JP6021761B2 - ガスセンサ装置 - Google Patents
ガスセンサ装置 Download PDFInfo
- Publication number
- JP6021761B2 JP6021761B2 JP2013175449A JP2013175449A JP6021761B2 JP 6021761 B2 JP6021761 B2 JP 6021761B2 JP 2013175449 A JP2013175449 A JP 2013175449A JP 2013175449 A JP2013175449 A JP 2013175449A JP 6021761 B2 JP6021761 B2 JP 6021761B2
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- pressure
- signal
- sensor element
- concentration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000004044 response Effects 0.000 claims description 54
- 238000012937 correction Methods 0.000 claims description 39
- 238000005259 measurement Methods 0.000 claims description 36
- 239000004065 semiconductor Substances 0.000 claims description 34
- 238000012545 processing Methods 0.000 claims description 30
- 238000010438 heat treatment Methods 0.000 claims description 29
- 238000004891 communication Methods 0.000 claims description 23
- 239000000758 substrate Substances 0.000 claims description 8
- 230000002238 attenuated effect Effects 0.000 claims description 2
- 230000005855 radiation Effects 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 43
- 238000002485 combustion reaction Methods 0.000 description 31
- 238000001514 detection method Methods 0.000 description 25
- 238000000034 method Methods 0.000 description 17
- 239000010408 film Substances 0.000 description 13
- 102100023593 Fibroblast growth factor receptor 1 Human genes 0.000 description 8
- 101000827746 Homo sapiens Fibroblast growth factor receptor 1 Proteins 0.000 description 8
- 230000008859 change Effects 0.000 description 8
- 230000000694 effects Effects 0.000 description 8
- 230000010349 pulsation Effects 0.000 description 8
- 239000011347 resin Substances 0.000 description 7
- 229920005989 resin Polymers 0.000 description 7
- 230000004043 responsiveness Effects 0.000 description 7
- 239000002131 composite material Substances 0.000 description 6
- 238000007789 sealing Methods 0.000 description 6
- 230000007613 environmental effect Effects 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 101000851018 Homo sapiens Vascular endothelial growth factor receptor 1 Proteins 0.000 description 4
- 102100033178 Vascular endothelial growth factor receptor 1 Human genes 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000012935 Averaging Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 239000000446 fuel Substances 0.000 description 3
- 238000001746 injection moulding Methods 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 238000011144 upstream manufacturing Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6845—Micromachined devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
- G01N27/18—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by changes in the thermal conductivity of a surrounding material to be tested
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0062—General constructional details of gas analysers, e.g. portable test equipment concerning the measuring method or the display, e.g. intermittent measurement or digital display
- G01N33/0067—General constructional details of gas analysers, e.g. portable test equipment concerning the measuring method or the display, e.g. intermittent measurement or digital display by measuring the rate of variation of the concentration
Landscapes
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Fluid Mechanics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Pathology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Combustion & Propulsion (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Electrochemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Measuring Volume Flow (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013175449A JP6021761B2 (ja) | 2013-08-27 | 2013-08-27 | ガスセンサ装置 |
| PCT/JP2014/052386 WO2015029460A1 (ja) | 2013-08-27 | 2014-02-03 | ガスセンサ装置 |
| DE112014003909.8T DE112014003909T5 (de) | 2013-08-27 | 2014-02-03 | Gassensorvorrichtung |
| US14/914,231 US9958305B2 (en) | 2013-08-27 | 2014-02-03 | Gas sensor device |
| CN201480047460.8A CN105492898B (zh) | 2013-08-27 | 2014-02-03 | 气体传感器装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013175449A JP6021761B2 (ja) | 2013-08-27 | 2013-08-27 | ガスセンサ装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015045515A JP2015045515A (ja) | 2015-03-12 |
| JP2015045515A5 JP2015045515A5 (enExample) | 2016-03-03 |
| JP6021761B2 true JP6021761B2 (ja) | 2016-11-09 |
Family
ID=52586047
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013175449A Expired - Fee Related JP6021761B2 (ja) | 2013-08-27 | 2013-08-27 | ガスセンサ装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9958305B2 (enExample) |
| JP (1) | JP6021761B2 (enExample) |
| CN (1) | CN105492898B (enExample) |
| DE (1) | DE112014003909T5 (enExample) |
| WO (1) | WO2015029460A1 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017083320A (ja) * | 2015-10-28 | 2017-05-18 | 日立オートモティブシステムズ株式会社 | 物理量検出装置 |
Families Citing this family (45)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6099094B2 (ja) * | 2013-06-21 | 2017-03-22 | 日立オートモティブシステムズ株式会社 | ガスセンサ装置およびガスセンサ装置の取付け構造 |
| US10449320B2 (en) | 2013-10-15 | 2019-10-22 | Fisher & Paykel Healthcare Limited | Sensing and control arrangements for respiratory device |
| JP5826355B1 (ja) * | 2014-10-03 | 2015-12-02 | 三菱電機株式会社 | 流量測定装置 |
| JP6686276B2 (ja) * | 2014-12-09 | 2020-04-22 | 株式会社デンソー | エアフロメータ |
| JP5933782B1 (ja) * | 2015-03-16 | 2016-06-15 | 三菱電機株式会社 | 流量測定装置に一体に設けられた物理量測定装置および物理量測定方法 |
| US10317291B2 (en) * | 2015-08-07 | 2019-06-11 | Brewer Science, Inc. | Environmental sensor system and signal processor |
| JP6641789B2 (ja) | 2015-08-27 | 2020-02-05 | 株式会社デンソー | 空気流量測定装置 |
| DE102015219501A1 (de) * | 2015-10-08 | 2017-04-13 | Robert Bosch Gmbh | Sensorvorrichtung zur Erfassung mindestens einer Strömungseigenschaft eines fluiden Mediums |
| JP6520636B2 (ja) * | 2015-10-16 | 2019-05-29 | 株式会社デンソー | 物理量センササブアセンブリおよび物理量測定装置 |
| JP6501902B2 (ja) * | 2015-10-28 | 2019-04-17 | 日立オートモティブシステムズ株式会社 | 内燃機関制御装置 |
| JP6611694B2 (ja) * | 2015-12-15 | 2019-11-27 | 株式会社堀場製作所 | 排ガス計測システム |
| JP6421763B2 (ja) * | 2016-01-13 | 2018-11-14 | トヨタ自動車株式会社 | 湿度センサの異常検出装置 |
| DE112017001130T5 (de) * | 2016-05-23 | 2018-11-22 | Hitachi Automotive Systems, Ltd. | Feuchtemessvorrichtung |
| GB201609905D0 (en) * | 2016-06-07 | 2016-07-20 | Ge Oil & Gas | Device and system for fluid flow measurement |
| JP6812688B2 (ja) * | 2016-07-20 | 2021-01-13 | 株式会社デンソー | 吸気流量測定装置 |
| KR101839809B1 (ko) | 2016-08-12 | 2018-03-19 | (주)포인트엔지니어링 | 마이크로 센서 |
| DE112017002858T5 (de) * | 2016-08-26 | 2019-02-28 | Hitachi Automotive Systems, Ltd. | Thermisches Feuchtigkeitsmessgerät |
| US10650621B1 (en) | 2016-09-13 | 2020-05-12 | Iocurrents, Inc. | Interfacing with a vehicular controller area network |
| JP6798336B2 (ja) * | 2017-02-08 | 2020-12-09 | 株式会社デンソー | 絶対湿度センサ |
| JP6544365B2 (ja) * | 2017-02-08 | 2019-07-17 | 株式会社デンソー | 絶対湿度センサ |
| JP6811842B2 (ja) * | 2017-03-30 | 2021-01-13 | 三菱電機株式会社 | 換気装置 |
| JP2018179922A (ja) * | 2017-04-21 | 2018-11-15 | 日立オートモティブシステムズ株式会社 | 車載用センサモジュール |
| JP6851466B2 (ja) * | 2017-04-21 | 2021-03-31 | 日立Astemo株式会社 | 湿度測定装置 |
| JP6916667B2 (ja) * | 2017-05-24 | 2021-08-11 | 株式会社堀場製作所 | プローブデバイス、及び、排ガス分析装置 |
| CA3072970C (en) * | 2017-08-14 | 2022-07-12 | Hahn-Schickard-Gesellschaft Fuer Angewandte Forschung E.V. | Sensor assembly comprising a pressure sensor and a thermal gas sensor |
| JP7168340B2 (ja) * | 2018-04-11 | 2022-11-09 | 日立Astemo株式会社 | 熱式流量計 |
| WO2020095619A1 (ja) * | 2018-11-08 | 2020-05-14 | 日立オートモティブシステムズ株式会社 | 熱式湿度測定装置 |
| KR101977196B1 (ko) * | 2018-11-23 | 2019-05-10 | 주식회사 파워맥스 | 통합형 센서 |
| JP7049277B2 (ja) * | 2019-01-11 | 2022-04-06 | 日立Astemo株式会社 | 物理量検出装置 |
| CN109752418B (zh) * | 2019-01-21 | 2021-11-05 | 中国科学院上海微系统与信息技术研究所 | 一种微型热导气体传感器 |
| WO2020234631A1 (en) * | 2019-05-23 | 2020-11-26 | Arcelormittal | A humidity detection equipment of a strip |
| JP2021124472A (ja) * | 2020-02-10 | 2021-08-30 | パナソニックIpマネジメント株式会社 | 複合センサ |
| DE102021111431A1 (de) | 2020-06-29 | 2021-12-30 | Dräger Safety AG & Co. KGaA | Überwachungssystem |
| US12292429B2 (en) | 2020-06-29 | 2025-05-06 | Dräger Safety AG & Co. KGaA | Monitoring system |
| US12478808B2 (en) | 2020-06-29 | 2025-11-25 | Dräger Safety AG & Co. KGaA | Monitoring system |
| US12235144B2 (en) | 2020-09-17 | 2025-02-25 | Applied Materials, Inc.—Robotics | Micro-electromechanical device for use in a flow control apparatus |
| US11772958B2 (en) * | 2020-09-17 | 2023-10-03 | Applied Materials, Inc. | Mass flow control based on micro-electromechanical devices |
| KR102617973B1 (ko) * | 2020-12-08 | 2023-12-27 | (주)리벤씨 | 선박용 이중 연료 엔진 조립체 |
| DE102021206131A1 (de) * | 2021-06-16 | 2022-12-22 | Robert Bosch Gesellschaft mit beschränkter Haftung | Modul und Verfahren zum Überwachen von Umwelteinflüssen auf ein Modul |
| DE102021117778A1 (de) * | 2021-07-09 | 2023-01-12 | Infineon Technologies Ag | Gassensor mit einem sensorelement und einer flammensperre und verwendung desselben für die detektion von gasen |
| KR102641537B1 (ko) * | 2021-12-06 | 2024-02-27 | 주식회사 현대케피코 | 열전도식 가스감지센서 및 이를 이용한 가스 측정방법 |
| CN114485822A (zh) * | 2021-12-30 | 2022-05-13 | 北京恒合信业技术股份有限公司 | 一种流量检测装置及流量检测方法 |
| DE102022208864B4 (de) * | 2022-08-26 | 2025-03-20 | Vitesco Technologies GmbH | Sensor, Kanal und Brennstoffzellensystem |
| CN115523961B (zh) * | 2022-11-03 | 2023-02-28 | 南京元感微电子有限公司 | 一种气体与电容式压力传感器及其加工方法 |
| KR20240097640A (ko) * | 2022-12-20 | 2024-06-27 | 주식회사 엠엔텍 | 열전도식 가스센서 |
Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3182807B2 (ja) * | 1991-09-20 | 2001-07-03 | 株式会社日立製作所 | 多機能流体計測伝送装置及びそれを用いた流体量計測制御システム |
| JPH05273168A (ja) * | 1992-03-27 | 1993-10-22 | Hiroaki Ogishima | 水分活性測定器 |
| US5263369A (en) * | 1992-07-24 | 1993-11-23 | Bear Medical Systems, Inc. | Flow sensor system and method |
| JPH06281607A (ja) * | 1993-01-29 | 1994-10-07 | Shimadzu Corp | ガス濃度連続分析装置 |
| JP3335860B2 (ja) * | 1997-01-16 | 2002-10-21 | 株式会社日立製作所 | 熱式空気流量計用測定素子及び熱式空気流量計 |
| JP2001272370A (ja) * | 2000-03-24 | 2001-10-05 | Matsushita Electric Ind Co Ltd | ガス濃度測定装置 |
| US6777120B2 (en) * | 2001-05-23 | 2004-08-17 | General Motors Corporation | Relative humidity sensor with compensation for changes in pressure and gas composition |
| US7752885B2 (en) * | 2006-12-07 | 2010-07-13 | General Electric Company | Gas analysis system and method |
| JP4882732B2 (ja) * | 2006-12-22 | 2012-02-22 | 株式会社デンソー | 半導体装置 |
| JP4940172B2 (ja) * | 2008-03-05 | 2012-05-30 | 日本特殊陶業株式会社 | NOxセンサ制御装置及び車両側制御装置 |
| JP5279667B2 (ja) * | 2008-11-28 | 2013-09-04 | 日立オートモティブシステムズ株式会社 | 熱式空気流量センサ |
| JP5152097B2 (ja) * | 2009-05-08 | 2013-02-27 | 株式会社デンソー | ガスセンサの信号処理装置 |
| JP5469553B2 (ja) * | 2009-07-17 | 2014-04-16 | 日本碍子株式会社 | アンモニア濃度検出センサ |
| JP4976469B2 (ja) * | 2009-08-28 | 2012-07-18 | 日立オートモティブシステムズ株式会社 | 熱式湿度センサ |
| JP5406674B2 (ja) * | 2009-11-06 | 2014-02-05 | 日立オートモティブシステムズ株式会社 | 熱式流体流量センサおよびその製造方法 |
| EP2336762B1 (de) | 2009-12-14 | 2017-10-18 | Siemens Aktiengesellschaft | Kohlendioxid-Sensor und zugehöriges Verfahren zur Erzeugung eines Gasmesswerts |
| JP5519596B2 (ja) | 2011-08-08 | 2014-06-11 | 日本特殊陶業株式会社 | ガスセンサ装置およびガスセンサを用いた濃度測定方法 |
| DE102011089897A1 (de) * | 2011-12-23 | 2013-06-27 | Continental Automotive Gmbh | Sensorsystem |
| CN104412076B (zh) * | 2012-06-27 | 2017-06-13 | 日立汽车系统株式会社 | 流体测量装置 |
| EP2720034B1 (en) * | 2012-10-12 | 2016-04-27 | ams International AG | Integrated Circuit comprising a relative humidity sensor and a thermal conductivity based gas sensor |
| US9618653B2 (en) * | 2013-03-29 | 2017-04-11 | Stmicroelectronics Pte Ltd. | Microelectronic environmental sensing module |
| US9310349B2 (en) * | 2013-12-10 | 2016-04-12 | Continental Automotive Systems, Inc. | Sensor structure for EVAP hydrocarbon concentration and flow rate |
-
2013
- 2013-08-27 JP JP2013175449A patent/JP6021761B2/ja not_active Expired - Fee Related
-
2014
- 2014-02-03 CN CN201480047460.8A patent/CN105492898B/zh not_active Expired - Fee Related
- 2014-02-03 DE DE112014003909.8T patent/DE112014003909T5/de not_active Ceased
- 2014-02-03 US US14/914,231 patent/US9958305B2/en active Active
- 2014-02-03 WO PCT/JP2014/052386 patent/WO2015029460A1/ja not_active Ceased
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017083320A (ja) * | 2015-10-28 | 2017-05-18 | 日立オートモティブシステムズ株式会社 | 物理量検出装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE112014003909T5 (de) | 2016-05-12 |
| US20160202200A1 (en) | 2016-07-14 |
| WO2015029460A1 (ja) | 2015-03-05 |
| CN105492898B (zh) | 2018-02-13 |
| JP2015045515A (ja) | 2015-03-12 |
| US9958305B2 (en) | 2018-05-01 |
| CN105492898A (zh) | 2016-04-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6021761B2 (ja) | ガスセンサ装置 | |
| CN100557432C (zh) | 湿度传感器和具有湿度检测功能的组合传感器 | |
| JP3335860B2 (ja) | 熱式空気流量計用測定素子及び熱式空気流量計 | |
| JP5883887B2 (ja) | 流量計測装置 | |
| JP5743871B2 (ja) | 熱式流量計 | |
| JP6686276B2 (ja) | エアフロメータ | |
| JP4558647B2 (ja) | 熱式流体流量計 | |
| JP2012220189A (ja) | 熱式空気流量計 | |
| US8935959B2 (en) | Thermal type flow rate sensor | |
| JP6043833B2 (ja) | 熱式流量計 | |
| JP5152292B2 (ja) | 流量計測装置 | |
| JP2007024589A (ja) | 気体流量計測装置 | |
| JP5644674B2 (ja) | 熱式流量測定装置 | |
| JP6458104B2 (ja) | 熱式流量計 | |
| JP6134840B2 (ja) | 熱式流量計 | |
| JP5120289B2 (ja) | 空気流量測定装置 | |
| JP6739525B2 (ja) | 湿度測定装置 | |
| JP6215502B2 (ja) | 熱式流量計 | |
| JP6784316B2 (ja) | エアフロメータ | |
| JP5218384B2 (ja) | 空気流量測定装置 | |
| JP6952577B2 (ja) | 気体センサ装置 | |
| JP2020003440A (ja) | 熱式流量測定装置 | |
| JP4914226B2 (ja) | 気体流量計 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20160115 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20160115 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20160628 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20160720 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20160920 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20161004 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 6021761 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| LAPS | Cancellation because of no payment of annual fees |