CA2755744C - Apparatus and method for evaluating layers in a multi-layer structure - Google Patents

Apparatus and method for evaluating layers in a multi-layer structure Download PDF

Info

Publication number
CA2755744C
CA2755744C CA2755744A CA2755744A CA2755744C CA 2755744 C CA2755744 C CA 2755744C CA 2755744 A CA2755744 A CA 2755744A CA 2755744 A CA2755744 A CA 2755744A CA 2755744 C CA2755744 C CA 2755744C
Authority
CA
Canada
Prior art keywords
unit
positioning
layer structure
parameter
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CA2755744A
Other languages
English (en)
French (fr)
Other versions
CA2755744A1 (en
Inventor
John R. Linn
Jeffrey G. Thompson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Boeing Co
Original Assignee
Boeing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Boeing Co filed Critical Boeing Co
Publication of CA2755744A1 publication Critical patent/CA2755744A1/en
Application granted granted Critical
Publication of CA2755744C publication Critical patent/CA2755744C/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/16—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring distance of clearance between spaced objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/06—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness specially adapted for measuring length or width of objects while moving
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/08—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/04—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness specially adapted for measuring length or width of objects while moving
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/08—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using capacitive means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/08—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using capacitive means
    • G01B7/087—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using capacitive means for measuring of objects while moving
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
    • G01B7/105—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring thickness of coating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
    • G01B7/107—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring objects while moving
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/14—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
    • G01N27/82—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws
    • G01N27/90—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws using eddy currents
    • G01N27/9013—Arrangements for scanning
    • G01N27/902—Arrangements for scanning by moving the sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/26—Arrangements for orientation or scanning by relative movement of the head and the sensor
    • G01N29/265—Arrangements for orientation or scanning by relative movement of the head and the sensor by moving the sensor relative to a stationary material

Landscapes

  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
CA2755744A 2010-12-10 2011-10-20 Apparatus and method for evaluating layers in a multi-layer structure Active CA2755744C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/965,356 2010-12-10
US12/965,356 US8903680B2 (en) 2010-12-10 2010-12-10 Apparatus and method for evaluating layers in a multi-layer structure

Publications (2)

Publication Number Publication Date
CA2755744A1 CA2755744A1 (en) 2012-06-10
CA2755744C true CA2755744C (en) 2016-04-12

Family

ID=45560312

Family Applications (1)

Application Number Title Priority Date Filing Date
CA2755744A Active CA2755744C (en) 2010-12-10 2011-10-20 Apparatus and method for evaluating layers in a multi-layer structure

Country Status (5)

Country Link
US (1) US8903680B2 (enExample)
JP (1) JP5954726B2 (enExample)
CN (1) CN102607402B (enExample)
CA (1) CA2755744C (enExample)
GB (1) GB2486347B (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104833298B (zh) * 2014-02-12 2018-02-09 鸿发国际科技股份有限公司 纸张厚度检测装置及其纸张厚度检测方法
US11148070B2 (en) * 2018-03-07 2021-10-19 Palo Alto Research Center Incorporated Systems and methods of nanofiltration using graphene oxide
CN110006996B (zh) * 2019-04-22 2021-11-30 葫芦岛探克科技有限公司 金属复合材料超声波测厚方法及层间界面在超声波测厚中的应用
GB2593911B (en) * 2020-04-08 2022-05-04 Innovative Tech Ltd A coin apparatus
CN111458415B (zh) * 2020-04-13 2023-07-18 润电能源科学技术有限公司 一种超声相控阵换能器与待测工件耦合状态的检测方法

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3693075A (en) * 1969-11-15 1972-09-19 Forster F M O Eddy current system for testing tubes for defects,eccentricity,and wall thickness
JPS5672303A (en) * 1979-11-15 1981-06-16 Nuclear Fuel Ind Ltd Measuring method of displacement of fuel rod of noncontact type
FR2494837A1 (fr) 1980-11-26 1982-05-28 Commissariat Energie Atomique Dispositif de controle des dimensions et de l'ecartement de pieces rigides disposees en faisceau
FR2585868B1 (fr) * 1985-08-02 1987-11-27 Framatome Sa Dispositif de controle de l'alignement dans la direction verticale des equipements internes superieurs et inferieurs d'un reacteur nucleaire a eau sous pression.
US4645634A (en) 1983-12-19 1987-02-24 The Babcock & Wilcox Company Apparatus for measuring the pitch between adjacent rods in a nuclear fuel assembly
DE3542200A1 (de) 1985-11-29 1987-06-04 Bbc Reaktor Gmbh Verfahren zum pruefen der abmessungen eines brennelementes fuer kernreaktoren
JPH0636046B2 (ja) * 1988-06-08 1994-05-11 株式会社日立製作所 燃料集合体，燃料スペーサ及び原子炉の初装荷炉心
US4876506A (en) * 1988-06-13 1989-10-24 Westinghouse Electric Corp. Apparatus and method for inspecting the profile of the inner wall of a tube employing a wall follower and an eddy current probe
FR2656415B1 (fr) * 1989-12-27 1993-04-09 Framatome Sa Procede et dispositif de mesure simultanee de distance entre tubes metalliques et d'epaisseur d'oxyde sur les tubes.
JPH0442002A (ja) * 1990-06-07 1992-02-12 Nuclear Fuel Ind Ltd 燃料棒ギャップ測定装置
FR2669843B1 (fr) * 1990-11-29 1995-01-20 Lorraine Laminage Dispositif de detection des criques longitudinales sur des brames, notamment sur des brames d'acier.
US5371462A (en) * 1993-03-19 1994-12-06 General Electric Company Eddy current inspection method employing a probe array with test and reference data acquisition and signal processing
US5341678A (en) * 1993-05-12 1994-08-30 General Electric Company Method for determining thickness of ferromagnetic material deposition on nuclear fuel rods
JPH09318784A (ja) * 1996-05-31 1997-12-12 Mitsubishi Heavy Ind Ltd 核燃料集合体の燃料棒間隔測定装置
US5744952A (en) * 1997-02-25 1998-04-28 Mcdermott Technology, Inc. Eddy current measurement of tube element spacing
JP4328066B2 (ja) * 2002-07-26 2009-09-09 コーア株式会社 膜厚検査装置および膜厚検査方法
US7314075B2 (en) * 2003-04-04 2008-01-01 Nisca Corporation Adhesive dispensing apparatus and image forming apparatus
DE102004034081A1 (de) * 2004-07-15 2006-02-09 Robert Bosch Gmbh Verfahren zur berührungsfreien Bestimmung einer Dicke einer Schicht aus elektrisch leitendem Material
DE102004034083A1 (de) * 2004-07-15 2006-02-09 Robert Bosch Gmbh Verfahren zur berührungsfreien Bestimmung einer Schichtdicke durch Widerstands- und Induktivitätsmessung einer Sensorspule
JP2006349377A (ja) * 2005-06-13 2006-12-28 Shinko Electric Co Ltd ２自由度センサ
DE102005054593B4 (de) * 2005-11-14 2018-04-26 Immobiliengesellschaft Helmut Fischer Gmbh & Co. Kg Messonde zur Messung der Dicke dünner Schichten
CN101074861B (zh) * 2007-06-27 2011-02-02 力帆实业(集团)股份有限公司 一种仿形梳组件
JP4803323B2 (ja) * 2010-02-25 2011-10-26 Ｊｆｅスチール株式会社 ワイヤロープピッチの測定方法とワイヤロープピッチ測定装置およびワイヤロープの製造方法

Also Published As

Publication number Publication date
CN102607402A (zh) 2012-07-25
JP5954726B2 (ja) 2016-07-20
US8903680B2 (en) 2014-12-02
GB2486347B (en) 2016-01-27
JP2012127948A (ja) 2012-07-05
GB2486347A (en) 2012-06-13
GB201121319D0 (en) 2012-01-25
CN102607402B (zh) 2016-05-25
CA2755744A1 (en) 2012-06-10
US20120150466A1 (en) 2012-06-14

Similar Documents

Publication Publication Date Title
CN101865883B (zh) 脉冲涡流应力裂纹集成检测系统及方法
CA2755744C (en) Apparatus and method for evaluating layers in a multi-layer structure
US6400146B1 (en) Sensor head for ACFM based crack detection
RU2606695C2 (ru) Дифференциальный датчик, система контроля и способ выявления отклонений от нормы в электропроводных материалах
JP5387718B2 (ja) 磁気特性測定方法および磁気特性測定装置
US20080223152A1 (en) Methods and systems for using active surface coverings for structural assessment and monitoring
US7710109B2 (en) Method and apparatus for position detection
US8717012B2 (en) Eddy current probe for surface and sub-surface inspection
US20090289624A1 (en) Method for determining and evaluating eddy-current displays, in particular cracks, in a test object made from an electrically conductive material
KR20110021718A (ko) 진단 가능한 홀 센서
EP2866027B1 (en) Eddy current sensor with linear drive conductor
CN103575803A (zh) 非铁磁性金属材料缺陷的洛伦兹力涡流检测方法及装置
US20170322117A1 (en) System for evaluating the condition of a tire, equipped with a device for detecting the direction of travel
CN101813665A (zh) 一种采用对管连接的电涡流探头
EP1927820B1 (en) Digital dial gauge and method for its use
US20070247145A1 (en) Device for detecting defects on metals
CN103076578B (zh) 各向异性磁阻结构磁场强度检测装置
KR101192812B1 (ko) 코드 노출 부적합 타이어 검출 장치
CN201724927U (zh) 一种采用对管连接的电涡流探头
CN104535644A (zh) 一种用于检测薄钢板表面多方向缺陷的涡流探头
CN102937431B (zh) 一种汽车压缩机后端盖垫片距离测试治具
JP7541082B2 (ja) タイヤ・トレッドの厚さ／深さの測定を提供する磁気ドライブ・オーバー・システム（ｄｏｓ）
JP5011056B2 (ja) 渦流検査プローブ及び渦流検査装置
KR20170049954A (ko) 차량용 중공형 액슬 사프트의 복합측정장치
KR101657804B1 (ko) 결함 탐상 센서의 충돌 방지 장치 및 방법

Legal Events

Date Code Title Description
EEER Examination request