JP5971289B2 - 基板局所の自動分析装置及び分析方法 - Google Patents
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
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- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Description
120 分析液供給手段
130 分析液排出手段
150 ノズル先端
160 排気手段
200 ポンプ
300 ネブライザー
D 分析液
W 基板
Claims (2)
- 分析液を供給するポンプと、前記ポンプより供給された分析液を基板表面の所定領域に吐出し、所定領域内の分析対象物を分析液に移行させ、該分析液を取り込むことにより分析対象物を回収する局所分析用ノズルと、前記局所分析用ノズル内の分析対象物を含む分析液を負圧により吸引するネブライザーと、前記ネブライザーより送液された分析液に含まれる分析対象物を分析する誘導結合プラズマ質量分析装置と、を備え、
前記局所分析用ノズルは、基板に対し分析液を供給する端部のノズル形状が筒状であり、前記筒状の端部において、筒状部の内壁に沿って分析液を保持可能な内部空間を備えており、基板上に分析液を吐出する分析液供給手段と、分析対象物を含む分析液を基板上より局所分析用ノズル内に取り込み、ネブライザーへ送液する分析液排出手段と、局所分析用ノズル内を排気経路とする排気手段と、を有しており、
局所分析用ノズルに取り込まれた分析対象物を含む分析液を、誘導結合プラズマ質量分析装置へ自動的に送液する自動送液手段を有し、
ポンプより局所分析用ノズルに供給する分析液の流量と、局所分析用ノズルよりネブライザーに送液する分析液の流量を調整する流量調整手段を有し、
流量調整手段は、ネブライザーに接続された不活性ガス供給路に不活性ガスを供給して負圧を発生させて、分析液をネブライザーに吸引させる際の不活性ガス供給量を調整するものであり、
前記流量調整手段により、ポンプより局所分析用ノズルへ供給する分析液の流量を、局所分析用ノズルよりネブライザーに送液する分析液の流量と同量以上にすることにより、局所分析用ノズルによる分析液の取り込みと、誘導結合プラズマ質量分析装置による分析対象物の分析とを同時進行で行い、基板の隣接した複数の所定領域を連続して自動分析する自動制御手段を有することを特徴とする基板局所の自動分析装置。 - 請求項1に記載の装置を用いて基板表面局所を自動分析する方法において、
前記ポンプより局所分析用ノズルに供給された分析液を、前記局所分析用ノズルの分析液供給手段より基板表面の所定領域に吐出した後、分析液排出手段より分析対象物を含む分析液を基板上から局所分析用ノズル内に取り込み、基板上の所定領域内に含まれる分析対象物を局所分析用ノズル内に回収する局所分析工程と、
分析対象物を含む分析液を、ネブライザーに接続された不活性ガス供給路に不活性ガスを供給することで発生した負圧により局所分析用ノズル内からネブライザーへ吸引し、誘導結合プラズマ質量分析装置へ送液して、分析液中に含まれる分析対象物を自動分析する分析対象物の分析工程と、を含み、
局所分析工程は、排気手段により局所分析用ノズル内を排気しながら行い、
前記流量調整手段により、ポンプより局所分析用ノズルへ供給する分析液の流量を、局所分析用ノズルよりネブライザーに送液する分析液の流量と同量以上にする基板局所の自動分析方法。
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JP2014167171A JP5971289B2 (ja) | 2014-08-20 | 2014-08-20 | 基板局所の自動分析装置及び分析方法 |
US15/322,389 US10151727B2 (en) | 2014-08-20 | 2015-07-21 | Automatic localized substrate analysis device and analysis method |
EP15833717.0A EP3184985B1 (en) | 2014-08-20 | 2015-07-21 | Automatic localized substrate analysis device and analysis method |
KR1020177003062A KR101921840B1 (ko) | 2014-08-20 | 2015-07-21 | 기판 국소의 자동 분석장치 및 분석방법 |
CN201580038916.9A CN106662507B (zh) | 2014-08-20 | 2015-07-21 | 基板局部的自动分析装置及分析方法 |
PCT/JP2015/070681 WO2016027607A1 (ja) | 2014-08-20 | 2015-07-21 | 基板局所の自動分析装置及び分析方法 |
TW104125770A TWI677681B (zh) | 2014-08-20 | 2015-08-07 | 基板局部的自動分析裝置及分析方法 |
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CN107505382A (zh) * | 2017-09-19 | 2017-12-22 | 同方威视技术股份有限公司 | 自动标定装置和离子迁移谱仪 |
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US11211272B2 (en) | 2019-09-25 | 2021-12-28 | Micron Technology, Inc. | Contaminant detection tools and related methods |
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CN102194726A (zh) * | 2011-05-23 | 2011-09-21 | 叶伟清 | 晶圆表面局部定位采样方法 |
JP5881166B2 (ja) * | 2012-06-14 | 2016-03-09 | 株式会社 イアス | 基板分析用ノズル |
US9176028B2 (en) * | 2012-10-04 | 2015-11-03 | Ut-Battelle, Llc | Ball assisted device for analytical surface sampling |
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CN106662507B (zh) | 2019-09-13 |
US20170160233A1 (en) | 2017-06-08 |
TW201614234A (en) | 2016-04-16 |
EP3184985B1 (en) | 2023-04-12 |
TWI677681B (zh) | 2019-11-21 |
WO2016027607A1 (ja) | 2016-02-25 |
KR101921840B1 (ko) | 2018-11-23 |
KR20170028403A (ko) | 2017-03-13 |
CN106662507A (zh) | 2017-05-10 |
US10151727B2 (en) | 2018-12-11 |
JP2016044988A (ja) | 2016-04-04 |
EP3184985A4 (en) | 2018-04-25 |
EP3184985A1 (en) | 2017-06-28 |
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