CN105492898B - 气体传感器装置 - Google Patents
气体传感器装置 Download PDFInfo
- Publication number
- CN105492898B CN105492898B CN201480047460.8A CN201480047460A CN105492898B CN 105492898 B CN105492898 B CN 105492898B CN 201480047460 A CN201480047460 A CN 201480047460A CN 105492898 B CN105492898 B CN 105492898B
- Authority
- CN
- China
- Prior art keywords
- pressure
- sensor
- gas
- signal
- concentration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6845—Micromachined devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
- G01N27/18—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by changes in the thermal conductivity of a surrounding material to be tested
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0062—General constructional details of gas analysers, e.g. portable test equipment concerning the measuring method or the display, e.g. intermittent measurement or digital display
- G01N33/0067—General constructional details of gas analysers, e.g. portable test equipment concerning the measuring method or the display, e.g. intermittent measurement or digital display by measuring the rate of variation of the concentration
Landscapes
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Fluid Mechanics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Combustion & Propulsion (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Measuring Volume Flow (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013-175449 | 2013-08-27 | ||
| JP2013175449A JP6021761B2 (ja) | 2013-08-27 | 2013-08-27 | ガスセンサ装置 |
| PCT/JP2014/052386 WO2015029460A1 (ja) | 2013-08-27 | 2014-02-03 | ガスセンサ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105492898A CN105492898A (zh) | 2016-04-13 |
| CN105492898B true CN105492898B (zh) | 2018-02-13 |
Family
ID=52586047
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201480047460.8A Expired - Fee Related CN105492898B (zh) | 2013-08-27 | 2014-02-03 | 气体传感器装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9958305B2 (enExample) |
| JP (1) | JP6021761B2 (enExample) |
| CN (1) | CN105492898B (enExample) |
| DE (1) | DE112014003909T5 (enExample) |
| WO (1) | WO2015029460A1 (enExample) |
Families Citing this family (46)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6099094B2 (ja) * | 2013-06-21 | 2017-03-22 | 日立オートモティブシステムズ株式会社 | ガスセンサ装置およびガスセンサ装置の取付け構造 |
| US10449320B2 (en) | 2013-10-15 | 2019-10-22 | Fisher & Paykel Healthcare Limited | Sensing and control arrangements for respiratory device |
| JP5826355B1 (ja) * | 2014-10-03 | 2015-12-02 | 三菱電機株式会社 | 流量測定装置 |
| JP6686276B2 (ja) * | 2014-12-09 | 2020-04-22 | 株式会社デンソー | エアフロメータ |
| JP5933782B1 (ja) * | 2015-03-16 | 2016-06-15 | 三菱電機株式会社 | 流量測定装置に一体に設けられた物理量測定装置および物理量測定方法 |
| US10317291B2 (en) * | 2015-08-07 | 2019-06-11 | Brewer Science, Inc. | Environmental sensor system and signal processor |
| JP6641789B2 (ja) | 2015-08-27 | 2020-02-05 | 株式会社デンソー | 空気流量測定装置 |
| DE102015219501A1 (de) * | 2015-10-08 | 2017-04-13 | Robert Bosch Gmbh | Sensorvorrichtung zur Erfassung mindestens einer Strömungseigenschaft eines fluiden Mediums |
| JP6520636B2 (ja) * | 2015-10-16 | 2019-05-29 | 株式会社デンソー | 物理量センササブアセンブリおよび物理量測定装置 |
| JP6474342B2 (ja) * | 2015-10-28 | 2019-02-27 | 日立オートモティブシステムズ株式会社 | 物理量検出装置 |
| JP6501902B2 (ja) * | 2015-10-28 | 2019-04-17 | 日立オートモティブシステムズ株式会社 | 内燃機関制御装置 |
| JP6611694B2 (ja) * | 2015-12-15 | 2019-11-27 | 株式会社堀場製作所 | 排ガス計測システム |
| JP6421763B2 (ja) * | 2016-01-13 | 2018-11-14 | トヨタ自動車株式会社 | 湿度センサの異常検出装置 |
| DE112017001130T5 (de) * | 2016-05-23 | 2018-11-22 | Hitachi Automotive Systems, Ltd. | Feuchtemessvorrichtung |
| GB201609905D0 (en) * | 2016-06-07 | 2016-07-20 | Ge Oil & Gas | Device and system for fluid flow measurement |
| JP6812688B2 (ja) * | 2016-07-20 | 2021-01-13 | 株式会社デンソー | 吸気流量測定装置 |
| KR101839809B1 (ko) | 2016-08-12 | 2018-03-19 | (주)포인트엔지니어링 | 마이크로 센서 |
| DE112017002858T5 (de) * | 2016-08-26 | 2019-02-28 | Hitachi Automotive Systems, Ltd. | Thermisches Feuchtigkeitsmessgerät |
| US10650621B1 (en) | 2016-09-13 | 2020-05-12 | Iocurrents, Inc. | Interfacing with a vehicular controller area network |
| JP6798336B2 (ja) * | 2017-02-08 | 2020-12-09 | 株式会社デンソー | 絶対湿度センサ |
| JP6544365B2 (ja) * | 2017-02-08 | 2019-07-17 | 株式会社デンソー | 絶対湿度センサ |
| JP6811842B2 (ja) * | 2017-03-30 | 2021-01-13 | 三菱電機株式会社 | 換気装置 |
| JP2018179922A (ja) * | 2017-04-21 | 2018-11-15 | 日立オートモティブシステムズ株式会社 | 車載用センサモジュール |
| JP6851466B2 (ja) * | 2017-04-21 | 2021-03-31 | 日立Astemo株式会社 | 湿度測定装置 |
| JP6916667B2 (ja) * | 2017-05-24 | 2021-08-11 | 株式会社堀場製作所 | プローブデバイス、及び、排ガス分析装置 |
| CA3072970C (en) * | 2017-08-14 | 2022-07-12 | Hahn-Schickard-Gesellschaft Fuer Angewandte Forschung E.V. | Sensor assembly comprising a pressure sensor and a thermal gas sensor |
| JP7168340B2 (ja) * | 2018-04-11 | 2022-11-09 | 日立Astemo株式会社 | 熱式流量計 |
| WO2020095619A1 (ja) * | 2018-11-08 | 2020-05-14 | 日立オートモティブシステムズ株式会社 | 熱式湿度測定装置 |
| KR101977196B1 (ko) * | 2018-11-23 | 2019-05-10 | 주식회사 파워맥스 | 통합형 센서 |
| JP7049277B2 (ja) * | 2019-01-11 | 2022-04-06 | 日立Astemo株式会社 | 物理量検出装置 |
| CN109752418B (zh) * | 2019-01-21 | 2021-11-05 | 中国科学院上海微系统与信息技术研究所 | 一种微型热导气体传感器 |
| WO2020234631A1 (en) * | 2019-05-23 | 2020-11-26 | Arcelormittal | A humidity detection equipment of a strip |
| JP2021124472A (ja) * | 2020-02-10 | 2021-08-30 | パナソニックIpマネジメント株式会社 | 複合センサ |
| DE102021111431A1 (de) | 2020-06-29 | 2021-12-30 | Dräger Safety AG & Co. KGaA | Überwachungssystem |
| US12292429B2 (en) | 2020-06-29 | 2025-05-06 | Dräger Safety AG & Co. KGaA | Monitoring system |
| US12478808B2 (en) | 2020-06-29 | 2025-11-25 | Dräger Safety AG & Co. KGaA | Monitoring system |
| US12235144B2 (en) | 2020-09-17 | 2025-02-25 | Applied Materials, Inc.—Robotics | Micro-electromechanical device for use in a flow control apparatus |
| US11772958B2 (en) * | 2020-09-17 | 2023-10-03 | Applied Materials, Inc. | Mass flow control based on micro-electromechanical devices |
| KR102617973B1 (ko) * | 2020-12-08 | 2023-12-27 | (주)리벤씨 | 선박용 이중 연료 엔진 조립체 |
| DE102021206131A1 (de) * | 2021-06-16 | 2022-12-22 | Robert Bosch Gesellschaft mit beschränkter Haftung | Modul und Verfahren zum Überwachen von Umwelteinflüssen auf ein Modul |
| DE102021117778A1 (de) * | 2021-07-09 | 2023-01-12 | Infineon Technologies Ag | Gassensor mit einem sensorelement und einer flammensperre und verwendung desselben für die detektion von gasen |
| KR102641537B1 (ko) * | 2021-12-06 | 2024-02-27 | 주식회사 현대케피코 | 열전도식 가스감지센서 및 이를 이용한 가스 측정방법 |
| CN114485822A (zh) * | 2021-12-30 | 2022-05-13 | 北京恒合信业技术股份有限公司 | 一种流量检测装置及流量检测方法 |
| DE102022208864B4 (de) * | 2022-08-26 | 2025-03-20 | Vitesco Technologies GmbH | Sensor, Kanal und Brennstoffzellensystem |
| CN115523961B (zh) * | 2022-11-03 | 2023-02-28 | 南京元感微电子有限公司 | 一种气体与电容式压力传感器及其加工方法 |
| KR20240097640A (ko) * | 2022-12-20 | 2024-06-27 | 주식회사 엠엔텍 | 열전도식 가스센서 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002373694A (ja) * | 2001-05-23 | 2002-12-26 | General Motors Corp <Gm> | 圧力及びガス組成の変化に関して補償する相対湿度センサ |
| JP2010151795A (ja) * | 2008-11-28 | 2010-07-08 | Hitachi Automotive Systems Ltd | 熱式空気流量センサ |
| CN102128870A (zh) * | 2009-12-14 | 2011-07-20 | 西门子公司 | 二氧化碳传感器和用于产生气体测量值的对应方法 |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3182807B2 (ja) * | 1991-09-20 | 2001-07-03 | 株式会社日立製作所 | 多機能流体計測伝送装置及びそれを用いた流体量計測制御システム |
| JPH05273168A (ja) * | 1992-03-27 | 1993-10-22 | Hiroaki Ogishima | 水分活性測定器 |
| US5263369A (en) * | 1992-07-24 | 1993-11-23 | Bear Medical Systems, Inc. | Flow sensor system and method |
| JPH06281607A (ja) * | 1993-01-29 | 1994-10-07 | Shimadzu Corp | ガス濃度連続分析装置 |
| JP3335860B2 (ja) * | 1997-01-16 | 2002-10-21 | 株式会社日立製作所 | 熱式空気流量計用測定素子及び熱式空気流量計 |
| JP2001272370A (ja) * | 2000-03-24 | 2001-10-05 | Matsushita Electric Ind Co Ltd | ガス濃度測定装置 |
| US7752885B2 (en) * | 2006-12-07 | 2010-07-13 | General Electric Company | Gas analysis system and method |
| JP4882732B2 (ja) * | 2006-12-22 | 2012-02-22 | 株式会社デンソー | 半導体装置 |
| JP4940172B2 (ja) * | 2008-03-05 | 2012-05-30 | 日本特殊陶業株式会社 | NOxセンサ制御装置及び車両側制御装置 |
| JP5152097B2 (ja) * | 2009-05-08 | 2013-02-27 | 株式会社デンソー | ガスセンサの信号処理装置 |
| JP5469553B2 (ja) * | 2009-07-17 | 2014-04-16 | 日本碍子株式会社 | アンモニア濃度検出センサ |
| JP4976469B2 (ja) * | 2009-08-28 | 2012-07-18 | 日立オートモティブシステムズ株式会社 | 熱式湿度センサ |
| JP5406674B2 (ja) * | 2009-11-06 | 2014-02-05 | 日立オートモティブシステムズ株式会社 | 熱式流体流量センサおよびその製造方法 |
| JP5519596B2 (ja) | 2011-08-08 | 2014-06-11 | 日本特殊陶業株式会社 | ガスセンサ装置およびガスセンサを用いた濃度測定方法 |
| DE102011089897A1 (de) * | 2011-12-23 | 2013-06-27 | Continental Automotive Gmbh | Sensorsystem |
| CN104412076B (zh) * | 2012-06-27 | 2017-06-13 | 日立汽车系统株式会社 | 流体测量装置 |
| EP2720034B1 (en) * | 2012-10-12 | 2016-04-27 | ams International AG | Integrated Circuit comprising a relative humidity sensor and a thermal conductivity based gas sensor |
| US9618653B2 (en) * | 2013-03-29 | 2017-04-11 | Stmicroelectronics Pte Ltd. | Microelectronic environmental sensing module |
| US9310349B2 (en) * | 2013-12-10 | 2016-04-12 | Continental Automotive Systems, Inc. | Sensor structure for EVAP hydrocarbon concentration and flow rate |
-
2013
- 2013-08-27 JP JP2013175449A patent/JP6021761B2/ja not_active Expired - Fee Related
-
2014
- 2014-02-03 CN CN201480047460.8A patent/CN105492898B/zh not_active Expired - Fee Related
- 2014-02-03 DE DE112014003909.8T patent/DE112014003909T5/de not_active Ceased
- 2014-02-03 US US14/914,231 patent/US9958305B2/en active Active
- 2014-02-03 WO PCT/JP2014/052386 patent/WO2015029460A1/ja not_active Ceased
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002373694A (ja) * | 2001-05-23 | 2002-12-26 | General Motors Corp <Gm> | 圧力及びガス組成の変化に関して補償する相対湿度センサ |
| JP2010151795A (ja) * | 2008-11-28 | 2010-07-08 | Hitachi Automotive Systems Ltd | 熱式空気流量センサ |
| CN102128870A (zh) * | 2009-12-14 | 2011-07-20 | 西门子公司 | 二氧化碳传感器和用于产生气体测量值的对应方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6021761B2 (ja) | 2016-11-09 |
| DE112014003909T5 (de) | 2016-05-12 |
| US20160202200A1 (en) | 2016-07-14 |
| WO2015029460A1 (ja) | 2015-03-05 |
| JP2015045515A (ja) | 2015-03-12 |
| US9958305B2 (en) | 2018-05-01 |
| CN105492898A (zh) | 2016-04-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: Ibaraki Patentee after: Hitachi astemo Co.,Ltd. Address before: Ibaraki Patentee before: HITACHI AUTOMOTIVE SYSTEMS, Ltd. |
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| CP01 | Change in the name or title of a patent holder | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180213 |
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| CF01 | Termination of patent right due to non-payment of annual fee |