JP5971289B2 - 基板局所の自動分析装置及び分析方法 - Google Patents

基板局所の自動分析装置及び分析方法 Download PDF

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Publication number
JP5971289B2
JP5971289B2 JP2014167171A JP2014167171A JP5971289B2 JP 5971289 B2 JP5971289 B2 JP 5971289B2 JP 2014167171 A JP2014167171 A JP 2014167171A JP 2014167171 A JP2014167171 A JP 2014167171A JP 5971289 B2 JP5971289 B2 JP 5971289B2
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Prior art keywords
analysis
nozzle
liquid
local
substrate
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JP2014167171A
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English (en)
Japanese (ja)
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JP2016044988A (ja
JP2016044988A5 (enExample
Inventor
川端　克彦
克彦 川端
達也 一之瀬
達也 一之瀬
利彦 今井
利彦 今井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin-Etsu Handotai Co Ltd
IAS Inc
Original Assignee
Shin-Etsu Handotai Co Ltd
IAS Inc
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Priority to JP2014167171A priority Critical patent/JP5971289B2/ja
Application filed by Shin-Etsu Handotai Co Ltd, IAS Inc filed Critical Shin-Etsu Handotai Co Ltd
Priority to EP15833717.0A priority patent/EP3184985B1/en
Priority to KR1020177003062A priority patent/KR101921840B1/ko
Priority to PCT/JP2015/070681 priority patent/WO2016027607A1/ja
Priority to CN201580038916.9A priority patent/CN106662507B/zh
Priority to US15/322,389 priority patent/US10151727B2/en
Priority to TW104125770A priority patent/TWI677681B/zh
Publication of JP2016044988A publication Critical patent/JP2016044988A/ja
Publication of JP2016044988A5 publication Critical patent/JP2016044988A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/02—Burettes; Pipettes
    • B01L3/021—Pipettes, i.e. with only one conduit for withdrawing and redistributing liquids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/02—Burettes; Pipettes
    • B01L3/0241—Drop counters; Drop formers
    • B01L3/0262—Drop counters; Drop formers using touch-off at substrate or container
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/02—Burettes; Pipettes
    • B01L3/0289—Apparatus for withdrawing or distributing predetermined quantities of fluid
    • B01L3/0293—Apparatus for withdrawing or distributing predetermined quantities of fluid for liquids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/32—Polishing; Etching
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • G01N27/622—Ion mobility spectrometry
    • G01N27/623—Ion mobility spectrometry combined with mass spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N35/10—Devices for transferring samples or any liquids to, in, or from, the analysis apparatus, e.g. suction devices, injection devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N35/10—Devices for transferring samples or any liquids to, in, or from, the analysis apparatus, e.g. suction devices, injection devices
    • G01N35/1002—Reagent dispensers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N35/10—Devices for transferring samples or any liquids to, in, or from, the analysis apparatus, e.g. suction devices, injection devices
    • G01N35/1009—Characterised by arrangements for controlling the aspiration or dispense of liquids
    • G01N35/1016—Control of the volume dispensed or introduced
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N35/10—Devices for transferring samples or any liquids to, in, or from, the analysis apparatus, e.g. suction devices, injection devices
    • G01N35/1095—Devices for transferring samples or any liquids to, in, or from, the analysis apparatus, e.g. suction devices, injection devices for supplying the samples to flow-through analysers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/06—Fluid handling related problems
    • B01L2200/0684—Venting, avoiding backpressure, avoid gas bubbles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/08—Ergonomic or safety aspects of handling devices
    • B01L2200/082—Handling hazardous material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/02—Drop detachment mechanisms of single droplets from nozzles or pins
    • B01L2400/022—Drop detachment mechanisms of single droplets from nozzles or pins droplet contacts the surface of the receptacle
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/02—Burettes; Pipettes
    • B01L3/0203—Burettes, i.e. for withdrawing and redistributing liquids through different conduits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0431—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for liquid samples
    • H01J49/0445—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for liquid samples with means for introducing as a spray, a jet or an aerosol
    • H01J49/045—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for liquid samples with means for introducing as a spray, a jet or an aerosol with means for using a nebulising gas, i.e. pneumatically assisted
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Clinical Laboratory Science (AREA)
  • Electrochemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Dispersion Chemistry (AREA)
  • Molecular Biology (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
JP2014167171A 2014-08-20 2014-08-20 基板局所の自動分析装置及び分析方法 Active JP5971289B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2014167171A JP5971289B2 (ja) 2014-08-20 2014-08-20 基板局所の自動分析装置及び分析方法
KR1020177003062A KR101921840B1 (ko) 2014-08-20 2015-07-21 기판 국소의 자동 분석장치 및 분석방법
PCT/JP2015/070681 WO2016027607A1 (ja) 2014-08-20 2015-07-21 基板局所の自動分析装置及び分析方法
CN201580038916.9A CN106662507B (zh) 2014-08-20 2015-07-21 基板局部的自动分析装置及分析方法
EP15833717.0A EP3184985B1 (en) 2014-08-20 2015-07-21 Automatic localized substrate analysis device and analysis method
US15/322,389 US10151727B2 (en) 2014-08-20 2015-07-21 Automatic localized substrate analysis device and analysis method
TW104125770A TWI677681B (zh) 2014-08-20 2015-08-07 基板局部的自動分析裝置及分析方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014167171A JP5971289B2 (ja) 2014-08-20 2014-08-20 基板局所の自動分析装置及び分析方法

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JP2016044988A JP2016044988A (ja) 2016-04-04
JP2016044988A5 JP2016044988A5 (enExample) 2016-05-19
JP5971289B2 true JP5971289B2 (ja) 2016-08-17

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JP2014167171A Active JP5971289B2 (ja) 2014-08-20 2014-08-20 基板局所の自動分析装置及び分析方法

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US (1) US10151727B2 (enExample)
EP (1) EP3184985B1 (enExample)
JP (1) JP5971289B2 (enExample)
KR (1) KR101921840B1 (enExample)
CN (1) CN106662507B (enExample)
TW (1) TWI677681B (enExample)
WO (1) WO2016027607A1 (enExample)

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JP6108367B1 (ja) * 2015-12-22 2017-04-05 株式会社 イアス シリコン基板用分析装置
US10998179B2 (en) * 2016-10-14 2021-05-04 Dh Technologies Development Pte. Ltd. Methods and systems for increasing sensitivity of direct sampling interfaces for mass spectrometric analysis
CN109791097B (zh) * 2017-07-18 2022-01-04 埃耶士株式会社 基板分析用管嘴及基板分析方法
CN107505382A (zh) * 2017-09-19 2017-12-22 同方威视技术股份有限公司 自动标定装置和离子迁移谱仪
US11244841B2 (en) 2017-12-01 2022-02-08 Elemental Scientific, Inc. Systems for integrated decomposition and scanning of a semiconducting wafer
CN108181374A (zh) * 2018-02-08 2018-06-19 聚光科技(杭州)股份有限公司 等离子体-质谱分析系统的工作方法
CN111954801B (zh) * 2018-05-04 2023-12-01 应用材料公司 用于处理腔室的纳米颗粒测量
US11211272B2 (en) 2019-09-25 2021-12-28 Micron Technology, Inc. Contaminant detection tools and related methods
CN115398615B (zh) 2020-04-16 2026-07-17 基础科学公司 用于半导体晶圆的集成分解和扫描的系统
US12531225B2 (en) 2020-05-22 2026-01-20 Dh Technologies Development Pte. Ltd. Overflow sensor for open port sampling probe
CN115668441A (zh) 2020-05-22 2023-01-31 Dh科技发展私人贸易有限公司 用于开放端口采样探头的高流速冲洗
KR102223660B1 (ko) * 2020-10-06 2021-03-05 주식회사 위드텍 웨이퍼 표면의 오염물 샘플링 노즐 및 샘플링 방법.

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Also Published As

Publication number Publication date
CN106662507A (zh) 2017-05-10
JP2016044988A (ja) 2016-04-04
WO2016027607A1 (ja) 2016-02-25
EP3184985A4 (en) 2018-04-25
KR101921840B1 (ko) 2018-11-23
TW201614234A (en) 2016-04-16
KR20170028403A (ko) 2017-03-13
US10151727B2 (en) 2018-12-11
TWI677681B (zh) 2019-11-21
US20170160233A1 (en) 2017-06-08
EP3184985B1 (en) 2023-04-12
EP3184985A1 (en) 2017-06-28
CN106662507B (zh) 2019-09-13

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