JP6021761B2 - ガスセンサ装置 - Google Patents

ガスセンサ装置 Download PDF

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Publication number
JP6021761B2
JP6021761B2 JP2013175449A JP2013175449A JP6021761B2 JP 6021761 B2 JP6021761 B2 JP 6021761B2 JP 2013175449 A JP2013175449 A JP 2013175449A JP 2013175449 A JP2013175449 A JP 2013175449A JP 6021761 B2 JP6021761 B2 JP 6021761B2
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JP
Japan
Prior art keywords
sensor
pressure
signal
sensor element
concentration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2013175449A
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English (en)
Japanese (ja)
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JP2015045515A5 (enExample
JP2015045515A (ja
Inventor
中野 洋
洋 中野
松本 昌大
昌大 松本
哲 浅野
哲 浅野
忍 田代
忍 田代
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Astemo Ltd
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Hitachi Automotive Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Hitachi Automotive Systems Ltd filed Critical Hitachi Automotive Systems Ltd
Priority to JP2013175449A priority Critical patent/JP6021761B2/ja
Priority to PCT/JP2014/052386 priority patent/WO2015029460A1/ja
Priority to DE112014003909.8T priority patent/DE112014003909T5/de
Priority to US14/914,231 priority patent/US9958305B2/en
Priority to CN201480047460.8A priority patent/CN105492898B/zh
Publication of JP2015045515A publication Critical patent/JP2015045515A/ja
Publication of JP2015045515A5 publication Critical patent/JP2015045515A5/ja
Application granted granted Critical
Publication of JP6021761B2 publication Critical patent/JP6021761B2/ja
Expired - Fee Related legal-status Critical Current
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696Circuits therefor, e.g. constant-current flow meters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845Micromachined devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/14Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
    • G01N27/18Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by changes in the thermal conductivity of a surrounding material to be tested
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004Gaseous mixtures, e.g. polluted air
    • G01N33/0009General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0062General constructional details of gas analysers, e.g. portable test equipment concerning the measuring method or the display, e.g. intermittent measurement or digital display
    • G01N33/0067General constructional details of gas analysers, e.g. portable test equipment concerning the measuring method or the display, e.g. intermittent measurement or digital display by measuring the rate of variation of the concentration

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  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Fluid Mechanics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Combustion & Propulsion (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measuring Volume Flow (AREA)
JP2013175449A 2013-08-27 2013-08-27 ガスセンサ装置 Expired - Fee Related JP6021761B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2013175449A JP6021761B2 (ja) 2013-08-27 2013-08-27 ガスセンサ装置
PCT/JP2014/052386 WO2015029460A1 (ja) 2013-08-27 2014-02-03 ガスセンサ装置
DE112014003909.8T DE112014003909T5 (de) 2013-08-27 2014-02-03 Gassensorvorrichtung
US14/914,231 US9958305B2 (en) 2013-08-27 2014-02-03 Gas sensor device
CN201480047460.8A CN105492898B (zh) 2013-08-27 2014-02-03 气体传感器装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013175449A JP6021761B2 (ja) 2013-08-27 2013-08-27 ガスセンサ装置

Publications (3)

Publication Number Publication Date
JP2015045515A JP2015045515A (ja) 2015-03-12
JP2015045515A5 JP2015045515A5 (enExample) 2016-03-03
JP6021761B2 true JP6021761B2 (ja) 2016-11-09

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013175449A Expired - Fee Related JP6021761B2 (ja) 2013-08-27 2013-08-27 ガスセンサ装置

Country Status (5)

Country Link
US (1) US9958305B2 (enExample)
JP (1) JP6021761B2 (enExample)
CN (1) CN105492898B (enExample)
DE (1) DE112014003909T5 (enExample)
WO (1) WO2015029460A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017083320A (ja) * 2015-10-28 2017-05-18 日立オートモティブシステムズ株式会社 物理量検出装置

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JP6099094B2 (ja) * 2013-06-21 2017-03-22 日立オートモティブシステムズ株式会社 ガスセンサ装置およびガスセンサ装置の取付け構造
US10449320B2 (en) 2013-10-15 2019-10-22 Fisher & Paykel Healthcare Limited Sensing and control arrangements for respiratory device
JP5826355B1 (ja) * 2014-10-03 2015-12-02 三菱電機株式会社 流量測定装置
JP6686276B2 (ja) * 2014-12-09 2020-04-22 株式会社デンソー エアフロメータ
JP5933782B1 (ja) * 2015-03-16 2016-06-15 三菱電機株式会社 流量測定装置に一体に設けられた物理量測定装置および物理量測定方法
US10317291B2 (en) * 2015-08-07 2019-06-11 Brewer Science, Inc. Environmental sensor system and signal processor
JP6641789B2 (ja) 2015-08-27 2020-02-05 株式会社デンソー 空気流量測定装置
DE102015219501A1 (de) * 2015-10-08 2017-04-13 Robert Bosch Gmbh Sensorvorrichtung zur Erfassung mindestens einer Strömungseigenschaft eines fluiden Mediums
JP6520636B2 (ja) * 2015-10-16 2019-05-29 株式会社デンソー 物理量センササブアセンブリおよび物理量測定装置
JP6501902B2 (ja) * 2015-10-28 2019-04-17 日立オートモティブシステムズ株式会社 内燃機関制御装置
JP6611694B2 (ja) * 2015-12-15 2019-11-27 株式会社堀場製作所 排ガス計測システム
JP6421763B2 (ja) * 2016-01-13 2018-11-14 トヨタ自動車株式会社 湿度センサの異常検出装置
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JP6544365B2 (ja) * 2017-02-08 2019-07-17 株式会社デンソー 絶対湿度センサ
JP6811842B2 (ja) * 2017-03-30 2021-01-13 三菱電機株式会社 換気装置
JP2018179922A (ja) * 2017-04-21 2018-11-15 日立オートモティブシステムズ株式会社 車載用センサモジュール
JP6851466B2 (ja) * 2017-04-21 2021-03-31 日立Astemo株式会社 湿度測定装置
JP6916667B2 (ja) * 2017-05-24 2021-08-11 株式会社堀場製作所 プローブデバイス、及び、排ガス分析装置
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JP7168340B2 (ja) * 2018-04-11 2022-11-09 日立Astemo株式会社 熱式流量計
WO2020095619A1 (ja) * 2018-11-08 2020-05-14 日立オートモティブシステムズ株式会社 熱式湿度測定装置
KR101977196B1 (ko) * 2018-11-23 2019-05-10 주식회사 파워맥스 통합형 센서
JP7049277B2 (ja) * 2019-01-11 2022-04-06 日立Astemo株式会社 物理量検出装置
CN109752418B (zh) * 2019-01-21 2021-11-05 中国科学院上海微系统与信息技术研究所 一种微型热导气体传感器
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JP2021124472A (ja) * 2020-02-10 2021-08-30 パナソニックIpマネジメント株式会社 複合センサ
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US11772958B2 (en) * 2020-09-17 2023-10-03 Applied Materials, Inc. Mass flow control based on micro-electromechanical devices
KR102617973B1 (ko) * 2020-12-08 2023-12-27 (주)리벤씨 선박용 이중 연료 엔진 조립체
DE102021206131A1 (de) * 2021-06-16 2022-12-22 Robert Bosch Gesellschaft mit beschränkter Haftung Modul und Verfahren zum Überwachen von Umwelteinflüssen auf ein Modul
DE102021117778A1 (de) * 2021-07-09 2023-01-12 Infineon Technologies Ag Gassensor mit einem sensorelement und einer flammensperre und verwendung desselben für die detektion von gasen
KR102641537B1 (ko) * 2021-12-06 2024-02-27 주식회사 현대케피코 열전도식 가스감지센서 및 이를 이용한 가스 측정방법
CN114485822A (zh) * 2021-12-30 2022-05-13 北京恒合信业技术股份有限公司 一种流量检测装置及流量检测方法
DE102022208864B4 (de) * 2022-08-26 2025-03-20 Vitesco Technologies GmbH Sensor, Kanal und Brennstoffzellensystem
CN115523961B (zh) * 2022-11-03 2023-02-28 南京元感微电子有限公司 一种气体与电容式压力传感器及其加工方法
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Publication number Priority date Publication date Assignee Title
JP2017083320A (ja) * 2015-10-28 2017-05-18 日立オートモティブシステムズ株式会社 物理量検出装置

Also Published As

Publication number Publication date
DE112014003909T5 (de) 2016-05-12
US20160202200A1 (en) 2016-07-14
WO2015029460A1 (ja) 2015-03-05
CN105492898B (zh) 2018-02-13
JP2015045515A (ja) 2015-03-12
US9958305B2 (en) 2018-05-01
CN105492898A (zh) 2016-04-13

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