 日立Astemo株式会社 熱式流量計
WO2020095619A1 (ja) * 2018-11-08 2020-05-14 日立オートモティブシステムズ株式会社 熱式湿度測定装置
KR101977196B1 (ko) * 2018-11-23 2019-05-10 주식회사 파워맥스 통합형 센서
JP7049277B2 (ja) * 2019-01-11 2022-04-06 日立Astemo株式会社 物理量検出装置
CN109752418B (zh) * 2019-01-21 2021-11-05 中国科学院上海微系统与信息技术研究所 一种微型热导气体传感器
WO2020234631A1 (en) * 2019-05-23 2020-11-26 Arcelormittal A humidity detection equipment of a strip
JP2021124472A (ja) * 2020-02-10 2021-08-30 パナソニックＩｐマネジメント株式会社 複合センサ
US12478808B2 (en) 2020-06-29 2025-11-25 Dräger Safety AG & Co. KGaA Monitoring system
US12292429B2 (en) 2020-06-29 2025-05-06 Dräger Safety AG & Co. KGaA Monitoring system
DE102021111431A1 (de) 2020-06-29 2021-12-30 Dräger Safety AG & Co. KGaA Überwachungssystem
US11772958B2 (en) * 2020-09-17 2023-10-03 Applied Materials, Inc. Mass flow control based on micro-electromechanical devices
US12235144B2 (en) 2020-09-17 2025-02-25 Applied Materials, Inc.—Robotics Micro-electromechanical device for use in a flow control apparatus
KR102617973B1 (ko) * 2020-12-08 2023-12-27 (주)리벤씨 선박용 이중 연료 엔진 조립체
DE102021206131A1 (de) * 2021-06-16 2022-12-22 Robert Bosch Gesellschaft mit beschränkter Haftung Modul und Verfahren zum Überwachen von Umwelteinflüssen auf ein Modul
DE102021117778A1 (de) * 2021-07-09 2023-01-12 Infineon Technologies Ag Gassensor mit einem sensorelement und einer flammensperre und verwendung desselben für die detektion von gasen
KR102641537B1 (ko) * 2021-12-06 2024-02-27 주식회사 현대케피코 열전도식 가스감지센서 및 이를 이용한 가스 측정방법
CN120084406A (zh) * 2021-12-30 2025-06-03 北京恒合信业技术股份有限公司 一种流量检测装置及流量检测方法
DE102022208864B4 (de) * 2022-08-26 2025-03-20 Vitesco Technologies GmbH Sensor, Kanal und Brennstoffzellensystem
CN115523961B (zh) * 2022-11-03 2023-02-28 南京元感微电子有限公司 一种气体与电容式压力传感器及其加工方法
KR102931649B1 (ko) * 2022-12-20 2026-02-26 주식회사 엠엔텍 열전도식 가스센서
KR102908303B1 (ko) * 2023-03-17 2026-01-05 주식회사 현대케피코 수소가스 센서 장치
WO2025258513A1 (ja) * 2024-06-13 2025-12-18 ローム株式会社 濃度検出装置、および濃度検出方法
CN121027294A (zh) * 2025-10-30 2025-11-28 上海车仪田科技有限公司 用于检测二元气体浓度的气体浓度检测装置

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3182807B2 (ja) * 1991-09-20 2001-07-03 株式会社日立製作所 多機能流体計測伝送装置及びそれを用いた流体量計測制御システム
JPH05273168A (ja) * 1992-03-27 1993-10-22 Hiroaki Ogishima 水分活性測定器
US5263369A (en) * 1992-07-24 1993-11-23 Bear Medical Systems, Inc. Flow sensor system and method
JPH06281607A (ja) * 1993-01-29 1994-10-07 Shimadzu Corp ガス濃度連続分析装置
JP3335860B2 (ja) * 1997-01-16 2002-10-21 株式会社日立製作所 熱式空気流量計用測定素子及び熱式空気流量計
JP2001272370A (ja) * 2000-03-24 2001-10-05 Matsushita Electric Ind Co Ltd ガス濃度測定装置
US6777120B2 (en) * 2001-05-23 2004-08-17 General Motors Corporation Relative humidity sensor with compensation for changes in pressure and gas composition
US7752885B2 (en) * 2006-12-07 2010-07-13 General Electric Company Gas analysis system and method
JP4882732B2 (ja) * 2006-12-22 2012-02-22 株式会社デンソー 半導体装置
JP4940172B2 (ja) * 2008-03-05 2012-05-30 日本特殊陶業株式会社 ＮＯｘセンサ制御装置及び車両側制御装置
JP5279667B2 (ja) * 2008-11-28 2013-09-04 日立オートモティブシステムズ株式会社 熱式空気流量センサ
JP5152097B2 (ja) * 2009-05-08 2013-02-27 株式会社デンソー ガスセンサの信号処理装置
JP5469553B2 (ja) * 2009-07-17 2014-04-16 日本碍子株式会社 アンモニア濃度検出センサ
JP4976469B2 (ja) * 2009-08-28 2012-07-18 日立オートモティブシステムズ株式会社 熱式湿度センサ
JP5406674B2 (ja) * 2009-11-06 2014-02-05 日立オートモティブシステムズ株式会社 熱式流体流量センサおよびその製造方法
EP2336762B1 (de) 2009-12-14 2017-10-18 Siemens Aktiengesellschaft Kohlendioxid-Sensor und zugehöriges Verfahren zur Erzeugung eines Gasmesswerts
JP5519596B2 (ja) 2011-08-08 2014-06-11 日本特殊陶業株式会社 ガスセンサ装置およびガスセンサを用いた濃度測定方法
DE102011089897A1 (de) * 2011-12-23 2013-06-27 Continental Automotive Gmbh Sensorsystem
DE112012006615T5 (de) * 2012-06-27 2015-03-26 Hitachi Automotive Systems, Ltd. Fluidmessvorrichtung
EP2720034B1 (en) * 2012-10-12 2016-04-27 ams International AG Integrated Circuit comprising a relative humidity sensor and a thermal conductivity based gas sensor
US9618653B2 (en) * 2013-03-29 2017-04-11 Stmicroelectronics Pte Ltd. Microelectronic environmental sensing module
US9310349B2 (en) * 2013-12-10 2016-04-12 Continental Automotive Systems, Inc. Sensor structure for EVAP hydrocarbon concentration and flow rate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017083320A (ja) * 2015-10-28 2017-05-18 日立オートモティブシステムズ株式会社 物理量検出装置

Also Published As

Publication number Publication date
CN105492898B (zh) 2018-02-13
US9958305B2 (en) 2018-05-01
CN105492898A (zh) 2016-04-13
JP2015045515A (ja) 2015-03-12
DE112014003909T5 (de) 2016-05-12
US20160202200A1 (en) 2016-07-14
WO2015029460A1 (ja) 2015-03-05

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