JP5869183B2 - 空気圧力センサを有する半導体パッケージ - Google Patents
空気圧力センサを有する半導体パッケージ Download PDFInfo
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Description
Claims (26)
- 複数のビルドアップ層と、
前記複数のビルドアップ層のうちの1つ以上のビルドアップ層内に配置された空洞と、
前記複数のビルドアップ層内に配置され、前記空洞と前記空洞の上方に配置された電極とを有する、空気圧力センサと、
を含み、
前記空洞は、気密封止された空洞であり、前記空気圧力センサのための基準圧力を提供する、
半導体パッケージ。 - 前記気密封止された空洞は連続ビアリングを含む、請求項1に記載の半導体パッケージ。
- 前記気密封止された空洞が配置された1つ以上の前記ビルドアップ層は、絶縁ビルドアップフィルム層であり、前記連続ビアリングは銅を含む、請求項2に記載の半導体パッケージ。
- 前記空気圧力センサはMEMSデバイスを含む、請求項1に記載の半導体パッケージ。
- 前記MEMSデバイスのダイアフラムは前記空洞を含み、
前記電極は前記MEMSデバイスの吊り部を含む、請求項4に記載の半導体パッケージ。 - 前記MEMSデバイスの前記吊り部は銅を含む、請求項5に記載の半導体パッケージ。
- 前記空洞内に配置された網目形状を有する層を更に含み、
前記層は前記空洞のための構造支持体を提供する、請求項1に記載の半導体パッケージ。 - 前記空洞と前記電極との間に配置された薄金属板を更に含み、
前記薄金属板は前記空洞のための構造支持体を提供する、請求項1に記載の半導体パッケージ。 - バンプレスビルドアップ層(BBUL)基板を更に含む、請求項1に記載の半導体パッケージ。
- 前記BBUL基板はコアレス基板である、請求項9に記載の半導体パッケージ。
- 複数のビルドアップ層を有する基板と、
前記基板内に収容された半導体ダイと、
前記半導体ダイの上方で、前記複数のビルドアップ層のうちの1つ以上のビルドアップ層内に配置された空洞と、
前記複数のビルドアップ層内に配置され、前記空洞と前記空洞の上方に配置された電極とを有する空気圧力センサと、
半導体パッケージの周囲空気圧力に前記空気圧力センサの一部を露出させる1つ以上の開口と、
を含み、
前記電極は前記半導体ダイに電気的に結合され、
前記空洞は、気密封止された空洞であり、前記空気圧力センサのための基準圧力を提供する、
半導体パッケージ。 - 前記基板はバンプレスビルドアップ層(BBUL)基板である、請求項11に記載の半導体パッケージ。
- 前記BBUL基板はコアレス基板である、請求項12に記載の半導体パッケージ。
- 前記気密封止された空洞は連続ビアリングを含む、請求項11に記載の半導体パッケージ。
- 前記気密封止された空洞が配置された1つ以上の前記ビルドアップ層は、絶縁ビルドアップフィルム層であり、
前記連続ビアリングは銅を含む、請求項14に記載の半導体パッケージ。 - 前記空気圧力センサはMEMSデバイスを含む、請求項11に記載の半導体パッケージ。
- 前記MEMSデバイスのダイアフラムは前記空洞を含み、
前記電極は前記MEMSデバイスの吊り部を含む、請求項16に記載の半導体パッケージ。 - 前記MEMSデバイスの前記吊り部は銅を含む、請求項17に記載の半導体パッケージ。
- 前記MEMSデバイスは前記半導体ダイのアクティブ面の近傍に配置され、かつ前記半導体ダイの裏面から遠くに配置される、請求項16に記載の半導体パッケージ。
- 前記空洞内に配置された網目形状を有する層を更に含み、
該層は前記空洞のための構造支持体を提供する、請求項11に記載の半導体パッケージ。 - 前記空洞と前記電極との間に配置された薄金属板を更に含み、
前記薄金属板は前記空洞のための構造支持体を提供する、請求項11に記載の半導体パッケージ。 - 前記空気圧力センサは、共鳴ビームを含み、
当該半導体パッケージは、交流電流との相互作用を通して前記共鳴ビームを駆動するように結合された永久磁石を更に含み、
ダイアフラム撓みは、空気圧力における差異に起因し、前記共鳴ビームに張力を加え、かつ前記共鳴ビームの共鳴周波数を増加させるZ変位を変換する、
請求項11に記載の半導体パッケージ。 - 半導体パッケージの周囲空気圧力を検知する方法であって、
空気圧力センサのダイアフラムと前記空気圧力センサの電極との間の容量性カップリングの範囲を決定する工程であり、前記ダイアフラムは、前記電極の下方且つ前記半導体パッケージのビルドアップ層内に配置された、気密封止された空洞を含み、前記気密封止された空洞は基準圧力を有する、工程と、
前記基準圧力と前記周囲空気圧力との間の差異と前記容量性カップリングの範囲を相互に関連づける工程と、
を含む、
方法。 - 前記周囲空気圧力が前記基準圧力よりも大きいとき、前記ダイアフラムは前記気密封止された空洞の大きさを縮小させ、前記ダイアフラムと前記電極との間の距離を増大させる、請求項23に記載の方法。
- 前記周囲空気圧力が前記基準圧力よりも小さいとき、前記ダイアフラムは前記気密封止された空洞の大きさを増大させ、前記ダイアフラムと前記電極との間の距離を減少させる、請求項23に記載の方法。
- 前記空気圧力センサは、共鳴ビームを含み、
前記方法は、交流電流と永久磁石との相互作用を通して前記共鳴ビームを駆動させる工程を更に含み、
ダイアフラム撓みは、空気圧力における差異に起因し、前記共鳴ビームに張力を加え、かつ前記共鳴ビームの共鳴周波数を増加させるZ変位を変換する、請求項23に記載の方法。
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US20140000377A1 (en) | 2014-01-02 |
CN104321868A (zh) | 2015-01-28 |
KR101693171B1 (ko) | 2017-01-06 |
KR20150006862A (ko) | 2015-01-19 |
WO2014004067A1 (en) | 2014-01-03 |
DE112013003193B4 (de) | 2022-02-10 |
US9200973B2 (en) | 2015-12-01 |
US20160076961A1 (en) | 2016-03-17 |
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