JP5909218B2 - 基板液処理装置 - Google Patents
基板液処理装置 Download PDFInfo
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- JP5909218B2 JP5909218B2 JP2013190984A JP2013190984A JP5909218B2 JP 5909218 B2 JP5909218 B2 JP 5909218B2 JP 2013190984 A JP2013190984 A JP 2013190984A JP 2013190984 A JP2013190984 A JP 2013190984A JP 5909218 B2 JP5909218 B2 JP 5909218B2
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- substrate
- annular wall
- exhaust port
- wafer
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- 239000000758 substrate Substances 0.000 title claims description 91
- 239000007788 liquid Substances 0.000 title claims description 68
- 238000012545 processing Methods 0.000 title claims description 62
- 230000007246 mechanism Effects 0.000 claims description 48
- 238000009423 ventilation Methods 0.000 claims description 17
- 230000002093 peripheral effect Effects 0.000 claims description 14
- 230000007423 decrease Effects 0.000 claims description 9
- 238000011282 treatment Methods 0.000 claims description 7
- 238000007599 discharging Methods 0.000 claims description 2
- 238000010129 solution processing Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 description 100
- 238000011161 development Methods 0.000 description 30
- 238000012546 transfer Methods 0.000 description 29
- 239000000243 solution Substances 0.000 description 26
- 238000010438 heat treatment Methods 0.000 description 18
- 238000000034 method Methods 0.000 description 18
- 239000011248 coating agent Substances 0.000 description 17
- 238000000576 coating method Methods 0.000 description 17
- 230000008569 process Effects 0.000 description 17
- 238000001816 cooling Methods 0.000 description 14
- 238000005192 partition Methods 0.000 description 12
- 239000000126 substance Substances 0.000 description 9
- 239000003795 chemical substances by application Substances 0.000 description 6
- 230000006870 function Effects 0.000 description 5
- 230000003028 elevating effect Effects 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 239000012487 rinsing solution Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 238000005273 aeration Methods 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 239000008367 deionised water Substances 0.000 description 2
- 229910021641 deionized water Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000001965 increasing effect Effects 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 230000002195 synergetic effect Effects 0.000 description 2
- 230000032258 transport Effects 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 238000007781 pre-processing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02052—Wet cleaning only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Coating Apparatus (AREA)
Description
Claims (4)
- 基板を保持すると共に当該基板を回転させるための基板回転機構と、
前記基板の表面に処理液を供給する処理液供給機構と、
前記基板を囲むカップと、
前記カップ内の気体を排出する排気機構と、
前記カップにおける前記基板の裏面側に設けられた排気口と、
前記カップ内において前記基板の周縁に沿って形成され、前記基板の表面側から裏面側に気体を導く流路とを備え、
前記カップは、
前記基板の裏面に対向する底部と、
前記基板の周縁に沿うと共に前記底部から前記基板側に突出した第1環状壁と、
前記第1環状壁と前記基板の裏面との間に位置すると共に、前記第1環状壁より外側に張り出す傘状部と、
前記傘状部の周縁部から前記底部側に突出して前記第1環状壁を囲み、前記第1環状壁との間に前記流路の一部を構成する第2環状壁とを有し、
前記排気口は、前記底部のうち前記第1環状壁より内側の領域に形成され、
前記流路は、前記第1環状壁及び前記第2環状壁の配置により、前記排気口から離れるのに応じて通気抵抗が小さくなるように構成されている、基板液処理装置。 - 前記第1環状壁と前記第2環状壁との間隔が前記排気口から離れるのに応じて大きくなっている、請求項1記載の基板液処理装置。
- 前記底部と前記基板とが対向する方向において前記第1環状壁と前記第2環状壁とが重なり合う長さが前記排気口から離れるのに応じて小さくなっている、請求項1又は2記載の基板液処理装置。
- 前記排気口は、前記基板の周縁寄りに位置し、当該周縁の一部に沿って延びた形状を呈する、請求項1〜3のいずれか一項記載の基板液処理装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013190984A JP5909218B2 (ja) | 2013-09-13 | 2013-09-13 | 基板液処理装置 |
KR1020140119027A KR102161328B1 (ko) | 2013-09-13 | 2014-09-05 | 기판 액 처리 장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013190984A JP5909218B2 (ja) | 2013-09-13 | 2013-09-13 | 基板液処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015056626A JP2015056626A (ja) | 2015-03-23 |
JP5909218B2 true JP5909218B2 (ja) | 2016-04-26 |
Family
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JP2013190984A Active JP5909218B2 (ja) | 2013-09-13 | 2013-09-13 | 基板液処理装置 |
Country Status (2)
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JP (1) | JP5909218B2 (ja) |
KR (1) | KR102161328B1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL2016811A (en) | 2015-06-11 | 2016-12-12 | Asml Netherlands Bv | Lithographic apparatus and method for loading a substrate |
JP6824773B2 (ja) | 2017-02-20 | 2021-02-03 | 株式会社Screenホールディングス | 基板処理装置および基板処理方法 |
JP7178177B2 (ja) * | 2018-03-22 | 2022-11-25 | 東京エレクトロン株式会社 | 基板処理装置 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5990928A (ja) * | 1982-11-16 | 1984-05-25 | Dainippon Screen Mfg Co Ltd | 回転式表面処理装置 |
JPS63173328A (ja) * | 1987-01-13 | 1988-07-16 | Fujitsu Ltd | 現像装置 |
JPS63260130A (ja) * | 1987-04-17 | 1988-10-27 | Hitachi Ltd | ウエハ処理装置 |
JPH01139172A (ja) * | 1987-11-25 | 1989-05-31 | Hitachi Ltd | 塗布装置 |
JPH02252232A (ja) * | 1989-03-25 | 1990-10-11 | Tokyo Electron Ltd | レジスト塗布装置 |
JP2964113B2 (ja) * | 1992-07-20 | 1999-10-18 | 東京エレクトロン株式会社 | 処理装置 |
JP3581274B2 (ja) * | 1999-08-18 | 2004-10-27 | 東京エレクトロン株式会社 | 基板処理装置および基板処理方法 |
JP3599323B2 (ja) * | 1999-10-19 | 2004-12-08 | 東京エレクトロン株式会社 | 基板処理装置 |
JP3721320B2 (ja) | 2000-11-01 | 2005-11-30 | 東京エレクトロン株式会社 | 基板処理装置及び基板処理方法 |
JP4180304B2 (ja) * | 2002-05-28 | 2008-11-12 | 東京エレクトロン株式会社 | 処理装置 |
JP2005158862A (ja) * | 2003-11-21 | 2005-06-16 | Seiko Epson Corp | 回転式処理装置及び半導体装置の製造方法 |
JP4830523B2 (ja) * | 2006-02-08 | 2011-12-07 | 東京エレクトロン株式会社 | 塗布、現像装置、塗布、現像方法及びその方法を実施するためのコンピュータプログラム。 |
JP4900116B2 (ja) * | 2007-07-30 | 2012-03-21 | 東京エレクトロン株式会社 | 現像方法、現像装置及び記憶媒体 |
JP5006274B2 (ja) * | 2008-06-25 | 2012-08-22 | 東京エレクトロン株式会社 | 基板処理装置 |
JP4788785B2 (ja) * | 2009-02-06 | 2011-10-05 | 東京エレクトロン株式会社 | 現像装置、現像処理方法及び記憶媒体 |
JP4862902B2 (ja) * | 2009-03-04 | 2012-01-25 | 東京エレクトロン株式会社 | 液処理装置、液処理方法及び記憶媒体 |
JP5584176B2 (ja) * | 2011-07-07 | 2014-09-03 | 東京エレクトロン株式会社 | 現像処理装置、現像処理方法、プログラム及びコンピュータ記憶媒体 |
-
2013
- 2013-09-13 JP JP2013190984A patent/JP5909218B2/ja active Active
-
2014
- 2014-09-05 KR KR1020140119027A patent/KR102161328B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
JP2015056626A (ja) | 2015-03-23 |
KR102161328B1 (ko) | 2020-09-29 |
KR20150031184A (ko) | 2015-03-23 |
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