JP5984364B2 - 光学式エンコーダおよびこれを備えた装置 - Google Patents

光学式エンコーダおよびこれを備えた装置 Download PDF

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Publication number
JP5984364B2
JP5984364B2 JP2011255597A JP2011255597A JP5984364B2 JP 5984364 B2 JP5984364 B2 JP 5984364B2 JP 2011255597 A JP2011255597 A JP 2011255597A JP 2011255597 A JP2011255597 A JP 2011255597A JP 5984364 B2 JP5984364 B2 JP 5984364B2
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Japan
Prior art keywords
optical
periodic pattern
period
light
light receiving
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JP2011255597A
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English (en)
Japanese (ja)
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JP2013108911A5 (enExample
JP2013108911A (ja
Inventor
中村　仁
仁 中村
名倉　千裕
千裕 名倉
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Canon Inc
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Canon Inc
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2011255597A priority Critical patent/JP5984364B2/ja
Priority to EP12192337.9A priority patent/EP2613127B1/en
Priority to US13/678,956 priority patent/US9234772B2/en
Publication of JP2013108911A publication Critical patent/JP2013108911A/ja
Publication of JP2013108911A5 publication Critical patent/JP2013108911A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24428—Error prevention
    • G01D5/24433—Error prevention by mechanical means
    • G01D5/24438—Special design of the sensing element or scale
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34746—Linear encoders

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
JP2011255597A 2011-11-22 2011-11-22 光学式エンコーダおよびこれを備えた装置 Active JP5984364B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2011255597A JP5984364B2 (ja) 2011-11-22 2011-11-22 光学式エンコーダおよびこれを備えた装置
EP12192337.9A EP2613127B1 (en) 2011-11-22 2012-11-13 Optical encoder and apparatus including the same
US13/678,956 US9234772B2 (en) 2011-11-22 2012-11-16 Optical encoder and apparatus including the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011255597A JP5984364B2 (ja) 2011-11-22 2011-11-22 光学式エンコーダおよびこれを備えた装置

Publications (3)

Publication Number Publication Date
JP2013108911A JP2013108911A (ja) 2013-06-06
JP2013108911A5 JP2013108911A5 (enExample) 2015-01-15
JP5984364B2 true JP5984364B2 (ja) 2016-09-06

Family

ID=47263094

Family Applications (1)

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JP2011255597A Active JP5984364B2 (ja) 2011-11-22 2011-11-22 光学式エンコーダおよびこれを備えた装置

Country Status (3)

Country Link
US (1) US9234772B2 (enExample)
EP (1) EP2613127B1 (enExample)
JP (1) JP5984364B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5968062B2 (ja) * 2012-05-02 2016-08-10 キヤノン株式会社 位置検出エンコーダおよびこれを用いた装置
DE102018200449A1 (de) * 2018-01-12 2019-07-18 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
JP7646393B2 (ja) 2021-03-02 2025-03-17 キヤノン株式会社 ロボットシステム、トルクセンサ、変位検出装置、検出方法、物品の製造方法、プログラム及び記録媒体

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2539269B2 (ja) 1989-07-17 1996-10-02 オークマ株式会社 光学式エンコ―ダ
JP4372877B2 (ja) * 1999-01-13 2009-11-25 オリンパス株式会社 光学式変位センサ
US6958819B1 (en) * 2002-04-04 2005-10-25 Nanometrics Incorporated Encoder with an alignment target
JP4350417B2 (ja) * 2003-05-13 2009-10-21 株式会社ミツトヨ 光電式エンコーダ
JP2008241243A (ja) * 2005-06-30 2008-10-09 Mitsubishi Electric Corp 光学式エンコーダ
JP4724496B2 (ja) * 2005-08-29 2011-07-13 キヤノン株式会社 光学式エンコーダ
JP5154072B2 (ja) * 2005-12-06 2013-02-27 株式会社ミツトヨ 光電式エンコーダ
JP5198434B2 (ja) * 2007-04-10 2013-05-15 オリンパス株式会社 光学式エンコーダ
US8094323B2 (en) * 2009-06-26 2012-01-10 Mitutoyo Corporation Displacement encoder including phosphor illumination source
JP2011013083A (ja) 2009-07-01 2011-01-20 Canon Inc 測定装置及びそれを用いた機器
JP5679643B2 (ja) * 2009-09-11 2015-03-04 キヤノン株式会社 光学式エンコーダ
JP5562077B2 (ja) * 2010-03-10 2014-07-30 キヤノン株式会社 光学式エンコーダ、エンコーダ、干渉計測装置、計測方法
JP5562076B2 (ja) * 2010-03-10 2014-07-30 キヤノン株式会社 光学式エンコーダおよび変位計測装置
JP5452533B2 (ja) * 2011-03-29 2014-03-26 株式会社ミツトヨ 光学式エンコーダ

Also Published As

Publication number Publication date
EP2613127B1 (en) 2017-11-08
US9234772B2 (en) 2016-01-12
EP2613127A1 (en) 2013-07-10
JP2013108911A (ja) 2013-06-06
US20130126718A1 (en) 2013-05-23

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