JP5954726B2 - 多層構造において層を評価するための装置および方法 - Google Patents

多層構造において層を評価するための装置および方法 Download PDF

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Publication number
JP5954726B2
JP5954726B2 JP2011264460A JP2011264460A JP5954726B2 JP 5954726 B2 JP5954726 B2 JP 5954726B2 JP 2011264460 A JP2011264460 A JP 2011264460A JP 2011264460 A JP2011264460 A JP 2011264460A JP 5954726 B2 JP5954726 B2 JP 5954726B2
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unit
multilayer structure
axis
opening
parameter
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Japanese (ja)
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JP2012127948A (ja
JP2012127948A5 (enExample
Inventor
ジョン アール． リン，
ジョン アール． リン，
ジェフリー ジー． トンプソン，
ジェフリー ジー． トンプソン，
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Boeing Co
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Boeing Co
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/14—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
    • G01B7/105—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring thickness of coating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
    • G01B7/107—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring objects while moving
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
    • G01N27/82—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws
    • G01N27/90—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws using eddy currents
    • G01N27/9013—Arrangements for scanning
    • G01N27/902—Arrangements for scanning by moving the sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/26—Arrangements for orientation or scanning by relative movement of the head and the sensor
    • G01N29/265—Arrangements for orientation or scanning by relative movement of the head and the sensor by moving the sensor relative to a stationary material

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  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP2011264460A 2010-12-10 2011-12-02 多層構造において層を評価するための装置および方法 Active JP5954726B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/965,356 2010-12-10
US12/965,356 US8903680B2 (en) 2010-12-10 2010-12-10 Apparatus and method for evaluating layers in a multi-layer structure

Publications (3)

Publication Number Publication Date
JP2012127948A JP2012127948A (ja) 2012-07-05
JP2012127948A5 JP2012127948A5 (enExample) 2015-01-22
JP5954726B2 true JP5954726B2 (ja) 2016-07-20

Family

ID=45560312

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011264460A Active JP5954726B2 (ja) 2010-12-10 2011-12-02 多層構造において層を評価するための装置および方法

Country Status (5)

Country Link
US (1) US8903680B2 (enExample)
JP (1) JP5954726B2 (enExample)
CN (1) CN102607402B (enExample)
CA (1) CA2755744C (enExample)
GB (1) GB2486347B (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104833298B (zh) * 2014-02-12 2018-02-09 鸿发国际科技股份有限公司 纸张厚度检测装置及其纸张厚度检测方法
US11148070B2 (en) * 2018-03-07 2021-10-19 Palo Alto Research Center Incorporated Systems and methods of nanofiltration using graphene oxide
CN110006996B (zh) * 2019-04-22 2021-11-30 葫芦岛探克科技有限公司 金属复合材料超声波测厚方法及层间界面在超声波测厚中的应用
GB2593911B (en) * 2020-04-08 2022-05-04 Innovative Tech Ltd A coin apparatus
CN111458415B (zh) * 2020-04-13 2023-07-18 润电能源科学技术有限公司 一种超声相控阵换能器与待测工件耦合状态的检测方法

Family Cites Families (23)

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US3693075A (en) * 1969-11-15 1972-09-19 Forster F M O Eddy current system for testing tubes for defects,eccentricity,and wall thickness
JPS5672303A (en) * 1979-11-15 1981-06-16 Nuclear Fuel Ind Ltd Measuring method of displacement of fuel rod of noncontact type
FR2494837A1 (fr) 1980-11-26 1982-05-28 Commissariat Energie Atomique Dispositif de controle des dimensions et de l'ecartement de pieces rigides disposees en faisceau
FR2585868B1 (fr) * 1985-08-02 1987-11-27 Framatome Sa Dispositif de controle de l'alignement dans la direction verticale des equipements internes superieurs et inferieurs d'un reacteur nucleaire a eau sous pression.
US4645634A (en) 1983-12-19 1987-02-24 The Babcock & Wilcox Company Apparatus for measuring the pitch between adjacent rods in a nuclear fuel assembly
DE3542200A1 (de) 1985-11-29 1987-06-04 Bbc Reaktor Gmbh Verfahren zum pruefen der abmessungen eines brennelementes fuer kernreaktoren
JPH0636046B2 (ja) * 1988-06-08 1994-05-11 株式会社日立製作所 燃料集合体，燃料スペーサ及び原子炉の初装荷炉心
US4876506A (en) * 1988-06-13 1989-10-24 Westinghouse Electric Corp. Apparatus and method for inspecting the profile of the inner wall of a tube employing a wall follower and an eddy current probe
FR2656415B1 (fr) * 1989-12-27 1993-04-09 Framatome Sa Procede et dispositif de mesure simultanee de distance entre tubes metalliques et d'epaisseur d'oxyde sur les tubes.
JPH0442002A (ja) * 1990-06-07 1992-02-12 Nuclear Fuel Ind Ltd 燃料棒ギャップ測定装置
FR2669843B1 (fr) * 1990-11-29 1995-01-20 Lorraine Laminage Dispositif de detection des criques longitudinales sur des brames, notamment sur des brames d'acier.
US5371462A (en) * 1993-03-19 1994-12-06 General Electric Company Eddy current inspection method employing a probe array with test and reference data acquisition and signal processing
US5341678A (en) * 1993-05-12 1994-08-30 General Electric Company Method for determining thickness of ferromagnetic material deposition on nuclear fuel rods
JPH09318784A (ja) * 1996-05-31 1997-12-12 Mitsubishi Heavy Ind Ltd 核燃料集合体の燃料棒間隔測定装置
US5744952A (en) * 1997-02-25 1998-04-28 Mcdermott Technology, Inc. Eddy current measurement of tube element spacing
JP4328066B2 (ja) * 2002-07-26 2009-09-09 コーア株式会社 膜厚検査装置および膜厚検査方法
US7314075B2 (en) * 2003-04-04 2008-01-01 Nisca Corporation Adhesive dispensing apparatus and image forming apparatus
DE102004034081A1 (de) * 2004-07-15 2006-02-09 Robert Bosch Gmbh Verfahren zur berührungsfreien Bestimmung einer Dicke einer Schicht aus elektrisch leitendem Material
DE102004034083A1 (de) * 2004-07-15 2006-02-09 Robert Bosch Gmbh Verfahren zur berührungsfreien Bestimmung einer Schichtdicke durch Widerstands- und Induktivitätsmessung einer Sensorspule
JP2006349377A (ja) * 2005-06-13 2006-12-28 Shinko Electric Co Ltd ２自由度センサ
DE102005054593B4 (de) * 2005-11-14 2018-04-26 Immobiliengesellschaft Helmut Fischer Gmbh & Co. Kg Messonde zur Messung der Dicke dünner Schichten
CN101074861B (zh) * 2007-06-27 2011-02-02 力帆实业(集团)股份有限公司 一种仿形梳组件
JP4803323B2 (ja) * 2010-02-25 2011-10-26 Ｊｆｅスチール株式会社 ワイヤロープピッチの測定方法とワイヤロープピッチ測定装置およびワイヤロープの製造方法

Also Published As

Publication number Publication date
CN102607402A (zh) 2012-07-25
US8903680B2 (en) 2014-12-02
GB2486347B (en) 2016-01-27
JP2012127948A (ja) 2012-07-05
CA2755744C (en) 2016-04-12
GB2486347A (en) 2012-06-13
GB201121319D0 (en) 2012-01-25
CN102607402B (zh) 2016-05-25
CA2755744A1 (en) 2012-06-10
US20120150466A1 (en) 2012-06-14

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