JP5980193B2 - 光モジュール及び光モジュール製造方法。 - Google Patents
光モジュール及び光モジュール製造方法。 Download PDFInfo
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- JP5980193B2 JP5980193B2 JP2013247348A JP2013247348A JP5980193B2 JP 5980193 B2 JP5980193 B2 JP 5980193B2 JP 2013247348 A JP2013247348 A JP 2013247348A JP 2013247348 A JP2013247348 A JP 2013247348A JP 5980193 B2 JP5980193 B2 JP 5980193B2
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29379—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device
- G02B6/2938—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device for multiplexing or demultiplexing, i.e. combining or separating wavelengths, e.g. 1xN, NxM
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/138—Integrated optical circuits characterised by the manufacturing method by using polymerisation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29304—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating
- G02B6/29316—Light guides comprising a diffractive element, e.g. grating in or on the light guide such that diffracted light is confined in the light guide
- G02B6/29325—Light guides comprising a diffractive element, e.g. grating in or on the light guide such that diffracted light is confined in the light guide of the slab or planar or plate like form, i.e. confinement in a single transverse dimension only
- G02B6/29328—Diffractive elements operating in reflection
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
- G02B6/29361—Interference filters, e.g. multilayer coatings, thin film filters, dichroic splitters or mirrors based on multilayers, WDM filters
- G02B6/29362—Serial cascade of filters or filtering operations, e.g. for a large number of channels
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
- G02B6/29361—Interference filters, e.g. multilayer coatings, thin film filters, dichroic splitters or mirrors based on multilayers, WDM filters
- G02B6/29368—Light guide comprising the filter, e.g. filter deposited on a fibre end
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4215—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical elements being wavelength selective optical elements, e.g. variable wavelength optical modules or wavelength lockers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4246—Bidirectionally operating package structures
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Couplings Of Light Guides (AREA)
- Optical Integrated Circuits (AREA)
- Semiconductor Lasers (AREA)
- Light Receiving Elements (AREA)
Description
305 基板
310 光導波路
325 溝
330a−330d 光選択フィルター(DBRフィルター)
335a−335d 発光及び受光素子対(VCSEL/PDチップ)
Claims (5)
- それぞれ上端部に傾斜した面を有する複数の光ピンの原型が形成された原版モールドからレプリカ樹脂型を作製することと、
複数の異なる波長の光にそれぞれ対応して複数の発光及び受光素子対が設けられたウエハー上に前記レプリカ樹脂型を位置合わせして置くことと、
前記レプリカ樹脂型側に離型剤を塗布して前記レプリカ樹脂型の中に硬化性光透過樹脂を入れ、当該硬化性光透過樹脂を硬化後に前記レプリカ樹脂型を取り外して前記ウエハー上に前記複数の光ピンを形成することと、
前記ウエハー上に形成した前記複数の光ピンの前記傾斜した面に、それぞれ対応する波長の光を反射する複数の光選択フィルターを形成することと、
前記ウエハーをダイシングして、前記光選択フィルターを形成した前記光ピンと前記発光及び受光素子対とをそれぞれが備える複数のチップを切り出すことと、
基板の表面に設けられた少なくとも1つの光導波路に複数の溝を形成することと、
前記少なくとも1つの光導波路に形成した前記複数の溝に、それぞれ対応する前記光選択フィルターを形成した前記複数の光ピンを配置して、前記光選択フィルターを形成した前記光ピンと前記発光及び受光素子対とをそれぞれが備える前記複数のチップを前記基板の表面の上に設けることと、
を含む、光モジュールの製造方法。 - 前記光ピンの前記傾斜した面は、前記基板の表面に対して45度に傾斜した面である、請求項1に記載の光モジュール製造方法。
- 前記硬化性光透過樹脂は、光硬化アクリル樹脂である、請求項1又は2に記載の光モジュール製造方法。
- 前記ウエハー上に形成した前記複数の光ピンの前記傾斜した面に、それぞれ対応する波長の光を反射する複数の光選択フィルターを形成することは、前記複数の光ピンを形成した前記ウエハーの上に前記複数の光ピンの前記傾斜した面を露出するマスクを形成し、露出した前記複数の光ピンの前記傾斜した面にDBR(Distributed Bragg Reflector:分布ブラッグ反射)フィルターを蒸着することを含む、請求項1、2又は3に記載の光モジュール製造方法。
- 前記複数の光ピンを形成した前記ウエハーの上に前記複数の光ピンの前記傾斜した面を露出するマスクを形成することは、前記複数の光ピンを形成した前記ウエハーの上にレジストを付着し、マスクを用い前記レジストを露光及び現像して前記複数の光ピンの前記傾斜した面を前記レジストから露出することを含む、請求項4に記載の光モジュール製造方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
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JP2013247348A JP5980193B2 (ja) | 2013-11-29 | 2013-11-29 | 光モジュール及び光モジュール製造方法。 |
US14/519,494 US9389366B2 (en) | 2013-11-29 | 2014-10-21 | Optical modules for wavelength multiplexing |
US15/146,989 US9927576B2 (en) | 2013-11-29 | 2016-05-05 | Optical modules for wavelength multiplexing |
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JP2013247348A JP5980193B2 (ja) | 2013-11-29 | 2013-11-29 | 光モジュール及び光モジュール製造方法。 |
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JP5980193B2 true JP5980193B2 (ja) | 2016-08-31 |
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Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JP5980193B2 (ja) * | 2013-11-29 | 2016-08-31 | インターナショナル・ビジネス・マシーンズ・コーポレーションInternational Business Machines Corporation | 光モジュール及び光モジュール製造方法。 |
US9709746B2 (en) * | 2015-11-17 | 2017-07-18 | International Business Machines Corporation | Micro-filter structures for wavelength division multiplexing in polymer waveguides |
US10044445B2 (en) | 2016-08-31 | 2018-08-07 | Applied Optoelectronics, Inc. | Techniques for reducing electrical interconnection losses between a transmitter optical subassembly (TOSA) and associated driver circuitry and an optical transceiver system using the same |
US9977200B2 (en) * | 2016-08-31 | 2018-05-22 | Applied Optoelectronics, Inc. | Optical component assembly with a vertical mounting structure for multi-angle light path alignment and an optical subassembly using the same |
US11664902B2 (en) * | 2019-08-19 | 2023-05-30 | Nokia Solutions And Networks Oy | Planar assemblies for optical transceivers |
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2013
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2014
- 2014-10-21 US US14/519,494 patent/US9389366B2/en active Active
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Also Published As
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US20160246007A1 (en) | 2016-08-25 |
US9927576B2 (en) | 2018-03-27 |
US20150153522A1 (en) | 2015-06-04 |
JP2015106006A (ja) | 2015-06-08 |
US9389366B2 (en) | 2016-07-12 |
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