JP6008661B2 - GaN系結晶及び半導体素子の製造方法 - Google Patents
GaN系結晶及び半導体素子の製造方法 Download PDFInfo
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- 239000013078 crystal Substances 0.000 title claims description 135
- 238000004519 manufacturing process Methods 0.000 title claims description 22
- 238000000034 method Methods 0.000 title claims description 16
- 239000004065 semiconductor Substances 0.000 title description 9
- 239000000758 substrate Substances 0.000 claims description 59
- 229910052984 zinc sulfide Inorganic materials 0.000 claims description 32
- WGPCGCOKHWGKJJ-UHFFFAOYSA-N sulfanylidenezinc Chemical compound [Zn]=S WGPCGCOKHWGKJJ-UHFFFAOYSA-N 0.000 claims description 31
- 238000005530 etching Methods 0.000 claims description 10
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 4
- 229910052725 zinc Inorganic materials 0.000 claims description 4
- 239000011701 zinc Substances 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 30
- HDZGCSFEDULWCS-UHFFFAOYSA-N monomethylhydrazine Chemical compound CNN HDZGCSFEDULWCS-UHFFFAOYSA-N 0.000 description 13
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 13
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 12
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 10
- 238000002109 crystal growth method Methods 0.000 description 9
- 238000005253 cladding Methods 0.000 description 7
- 238000000151 deposition Methods 0.000 description 7
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 6
- 239000012298 atmosphere Substances 0.000 description 6
- 239000001257 hydrogen Substances 0.000 description 6
- 229910052739 hydrogen Inorganic materials 0.000 description 6
- 239000012299 nitrogen atmosphere Substances 0.000 description 6
- 239000000243 solution Substances 0.000 description 6
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 5
- IBEFSUTVZWZJEL-UHFFFAOYSA-N trimethylindium Chemical compound C[In](C)C IBEFSUTVZWZJEL-UHFFFAOYSA-N 0.000 description 5
- 229910002704 AlGaN Inorganic materials 0.000 description 4
- 238000000137 annealing Methods 0.000 description 4
- 239000011777 magnesium Substances 0.000 description 4
- 239000000395 magnesium oxide Substances 0.000 description 4
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 4
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 4
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- 239000011259 mixed solution Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- FAIAAWCVCHQXDN-UHFFFAOYSA-N phosphorus trichloride Chemical compound ClP(Cl)Cl FAIAAWCVCHQXDN-UHFFFAOYSA-N 0.000 description 2
- 230000035755 proliferation Effects 0.000 description 2
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 2
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000740 bleeding effect Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
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Description
以上の実施例1のGaN系結晶の成長方法においては、Pをドープしたn型のSi基板10は(100)方位であり、6度のオフ基板を用いた。ここで、基板の傾斜角(オフ角)を調整することにより、BP結晶膜上にIn含有層を介して成長させたGaN系結晶の転位密度を測定したところ、図3のとおりとなった。図3において、縦軸はGaN系結晶の転位密度であり、横軸はSi基板のオフ角である。図から理解されるとおり、オフ角が0°のSi基板を用いると、転位密度は1010cm-2であったが、オフ角が3°を超えると急激に転位密度が106cm-2程度まで小さくなり、オフ角が23°を超えると再び転位密度が上昇する。なお、オフ角が23°を超えると、成長表面に凸凹が生じる。したがって、基板のオフ角は3°以上23°以下が望ましい。なお、転位密度の観点から最適なオフ角は6°以上10°以下である。
以上の実施例2のGaN系結晶の成長方法においては、InGaN層121の上にGaN層13を形成したが、成長開始時にInxGa1−xN層(xを0.15以上とする。)から成長を行い、成長にしたがって、Inの量を減らしてゆくことも可能である。ただし、成長温度は700℃以下、例えば650℃程度で行う必要がある。成長温度が高いと十分な量のInが導入されないからである。
以上の実施例1乃至5のGaN系結晶の成長方法において、BP結晶膜11は、比較的高濃度のSiを含有することが望ましい。Siとボロンとの原子結合は非常に強固であり、この部分の存在によって、BP結晶膜11内で発生した転位の拡張、増殖が抑えられるからであると考えられる。Si濃度は、1017cm−3以上1021cm−3以下であることが望ましい。Si濃度が1017cm−3以下だと、成長後のGaN系結晶の転位密度が上昇してしまう。Si濃度が1021cm−3以上だと、成長後のGaN系結晶の表面の凹凸が見られる。
以上の実施例1乃至5のGaN系結晶の成長方法においては、BP結晶膜11を形成した状態のSi基板10を大気中に出すことなく、窒素雰囲気中のままで、別の反応炉に移し、その後、基板温度を1100℃まで上昇させて表面を水素で5分間処理した。
11 ・・・ BP結晶膜
12 ・・・ In膜
13、14 ・・・ GaN膜
Claims (10)
- Si基板上に、閃亜鉛鉱型のBP結晶層を形成し、
前記BP結晶層上にInを含む層を閃亜鉛鉱型の結晶構造を維持する厚さで形成し、
前記Inを含む層の上に閃亜鉛鉱型のGaN系結晶層を形成する
ことを特徴とするGaN系結晶の製造方法。 - 前記Inを含む層は、4原子層以内の金属In層であることを特徴とする請求項1記載のGaN系結晶の製造方法。
- 前記Inを含む層は、膜厚が2nm以内のInGaN層であることを特徴とする請求項1記載のGaN系結晶の製造方法。
- 前記Inを含む層は、4原子層以内のInAl混合層であり、Alの含有量が10%以下であることを特徴とする請求項1記載のGaN系結晶の製造方法。
- 前記Inを含む層は、膜厚が2nm以内のAlInGaN層であり、Alの含有量が10%以下であることを特徴とする請求項1記載のGaN系結晶の製造方法。
- 前記Inを含む層は、AlxInyGa1-x-yN層とAlx'Iny'Ga1-x'-y'N層を繰り返し堆積させた超格子構造の層であることを特徴とする請求項1記載のGaN系結晶の製造方法。
- 前記Si基板は、(100)方位からのオフ角が3°以上23°以下であることを特徴とする請求項1記載のGaN系結晶の製造方法。
- 前記BP結晶層のSi濃度は1017cm-3以上1021cm-3以下であることを特徴とする請求項1記載のGaN系結晶の製造方法。
- Si基板上に、Si濃度が1017cm-3以上1021cm-3以下である閃亜鉛鉱型のBP結晶層を形成し、
前記BP結晶層よりも上方に閃亜鉛鉱型のGaN系結晶層を形成する
ことを特徴とするGaN系結晶の製造方法。 - 請求項1又は9のいずれか記載の製造方法により製造されたGaN系結晶より、前記BP結晶層をエッチングストッパーとして用い、前記Si基板を除去することを特徴とする発光デバイスの製造方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012188461A JP6008661B2 (ja) | 2012-08-29 | 2012-08-29 | GaN系結晶及び半導体素子の製造方法 |
DE112013004283.5T DE112013004283T5 (de) | 2012-08-29 | 2013-08-27 | Verfahren zum Herstellen eines GaN-Kristalls und eines Halbleiterelements |
GB1503010.9A GB2519895B (en) | 2012-08-29 | 2013-08-27 | Method for producing GaN-based crystal and semiconductor device |
PCT/JP2013/072922 WO2014034687A1 (ja) | 2012-08-29 | 2013-08-27 | GaN系結晶及び半導体素子の製造方法 |
US14/629,063 US9595632B2 (en) | 2012-08-29 | 2015-02-23 | Method for producing GaN-based crystal and semiconductor device |
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GB2519895A (en) | 2015-05-06 |
WO2014034687A1 (ja) | 2014-03-06 |
US9595632B2 (en) | 2017-03-14 |
DE112013004283T5 (de) | 2015-05-13 |
GB2519895B (en) | 2018-01-17 |
JP2014049461A (ja) | 2014-03-17 |
GB201503010D0 (en) | 2015-04-08 |
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