JP5894575B2 - テラヘルツ波分光計測装置 - Google Patents
テラヘルツ波分光計測装置 Download PDFInfo
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- JP5894575B2 JP5894575B2 JP2013507263A JP2013507263A JP5894575B2 JP 5894575 B2 JP5894575 B2 JP 5894575B2 JP 2013507263 A JP2013507263 A JP 2013507263A JP 2013507263 A JP2013507263 A JP 2013507263A JP 5894575 B2 JP5894575 B2 JP 5894575B2
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- 238000005259 measurement Methods 0.000 claims description 44
- 230000003287 optical effect Effects 0.000 claims description 31
- 239000000523 sample Substances 0.000 claims description 29
- 230000003595 spectral effect Effects 0.000 claims description 11
- 230000000644 propagated effect Effects 0.000 claims description 2
- 238000001514 detection method Methods 0.000 description 11
- 238000007405 data analysis Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 6
- 239000013078 crystal Substances 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 229910007709 ZnTe Inorganic materials 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 230000001902 propagating effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910000673 Indium arsenide Inorganic materials 0.000 description 1
- 230000005697 Pockels effect Effects 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000001055 reflectance spectroscopy Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002887 superconductor Substances 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
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- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Toxicology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Description
Claims (4)
- レーザ光を出射する光源と、
前記光源から出射されたレーザ光をポンプ光とプローブ光とに分岐する分岐部と、
前記分岐部で分岐した前記ポンプ光の入射によってテラヘルツ波を発生させるテラヘルツ波発生素子と、
前記テラヘルツ波の入射面・出射面及び被測定物の配置面を有し、前記入射面から入射した前記テラヘルツ波を内部で伝播させると共に前記配置面で反射又は透過させて前記出射面から出射させる分光プリズムと、
前記分光プリズムの前記出射面から出射した前記テラヘルツ波と、前記分岐部で分岐した前記プローブ光とが入射し、前記テラヘルツ波と前記プローブ光との間の相関を検出するテラヘルツ波検出素子と、を備え、
前記分光プリズムは、前記配置面を含むプリズム部分と、前記プリズム部分が嵌まり込む溝部が設けられた本体部分とを有し、
前記プリズム部分は、前記本体部分を前記配置面側から見た場合に、前記分光プリズムの内部における前記テラヘルツ波の光路と交差する方向に前記本体部分の幅よりも長く延在すると共に、当該方向に対して一軸にスライド可能となっており、
当該プリズム部分の前記配置面に、前記被測定物が配置される配置領域がスライド方向に沿って複数設けられていることを特徴とするテラヘルツ波分光計測装置。 - 前記プリズム部分の前記配置面に、前記被測定物が配置されない参照領域が更に設けられていることを特徴とする請求項1記載のテラヘルツ波分光計測装置。
- 前記プリズム部分に取手部が設けられていることを特徴とする請求項1又は2記載のテラヘルツ波分光計測装置。
- 前記プリズム部分と前記本体部分との間の一部にスペースが存在していることを特徴とする請求項1〜3のいずれか一項記載のテラヘルツ波分光計測装置。
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JP2013507263A JP5894575B2 (ja) | 2011-03-29 | 2012-02-21 | テラヘルツ波分光計測装置 |
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JP2011072408 | 2011-03-29 | ||
PCT/JP2012/054159 WO2012132647A1 (ja) | 2011-03-29 | 2012-02-21 | テラヘルツ波分光計測装置 |
JP2013507263A JP5894575B2 (ja) | 2011-03-29 | 2012-02-21 | テラヘルツ波分光計測装置 |
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JPWO2012132647A1 JPWO2012132647A1 (ja) | 2014-07-24 |
JP5894575B2 true JP5894575B2 (ja) | 2016-03-30 |
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US (1) | US9696206B2 (ja) |
EP (1) | EP2693200B1 (ja) |
JP (1) | JP5894575B2 (ja) |
WO (1) | WO2012132647A1 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JP5957294B2 (ja) | 2012-05-29 | 2016-07-27 | 浜松ホトニクス株式会社 | プリズム部材、テラヘルツ波分光計測装置、及びテラヘルツ波分光計測方法 |
JP6391921B2 (ja) * | 2013-07-30 | 2018-09-19 | 浜松ホトニクス株式会社 | 波長板及び分割プリズム部材 |
CN104677497B (zh) * | 2015-02-13 | 2017-01-11 | 上海理工大学 | 一种太赫兹波性能的检测装置和方法 |
ITUA20161345A1 (it) * | 2016-03-04 | 2017-09-04 | Eltek Spa | Dispositivo sensore per contenitori di sostanze liquide |
JP7014623B2 (ja) * | 2018-01-29 | 2022-02-01 | 浜松ホトニクス株式会社 | テラヘルツ波分光計測装置 |
CN108931494B (zh) * | 2018-06-28 | 2023-11-21 | 福州大学 | 一种基于高阻硅的太赫兹衰减全反射检测装置及其使用方法 |
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2012
- 2012-02-21 US US14/005,841 patent/US9696206B2/en active Active
- 2012-02-21 WO PCT/JP2012/054159 patent/WO2012132647A1/ja active Application Filing
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- 2012-02-21 JP JP2013507263A patent/JP5894575B2/ja active Active
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Also Published As
Publication number | Publication date |
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EP2693200A1 (en) | 2014-02-05 |
JPWO2012132647A1 (ja) | 2014-07-24 |
US9696206B2 (en) | 2017-07-04 |
EP2693200B1 (en) | 2019-06-12 |
EP2693200A4 (en) | 2014-09-17 |
WO2012132647A1 (ja) | 2012-10-04 |
US20140014840A1 (en) | 2014-01-16 |
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