JP5890953B2 - 検査装置 - Google Patents

検査装置 Download PDF

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Publication number
JP5890953B2
JP5890953B2 JP2013202854A JP2013202854A JP5890953B2 JP 5890953 B2 JP5890953 B2 JP 5890953B2 JP 2013202854 A JP2013202854 A JP 2013202854A JP 2013202854 A JP2013202854 A JP 2013202854A JP 5890953 B2 JP5890953 B2 JP 5890953B2
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JP
Japan
Prior art keywords
imaging
illumination
light
image
dimensional
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2013202854A
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English (en)
Japanese (ja)
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JP2014130130A5 (enExample
JP2014130130A (ja
Inventor
健史 新井
健史 新井
有以 三宅
有以 三宅
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nagoya Electric Works Co Ltd
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Nagoya Electric Works Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nagoya Electric Works Co Ltd filed Critical Nagoya Electric Works Co Ltd
Priority to JP2013202854A priority Critical patent/JP5890953B2/ja
Priority to PCT/JP2013/085285 priority patent/WO2014104375A1/ja
Publication of JP2014130130A publication Critical patent/JP2014130130A/ja
Publication of JP2014130130A5 publication Critical patent/JP2014130130A5/ja
Application granted granted Critical
Publication of JP5890953B2 publication Critical patent/JP5890953B2/ja
Expired - Fee Related legal-status Critical Current
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  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2013202854A 2012-12-31 2013-09-30 検査装置 Expired - Fee Related JP5890953B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2013202854A JP5890953B2 (ja) 2013-09-30 2013-09-30 検査装置
PCT/JP2013/085285 WO2014104375A1 (ja) 2012-12-31 2013-12-29 検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013202854A JP5890953B2 (ja) 2013-09-30 2013-09-30 検査装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2012289279 Division 2012-12-31 2012-12-31

Publications (3)

Publication Number Publication Date
JP2014130130A JP2014130130A (ja) 2014-07-10
JP2014130130A5 JP2014130130A5 (enExample) 2015-04-02
JP5890953B2 true JP5890953B2 (ja) 2016-03-22

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ID=51408615

Family Applications (1)

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JP2013202854A Expired - Fee Related JP5890953B2 (ja) 2012-12-31 2013-09-30 検査装置

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JP (1) JP5890953B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102321662B1 (ko) * 2020-08-14 2021-11-05 광운대학교 산학협력단 이미지 백화를 이용한 미소유체 반응 관찰용 마이크로 플랫폼 시스템 및 이를 이용한 미소유체 반응 관찰 방법

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016121878A1 (ja) * 2015-01-29 2016-08-04 株式会社デクシス 光学式外観検査装置、及びこれを用いた光学式外観検査システム
CN110348432A (zh) * 2018-04-01 2019-10-18 印芯科技股份有限公司 光学识别模块
JP7500545B2 (ja) * 2018-09-06 2024-06-17 オルボテック リミテッド 光学検査システム向けマルチモダリティ多重化照明
JP2021018079A (ja) * 2019-07-17 2021-02-15 株式会社リコー 撮像装置、計測装置、及び、計測方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6134011A (en) * 1997-09-22 2000-10-17 Hdi Instrumentation Optical measurement system using polarized light
JP2001089939A (ja) * 1999-09-20 2001-04-03 Toray Ind Inc 潜在高捲縮性ポリエステル系複合糸
JP2004279273A (ja) * 2003-03-17 2004-10-07 Food Safety Innovation Gijutsu Kenkyu Kumiai 異物混入検査方法及びこれに用いる異物混入検査装置
JP5135544B2 (ja) * 2008-03-31 2013-02-06 新日鐵住金株式会社 下面検査装置および下面検査方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102321662B1 (ko) * 2020-08-14 2021-11-05 광운대학교 산학협력단 이미지 백화를 이용한 미소유체 반응 관찰용 마이크로 플랫폼 시스템 및 이를 이용한 미소유체 반응 관찰 방법

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Publication number Publication date
JP2014130130A (ja) 2014-07-10

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