JP6002817B2 - 積層配線部材の製造方法、半導体素子の製造方法、積層配線部材および半導体素子 - Google Patents

積層配線部材の製造方法、半導体素子の製造方法、積層配線部材および半導体素子 Download PDF

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Publication number
JP6002817B2
JP6002817B2 JP2015126213A JP2015126213A JP6002817B2 JP 6002817 B2 JP6002817 B2 JP 6002817B2 JP 2015126213 A JP2015126213 A JP 2015126213A JP 2015126213 A JP2015126213 A JP 2015126213A JP 6002817 B2 JP6002817 B2 JP 6002817B2
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Japan
Prior art keywords
conductive
electrode
insulating layer
convex portion
conductive convex
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JP2015126213A
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Japanese (ja)
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JP2016027631A5 (enExample
JP2016027631A (ja
Inventor
周介 金澤
周介 金澤
近藤 浩史
浩史 近藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Idemitsu Kosan Co Ltd
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Dai Nippon Printing Co Ltd
Idemitsu Kosan Co Ltd
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Priority to JP2015126213A priority Critical patent/JP6002817B2/ja
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Publication of JP2016027631A5 publication Critical patent/JP2016027631A5/ja
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40Organic transistors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/52Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/532Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/40Forming printed elements for providing electric connections to or between printed circuits
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40Organic transistors
    • H10K10/46Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Thin Film Transistor (AREA)
  • Electroluminescent Light Sources (AREA)
JP2015126213A 2014-06-24 2015-06-24 積層配線部材の製造方法、半導体素子の製造方法、積層配線部材および半導体素子 Expired - Fee Related JP6002817B2 (ja)

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JP2015126213A JP6002817B2 (ja) 2014-06-24 2015-06-24 積層配線部材の製造方法、半導体素子の製造方法、積層配線部材および半導体素子

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2014129635 2014-06-24
JP2014129635 2014-06-24
JP2015126213A JP6002817B2 (ja) 2014-06-24 2015-06-24 積層配線部材の製造方法、半導体素子の製造方法、積層配線部材および半導体素子

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JP2016027631A JP2016027631A (ja) 2016-02-18
JP2016027631A5 JP2016027631A5 (enExample) 2016-03-31
JP6002817B2 true JP6002817B2 (ja) 2016-10-05

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JP2015126213A Expired - Fee Related JP6002817B2 (ja) 2014-06-24 2015-06-24 積層配線部材の製造方法、半導体素子の製造方法、積層配線部材および半導体素子

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Country Link
JP (1) JP6002817B2 (enExample)
TW (1) TW201606894A (enExample)
WO (1) WO2015199120A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102191495B1 (ko) * 2019-08-27 2020-12-15 에스디코리아(주) 폴리실록산 계면활성제, 이의 제조 방법 그리고 폴리실록산 계면활성제를 포함하는 폴리우레탄 폼 조성물

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190068352A (ko) * 2017-12-08 2019-06-18 삼성에스디아이 주식회사 태양전지 셀

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010010609A1 (ja) * 2008-07-22 2010-01-28 パイオニア株式会社 コンタクトホールの形成方法、及び回路基板
JP2010257291A (ja) * 2009-04-27 2010-11-11 Seiko Epson Corp タッチパネルの製造方法及び表示装置製造方法並びに電子機器製造方法
JP2011044584A (ja) * 2009-08-21 2011-03-03 Seiko Epson Corp 回路基板の形成方法
JP5866783B2 (ja) * 2011-03-25 2016-02-17 セイコーエプソン株式会社 回路基板の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102191495B1 (ko) * 2019-08-27 2020-12-15 에스디코리아(주) 폴리실록산 계면활성제, 이의 제조 방법 그리고 폴리실록산 계면활성제를 포함하는 폴리우레탄 폼 조성물

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WO2015199120A1 (ja) 2015-12-30
TW201606894A (zh) 2016-02-16
JP2016027631A (ja) 2016-02-18

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