JP5994782B2 - ネガ型感光性樹脂組成物、隔壁、ブラックマトリックスおよび光学素子 - Google Patents

ネガ型感光性樹脂組成物、隔壁、ブラックマトリックスおよび光学素子 Download PDF

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Publication number
JP5994782B2
JP5994782B2 JP2013531308A JP2013531308A JP5994782B2 JP 5994782 B2 JP5994782 B2 JP 5994782B2 JP 2013531308 A JP2013531308 A JP 2013531308A JP 2013531308 A JP2013531308 A JP 2013531308A JP 5994782 B2 JP5994782 B2 JP 5994782B2
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group
photosensitive resin
resin composition
carbon atoms
solvent
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Japanese (ja)
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JPWO2013031736A1 (ja
Inventor
光太郎 山田
光太郎 山田
高橋 秀幸
秀幸 高橋
川島 正行
正行 川島
正樹 小尾
正樹 小尾
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AGC Inc
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Asahi Glass Co Ltd
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/22Absorbing filters
    • G02B5/223Absorbing filters containing organic substances, e.g. dyes, inks or pigments
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007Filters, e.g. additive colour filters; Components for display devices
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0048Photosensitive materials characterised by the solvents or agents facilitating spreading, e.g. tensio-active agents
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/031Organic compounds not covered by group G03F7/029
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0388Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/09Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/105Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80Constructional details
    • H10K59/8791Arrangements for improving contrast, e.g. preventing reflection of ambient light
    • H10K59/8792Arrangements for improving contrast, e.g. preventing reflection of ambient light comprising light absorbing layers, e.g. black layers

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Materials For Photolithography (AREA)
  • Optical Filters (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
JP2013531308A 2011-08-30 2012-08-27 ネガ型感光性樹脂組成物、隔壁、ブラックマトリックスおよび光学素子 Active JP5994782B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011187763 2011-08-30
JP2011187763 2011-08-30
PCT/JP2012/071612 WO2013031736A1 (ja) 2011-08-30 2012-08-27 ネガ型感光性樹脂組成物、隔壁、ブラックマトリックスおよび光学素子

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JPWO2013031736A1 JPWO2013031736A1 (ja) 2015-03-23
JP5994782B2 true JP5994782B2 (ja) 2016-09-21

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JP (1) JP5994782B2 (ko)
KR (1) KR101940844B1 (ko)
CN (1) CN103782237B (ko)
TW (1) TWI518455B (ko)
WO (1) WO2013031736A1 (ko)

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JP6134236B2 (ja) * 2013-09-02 2017-05-24 株式会社ジャパンディスプレイ 表示装置
JP6309761B2 (ja) * 2013-12-27 2018-04-11 東京応化工業株式会社 ブラックカラムスペーサ用感光性樹脂組成物
JPWO2015118836A1 (ja) * 2014-02-10 2017-03-23 日立化成デュポンマイクロシステムズ株式会社 ポリイミド前駆体を含む樹脂組成物、硬化膜の製造方法及び電子部品
JP6815717B2 (ja) * 2015-03-05 2021-01-20 日鉄ケミカル&マテリアル株式会社 遮光膜用黒色樹脂組成物、当該組成物を硬化させた遮光膜を有する遮光膜付基板、並びに当該遮光膜付基板を有するカラーフィルター及びタッチパネル
JP6531347B2 (ja) * 2014-03-28 2019-06-19 セイコーエプソン株式会社 機能層形成用インクおよび発光素子の製造方法
JP6405670B2 (ja) * 2014-04-02 2018-10-17 凸版印刷株式会社 カラーフィルタ基板及び液晶表示装置
JP6390143B2 (ja) * 2014-04-08 2018-09-19 東洋インキScホールディングス株式会社 黒色組成物、黒色塗膜、および積層体
KR101804259B1 (ko) * 2015-03-24 2017-12-04 삼성에스디아이 주식회사 감광성 수지 조성물, 이를 이용한 블랙 컬럼 스페이서 및 컬러필터
CN111477766B (zh) * 2015-06-12 2023-04-07 默克专利有限公司 作为用于oled制剂的溶剂的含有非芳族环的酯
KR102025359B1 (ko) * 2016-03-08 2019-09-25 삼성에스디아이 주식회사 감광성 수지 조성물, 이를 이용한 블랙 컬럼 스페이서 및 컬러필터
US10527936B2 (en) 2016-06-17 2020-01-07 Nan Ya Plastics Corporation Low Dk/Df solder resistant composition use for printed circuit board
JP6573850B2 (ja) * 2016-08-01 2019-09-11 南亞塑膠工業股▲分▼有限公司 プリント基板用の低Dk/Dfのソルダーレジスト組成物
KR102374939B1 (ko) * 2016-09-16 2022-03-16 가부시키가이샤 아데카 경화성 조성물, 경화물 및 경화물의 제조 방법
TWI736718B (zh) * 2016-12-08 2021-08-21 盧森堡商Az電子材料盧森堡有限公司 黑色矩陣用組成物、黑色矩陣、及黑色矩陣之製造方法
JP6845469B2 (ja) * 2017-02-27 2021-03-17 三菱ケミカル株式会社 画像表示装置用着色硬化膜、画像表示装置用感光性着色組成物及び画像表示装置
KR101933940B1 (ko) * 2018-01-31 2018-12-31 동우 화인켐 주식회사 착색 감광성 수지 조성물, 이를 이용하여 제조된 블랙 매트릭스 및/또는 컬럼 스페이서를 포함하는 컬러필터 및 컬러필터를 포함하는 화상표시장치
JP6699691B2 (ja) * 2018-08-06 2020-05-27 東洋インキScホールディングス株式会社 黒色組成物、黒色塗膜、および積層体
JP7359559B2 (ja) * 2019-03-29 2023-10-11 日鉄ケミカル&マテリアル株式会社 遮光膜及びそれを得るための感光性樹脂組成物、遮光膜の製造方法
JP7297499B2 (ja) * 2019-04-04 2023-06-26 東京応化工業株式会社 感光性樹脂組成物、パターン化された硬化膜の製造方法、及びパターン化された硬化膜
CN113149650B (zh) * 2021-04-25 2022-09-23 陕西理工大学 一种基于sla的碳材料零件用光敏树脂及零件的制备方法

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Publication number Publication date
KR20140061426A (ko) 2014-05-21
CN103782237B (zh) 2017-02-15
KR101940844B1 (ko) 2019-01-21
TWI518455B (zh) 2016-01-21
JPWO2013031736A1 (ja) 2015-03-23
TW201314366A (zh) 2013-04-01
CN103782237A (zh) 2014-05-07
WO2013031736A1 (ja) 2013-03-07

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