JP5904294B2 - 基板処理装置及び基板処理方法 - Google Patents
基板処理装置及び基板処理方法 Download PDFInfo
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- JP5904294B2 JP5904294B2 JP2015032834A JP2015032834A JP5904294B2 JP 5904294 B2 JP5904294 B2 JP 5904294B2 JP 2015032834 A JP2015032834 A JP 2015032834A JP 2015032834 A JP2015032834 A JP 2015032834A JP 5904294 B2 JP5904294 B2 JP 5904294B2
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015032834A JP5904294B2 (ja) | 2010-09-06 | 2015-02-23 | 基板処理装置及び基板処理方法 |
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| Application Number | Priority Date | Filing Date | Title |
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| JP2010198888 | 2010-09-06 | ||
| JP2010198888 | 2010-09-06 | ||
| JP2015032834A JP5904294B2 (ja) | 2010-09-06 | 2015-02-23 | 基板処理装置及び基板処理方法 |
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| Application Number | Title | Priority Date | Filing Date |
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| JP2011154043A Division JP2012080077A (ja) | 2010-09-06 | 2011-07-12 | 基板処理装置及び基板処理方法 |
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| Publication Number | Publication Date |
|---|---|
| JP2015111729A JP2015111729A (ja) | 2015-06-18 |
| JP2015111729A5 JP2015111729A5 (enExample) | 2015-07-30 |
| JP5904294B2 true JP5904294B2 (ja) | 2016-04-13 |
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| Application Number | Title | Priority Date | Filing Date |
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| JP2015032834A Active JP5904294B2 (ja) | 2010-09-06 | 2015-02-23 | 基板処理装置及び基板処理方法 |
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| JP (1) | JP5904294B2 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2024022025A (ja) * | 2022-08-05 | 2024-02-16 | 株式会社荏原製作所 | 基板処理装置及びプログラム |
| KR20250140551A (ko) * | 2023-01-27 | 2025-09-25 | 도쿄엘렉트론가부시키가이샤 | 기판 반송 방법, 기판 처리 장치 및 프로그램 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3273754B2 (ja) * | 1997-12-15 | 2002-04-15 | 東京エレクトロン株式会社 | 塗布膜形成装置 |
| JP2003318079A (ja) * | 2002-04-19 | 2003-11-07 | Dainippon Screen Mfg Co Ltd | 基板処理装置および基板処理システム |
| JP4812704B2 (ja) * | 2007-07-10 | 2011-11-09 | 東京エレクトロン株式会社 | 基板処理装置 |
| JP2008098670A (ja) * | 2007-12-21 | 2008-04-24 | Hitachi Kokusai Electric Inc | 半導体製造装置の障害対処システム |
| JP5344734B2 (ja) * | 2007-12-28 | 2013-11-20 | 株式会社Ｓｏｋｕｄｏ | 基板処理装置 |
| JP5059685B2 (ja) * | 2008-05-20 | 2012-10-24 | 株式会社Ｓｏｋｕｄｏ | 基板処理装置および基板処理方法 |
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- 2015-02-23 JP JP2015032834A patent/JP5904294B2/ja active Active
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| JP2015111729A (ja) | 2015-06-18 |
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