JP5566826B2 - 全反射分光計測におけるデータ解析方法 - Google Patents
全反射分光計測におけるデータ解析方法 Download PDFInfo
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- JP5566826B2 JP5566826B2 JP2010206866A JP2010206866A JP5566826B2 JP 5566826 B2 JP5566826 B2 JP 5566826B2 JP 2010206866 A JP2010206866 A JP 2010206866A JP 2010206866 A JP2010206866 A JP 2010206866A JP 5566826 B2 JP5566826 B2 JP 5566826B2
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- 238000005259 measurement Methods 0.000 title claims description 40
- 238000007405 data analysis Methods 0.000 title claims description 26
- 238000000034 method Methods 0.000 title claims description 22
- 238000001055 reflectance spectroscopy Methods 0.000 title claims description 9
- 230000003287 optical effect Effects 0.000 claims description 26
- 239000000523 sample Substances 0.000 description 27
- 238000001514 detection method Methods 0.000 description 12
- 238000000691 measurement method Methods 0.000 description 8
- 238000012545 processing Methods 0.000 description 5
- 239000013078 crystal Substances 0.000 description 4
- 230000014509 gene expression Effects 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 229910007709 ZnTe Inorganic materials 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 241000282461 Canis lupus Species 0.000 description 1
- 229910000673 Indium arsenide Inorganic materials 0.000 description 1
- 230000005697 Pockels effect Effects 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000001210 attenuated total reflectance infrared spectroscopy Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 238000012552 review Methods 0.000 description 1
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- 230000003595 spectral effect Effects 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 239000002887 superconductor Substances 0.000 description 1
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Description
Claims (2)
- 全反射面の上に被測定物を配置し、前記全反射面で全反射したテラヘルツ波を計測する全反射分光計測におけるデータ解析方法であって、
前記全反射分光計測によって得られたリファレンス計測結果Trefとサンプル測定結果Tsigとをそれぞれフーリエ変換することによって、リファレンス振幅Rref、リファレンス位相Φref、サンプル振幅Rsig、サンプル位相Φsigをそれぞれ求め、
前記リファレンス振幅Rrefと前記サンプル振幅Rsigとの比P、及び前記リファレンス位相Φrefと前記サンプル位相Φsigとの位相差Δを用いて下記式(1)で得られる値qを用いて前記被測定物の光学定数を導出することを特徴とする全反射分光計測におけるデータ解析方法。
- 前記値qは、フレネルの反射式及びスネルの式と組み合わせて用いられることを特徴とする請求項1記載の全反射分光計測におけるデータ解析方法。
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JP2012063214A JP2012063214A (ja) | 2012-03-29 |
JP5566826B2 true JP5566826B2 (ja) | 2014-08-06 |
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CN103645154B (zh) * | 2013-11-26 | 2015-12-02 | 东莞理工学院 | 一种利用太赫兹光谱信号提取材料光学常数的方法 |
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JP2002005828A (ja) * | 2000-06-20 | 2002-01-09 | Tochigi Nikon Corp | 半導体の不純物濃度検査装置及び検査方法 |
EP1604168B1 (en) * | 2003-03-06 | 2011-07-27 | Zygo Corporation | Profiling complex surface structures using scanning interferometry |
JP3950818B2 (ja) * | 2003-05-29 | 2007-08-01 | アイシン精機株式会社 | 反射型テラヘルツ分光測定装置及び測定方法 |
US8415625B2 (en) * | 2008-04-30 | 2013-04-09 | Hamamatsu Photonics K.K. | Total reflection terahertz wave measurement device |
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